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    Anode assembly for an x-ray tube
    51.
    发明申请
    Anode assembly for an x-ray tube 有权
    用于X射线管的阳极组件

    公开(公告)号：US20040165699A1

    公开(公告)日：2004-08-26

    申请号：US10371401

    申请日：2003-02-21

    Inventor： Thomas W. Rusch ,  Peter C. Smith ,  Steven D. Hansen ,  Paul A. Lovoi ,  Donald G. Pellinen

    IPC: H05H001/00

    CPC classification number: H01J35/08 ,  H01J35/32 ,  H01J2235/081 ,  H01J2235/087 ,  H01J2235/164

    Abstract: A miniature x-ray tube has an anode assembly capable of transmitting x-rays through the anode and over a wide angular range. The anode is in the shape of a cone or truncated cone with an axis on the x-ray tube frame axis, formed of low-Z material with high thermal conductivity for heat dissipation. A target material on the anode body is in a thin layer, which may be approximately 0.5 to 5 microns thick. In one embodiment a tube evacuation exhaust port at the tail end of the anode assembly forms a cavity for a getter, with a pinched-off tubulation at the end of the cavity.

    Abstract translation: 微型x射线管具有能够通过阳极透射x射线并且在宽角度范围内的阳极组件。 阳极呈圆锥形或截锥形，X射线管框架轴上具有轴，由具有高导热性的低Z材料形成，用于散热。 阳极体上的目标材料为薄层，其厚度可为约0.5至5微米。 在一个实施例中，在阳极组件的尾端处的排气排气口形成用于吸气剂的空腔，在空腔的端部处具有夹断的管道。

    Pulsed X-ray reflectometer
    52.
    发明授权
    Pulsed X-ray reflectometer 有权

    公开(公告)号：US06535575B2

    公开(公告)日：2003-03-18

    申请号：US10077125

    申请日：2002-02-14

    Applicant: Boris Yokhin

    Inventor： Boris Yokhin

    IPC: G01T136

    CPC classification number: G01T1/36 ,  G01B15/02 ,  G01B2210/56 ,  G01N23/20 ,  G01N23/201 ,  G21K1/04 ,  H01J35/045 ,  H01J2235/087

    Abstract: Reflectometry apparatus includes a pulsed X-ray source, adapted to irradiate a sample with a sequence of pulses of radiation over a range of angles relative to a surface of the sample. An array of detector elements is positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal indicative of respective charges accumulated by the detector elements due to photons of the radiation that are incident on the elements. Timing circuitry is coupled to the array so as to cause the charges to be cleared from the detector elements immediately before each of the pulses in the sequence, and to cause the signal from the elements to be sampled shortly after each of the pulses.

    Pulsed X-ray reflectometer
    53.
    发明申请
    Pulsed X-ray reflectometer 有权
    脉冲X射线反射计

    公开(公告)号：US20020150209A1

    公开(公告)日：2002-10-17

    申请号：US10077125

    申请日：2002-02-14

    Inventor： Boris Yokhin

    IPC: G01T001/36

    CPC classification number: G01T1/36 ,  G01B15/02 ,  G01B2210/56 ,  G01N23/20 ,  G01N23/201 ,  G21K1/04 ,  H01J35/045 ,  H01J2235/087

    Abstract: Reflectometry apparatus includes a pulsed X-ray source, adapted to irradiate a sample with a sequence of pulses of radiation over a range of angles relative to a surface of the sample. An array of detector elements is positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal indicative of respective charges accumulated by the detector elements due to photons of the radiation that are incident on the elements. Timing circuitry is coupled to the array so as to cause the charges to be cleared from the detector elements immediately before each of the pulses in the sequence, and to cause the signal from the elements to be sampled shortly after each of the pulses.

    Abstract translation: 反射仪装置包括脉冲X射线源，其适于在相对于样品的表面的角度范围内照射具有一定数量的辐射脉冲的样本。 检测器元件的阵列被定位成在角度范围内接收从样本反射的辐射，并产生指示由于入射在元件上的辐射的光子而由检测器元件累积的相应电荷的信号。 定时电路耦合到阵列，以使得电荷在紧接在序列中的每个脉冲之前从检测器元件中清除，并且使得来自元件的信号在每个脉冲之后不久被采样。

    X-ray generator, X-ray inspector and X-ray generation method
    54.
    发明授权
    X-ray generator, X-ray inspector and X-ray generation method 失效
    X射线发生器，X光检查仪和X射线产生方法

    公开(公告)号：US06456690B2

    公开(公告)日：2002-09-24

    申请号：US09739834

    申请日：2000-12-20

    Applicant: Koichi Yamada ,  Takeshige Tanigaki

    Inventor： Koichi Yamada ,  Takeshige Tanigaki

    IPC: G21G400

    CPC classification number: H01J35/14 ,  H01J2235/087

    Abstract: An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an attention on the fact that convergence conditions of an electron beam has a close relationship with a temperature on a surface of an X-ray tube target. The method comprises the steps of measuring the temperature changes at real time by a temperature sensor 14 and automatically controlling a current value of a focusing coil 6.

