Thin film capacitor, manufacturing method of the same, and electronic component
    51.
    发明申请
    Thin film capacitor, manufacturing method of the same, and electronic component 有权
    薄膜电容器及其制造方法以及电子部件

    公开(公告)号:US20080180880A1

    公开(公告)日:2008-07-31

    申请号:US12010622

    申请日:2008-01-28

    Inventor: Nobuyuki Okusawa

    Abstract: There is disclosed a thin film capacitor and the like capable of suppressing fluctuations of a capacity, increasing a VBD, and accordingly improving a device characteristic and reliability of a product. In electronic components 1 to 4, a capacitor 11 is formed on a flat substrate 51 as a base material including a planarization layer 52 formed on the surface thereof. The capacitor 11 has a structure in which a lower conductor 21 constituted of an underlayer conductor 21a and a conductor 21b, a dielectric film 31 made of alumina or the like, a resin layer J1 mainly formed of a novolak resin or the like, a resin layer J2 mainly formed of a polyimide resin or the like, and an upper conductor 25 constituted of an underlayer conductor 25a and a conductor 25b are formed on the planarization layer 52 of the substrate 51. The resin layer J1 has an opening K1 above the lower conductor 21, and the resin layer J2 is provided with an opening K2 opened more widely than the opening K1.

    Abstract translation: 公开了能够抑制容量的波动,增加BDB的薄膜电容器等,从而提高产品的器件特性和可靠性。 在电子部件1〜4中,在作为基材的平坦基板51上形成电容器11,该基材包括在其表面上形成的平坦化层52。 电容器11具有下层导体21和导体21b构成的下部导体21,由氧化铝等构成的电介质膜31,主要由酚醛清漆树脂等构成的树脂层J 1 ,主要由聚酰亚胺树脂等形成的树脂层J 2和由下层导体25a和导体25b构成的上导体25形成在基板51的平坦化层52上。树脂层J 1 在下导体21上方具有开口K 1,并且树脂层J 2设置有比开口K 1更宽的开口K 2。

    Method of making electromagnetic wave shielded write and read wires on a support for a magnetic media drive
    52.
    发明授权
    Method of making electromagnetic wave shielded write and read wires on a support for a magnetic media drive 失效
    在磁性介质驱动器的支架上制作电磁波屏蔽的写入和读取线的方法

    公开(公告)号:US07325294B2

    公开(公告)日:2008-02-05

    申请号:US10991900

    申请日:2004-11-17

    Applicant: Lin Zhou

    Inventor: Lin Zhou

    Abstract: A method of making electromagnetic wave shielded read and write wires is provided. The method includes forming a bottom insulation layer on a bottom shield layer formed on a substrate. Then, forming electrically conductive wire material into openings in a first forming layer to form first and second read wires and first and second write wires. Forming a top insulation layer on the bottom insulation layer and on the wires. Then, forming a second forming layer on the top insulation layer with first, second, third, fourth and fifth openings down to the top insulation layer. Ion milling portions of the top insulation layer exposed by the openings in the second forming layer down to the bottom shield layer, then removing the second forming layer. Then, forming nonmagnetic electrically conductive middle shield layers in the openings in electrical contact with the bottom shield layer and forming a top shield layer on top of the middle shield layer.

    Abstract translation: 提供了制作电磁波屏蔽读写线的方法。 该方法包括在形成在基板上的底部屏蔽层上形成底部绝缘层。 然后,将导电线材形成在第一成形层中的开口中,以形成第一和第二读取线以及第一和第二写入线。 在底部绝缘层和导线上形成顶层绝缘层。 然后,在第一,第二,第三,第四和第五开口的顶部绝缘层上形成第二形成层,直到顶部绝缘层。 顶部绝缘层的离子铣削部分由第二成形层中的开口暴露于底部屏蔽层,然后移除第二成形层。 然后,在开口中形成与底部屏蔽层电接触的非磁性导电中间屏蔽层,并在中间屏蔽层的顶部上形成顶部屏蔽层。

    Method for manufacturing printed circuit board with thin film capacitor embedded therein
    53.
    发明申请
    Method for manufacturing printed circuit board with thin film capacitor embedded therein 失效
    制造具有薄膜电容器的印刷电路板的制造方法

    公开(公告)号:US20070178412A1

    公开(公告)日:2007-08-02

    申请号:US11700864

    申请日:2007-02-01

    Abstract: In a method for manufacturing a printed circuit board with a thin film capacitor embedded therein, a conductive metal is sputtered via a first mask to form a lower electrode. A dielectric material is sputtered via a second mask to form a dielectric layer. The conductive metal is sputtered via a third mask to form an upper electrode. An insulating layer is stacked on a stack body with the upper electrode formed therein and via holes are perforated from a top surface of the insulating layer to a top surface of the lower electrode and from the top surface of the insulating layer to a top surface of the upper electrode formed on the substrate. Also, the stack body with the via holes formed therein is electrolytically and electrolessly plated.