    Abstract translation: 提供了能够将能量束（例如用于产生X射线的电子束）自动聚焦在目标上的X射线发生器，X射线检查器和X射线产生方法。 通过关注电子束的收敛条件与X射线管靶的表面上的温度有密切关系的事实，开发出了生成，检查和方法。 该方法包括通过温度传感器14实时测量温度变化并自动控制聚焦线圈6的电流值的步骤。

    X-ray generator
    55.
    发明授权
    X-ray generator 有权
    X光发生器

    公开(公告)号：US06282263B1

    公开(公告)日：2001-08-28

    申请号：US09269292

    申请日：1999-04-21

    Applicant: Ulrich Wolfgang Arndt ,  James Victor Percival Long ,  Peter Duncumb

    Inventor： Ulrich Wolfgang Arndt ,  James Victor Percival Long ,  Peter Duncumb

    IPC: H01J3514

    CPC classification number: H01J35/14 ,  G21K7/00 ,  H01J2235/087 ,  H01J2235/1204 ,  H01J2235/1262

    Abstract: An X-ray generator comprises an evacuated and sealed X-ray tube, an electron gun, an X-ray target, an internal electron mask, and an X-ray window consisting of a thin tube of material with low X-ray absorption and high mechanical strength, for example beryllium. The window connects the tube to the target assembly containing the X-ray target. The generator preferably also includes a system for focusing and steering the electron beam onto the target, a cooling system to cool the target material, kinematic mounts to allow precise and repeatable mounting of X-ray devices for focusing the X-ray beam, and X-ray focusing devices of varying configurations and methods. The X-ray generator of the invention produces an X-ray source having a focal spot or line of very small dimensions and is capable of producing a high intensity X-ray beam at a relatively small point of application using a low operating power.

    Abstract translation: X射线发生器包括真空密封的X射线管，电子枪，X射线靶，内部电子掩模和由具有低X射线吸收的薄管材料构成的X射线窗口，以及 高机械强度，例如铍。 窗口将管连接到包含X射线靶的目标组件。 该发生器优选还包括用于将电子束聚焦并转向目标的系统，用于冷却目标材料的冷却系统，运动学安装件以允许用于聚焦X射线束的X射线装置的精确和可重复的安装，以及X 具有不同配置和方法的射线聚焦装置。 本发明的X射线发生器产生具有焦点或非常小尺寸的线的X射线源，并且能够使用较低的操作功率在相对较小的应用点处产生高强度X射线束。

    Transmission type X-ray tube
    56.
    发明授权
    Transmission type X-ray tube 失效
    透射型X射线管

    公开(公告)号：US6044130A

    公开(公告)日：2000-03-28

    申请号：US113371

    申请日：1998-07-10

    Applicant: Tsutomu Inazura ,  Kenji Suzuki

    Inventor： Tsutomu Inazura ,  Kenji Suzuki

    IPC: H01J35/08 ,  H01J35/14 ,  H01J35/16

    CPC classification number: H01J35/16 ,  H01J2235/087 ,  H01J2235/18

    Abstract: A transmission type X-ray tube is provided with a ceramic stem fitted with cathode pins; an output window, the lower surface of which is deposited with a target metal; a ceramic bulb provided between the ceramic stem and the output window; and a focusing electrode provided along the inner surface of the ceramic bulb and which lower end is interposed between the upper surface of the ceramic stem portion and the lower end of the ceramic bulb. With this configuration, not only can the size of the X-ray tube be reduced, but mounting of the focusing electrode can also be made easier, thereby simplifying assembly operations.

    Abstract translation: 透射型X射线管设置有装有阴极针的陶瓷杆; 输出窗口，其下表面沉积有目标金属; 陶瓷灯泡设置在陶瓷杆和输出窗之间; 以及沿着陶瓷灯泡的内表面设置的聚焦电极，并且下端置于陶瓷茎部的上表面和陶瓷灯泡的下端之间。 利用这种结构，不仅可以减小X射线管的尺寸，而且可以使聚焦电极的安装更容易，从而简化组装操作。

    X-ray tube and microelectronics alignment process
    58.
    发明授权
    X-ray tube and microelectronics alignment process 失效
    X射线管和微电子校准工艺

    公开(公告)号：US5627871A

    公开(公告)日：1997-05-06

    申请号：US509532

    申请日：1995-07-31

    Applicant: Chia-Gee Wang

    Inventor： Chia-Gee Wang

    IPC: G03F9/00 ,  H01J35/18 ,  H01J35/32 ,  H05G1/06 ,  H05G1/26

    CPC classification number: G03F9/70 ,  H01J35/18 ,  H01J35/32 ,  H05G1/06 ,  H05G1/26 ,  H01J2235/087 ,  H01J2235/186

    Abstract: A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.

    Abstract translation: 紧凑的x射线管组件包括由陶瓷管状外壳包围的抽真空室，一端连接到室内的发射器的附接电源，用于将电子束聚焦在金属箔靶上的静电装置，端窗 在包括所述目标的另一端，所述金属箔靶的厚度和组成以及所述电子束能被选择以产生预选能量的x射线的聚焦光束。 紧凑的组件在用于对准或定位用于生产微电子部件的层的方法中是有用的。

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