    Abstract translation: 在其中嵌入有薄膜电容器的印刷电路板的制造方法中,通过第一掩模溅射导电金属以形成下电极。 通过第二掩模溅射介电材料以形成电介质层。 通过第三掩模溅射导电金属以形成上电极。 绝缘层堆积在堆叠体上,上电极形成在其中,并且通孔从绝缘层的顶表面穿孔到下电极的顶表面,并从绝缘层的顶表面到 上电极形成在基板上。 此外,其中形成有通孔的堆叠体是电解和无电镀的。

    Printed circuit board with film capacitor embedded therein and method for manufacturing the same
    57.
    发明申请
    Printed circuit board with film capacitor embedded therein and method for manufacturing the same 有权
    嵌入薄膜电容器的印刷电路板及其制造方法

    公开(公告)号:US20070085166A1

    公开(公告)日:2007-04-19

    申请号:US11582954

    申请日:2006-10-19

    CPC classification number: H05K1/162 H05K3/388 H05K2201/0175 H05K2201/0179

    Abstract: The invention provides a PCB with a thin film capacitor embedded therein and a method for manufacturing the same. The PCB includes a lower electrode formed on an insulating substrate; an amorphous paraelectric film formed on the lower electrode via low temperature film formation; a buffer layer formed on the amorphous paraelectric film; a metal seed layer formed on the buffer layer; and an upper electrode formed on the metal seed layer.

    Abstract translation: 本发明提供一种其中嵌有薄膜电容器的PCB及其制造方法。 PCB包括形成在绝缘基板上的下电极; 通过低温成膜形成在下电极上的非晶顺电膜; 形成在所述非晶正电介质膜上的缓冲层; 形成在缓冲层上的金属种子层; 以及形成在金属籽晶层上的上电极。

    Method of manufacturing thin film capacitor and printed circuit board having thin film capacitor embedded therein
    58.
    发明申请
    Method of manufacturing thin film capacitor and printed circuit board having thin film capacitor embedded therein 审中-公开
    薄膜电容器的制造方法以及嵌入其中的薄膜电容器的印刷电路板

    公开(公告)号:US20070081297A1

    公开(公告)日:2007-04-12

    申请号:US11541676

    申请日:2006-10-03

    Abstract: A method of manufacturing a thin film capacitor includes steps of: performing recrystallization heat treatment on a metal foil; forming a dielectric layer on a top surface of the recrystallized metal foil; heat treating the metal foil and the dielectric layer; and forming an upper electrode on a top surface of the heat-treated dielectric layer. The recrystallization heat treatment prevents the oxidation of a metal foil, by which a dielectric layer can be heat treated at a high temperature, thereby improving electric properties of a thin film capacitor and the reliability of a product.

    Abstract translation: 制造薄膜电容器的方法包括以下步骤:对金属箔进行再结晶热处理; 在再结晶金属箔的顶表面上形成电介质层; 对金属箔和电介质层进行热处理; 以及在所述经热处理的介电层的顶表面上形成上电极。 再结晶热处理防止金属箔的氧化,通过该金属箔可以在高温下对介电层进行热处理,从而提高薄膜电容器的电性能和产品的可靠性。

    Methods and devices for cooling printed circuit boards
    59.
    发明申请
    Methods and devices for cooling printed circuit boards 审中-公开
    冷却印刷电路板的方法和装置

    公开(公告)号:US20070035930A1

    公开(公告)日:2007-02-15

    申请号:US11201771

    申请日:2005-08-10

    Abstract: Methods and devices for cooling printed circuit boards having at least one heat source are disclosed and described. The method can include coating a layer of diamond-like carbon (DLC) over at least a portion of the printed circuit board in order to accelerate movement of heat away from the heat source. Various heat sources may be present on a printed circuit board. In one aspect, the heat source can be an active heat source such as a heat-generating electronic component.

    Abstract translation: 公开并描述了用于冷却具有至少一个热源的印刷电路板的方法和装置。 该方法可以包括在印刷电路板的至少一部分上涂覆类金刚石碳(DLC)层,以加速远离热源的热运动。 各种热源可能存在于印刷电路板上。 一方面,热源可以是诸如发热电子部件的活性热源。

    Embedded thin layer capacitor, layered structure, and fabrication method of the same
    60.
    发明申请
    Embedded thin layer capacitor, layered structure, and fabrication method of the same 审中-公开
    嵌入式薄层电容器,分层结构及其制造方法

    公开(公告)号:US20070004165A1

    公开(公告)日:2007-01-04

    申请号:US11319820

    申请日:2005-12-28

    CPC classification number: H05K1/162 H01G4/10 H05K2201/0175 H05K2201/0179

    Abstract: The present invention relates to a thin layer capacitor including first and second metal electrode layers and a dielectric layer of BiZnNb-based amorphous metal oxide having a dielectric constant of at least 15, interposed between the metal layers, and a layered structure having the same. The layered structure includes a first metal electrode layer formed on a polymer-based composite substrate, a dielectric layer, formed on the first metal electrode layer, and made of BiZnNb-based metal oxide with a dielectric constant of at least 15, and a second metal electrode layer formed on the dielectric layer. The BiZnNb-based amorphous metal oxide in this invention has a high dielectric constant without a thermal treatment for crystallization, useful for fabrication of a thin layer capacitor of a polymer-based layered structure such as a PCB.

    Abstract translation: 本发明涉及包括第一和第二金属电极层的薄层电容器和插入在金属层之间介电常数至少为15的BiZnNb基非晶态金属氧化物的电介质层和具有该介电层的层状结构。 层状结构包括形成在第一金属电极层上的由聚合物系复合基板形成的第一金属电极层,介电层,介电常数为15以上的BiZnNb系金属氧化物,第二金属电极层 形成在电介质层上的金属电极层。 本发明中的BiZnNb系非晶态金属氧化物具有高介电常数,而不需要进行结晶热处理,可用于制造基于聚合物的层状结构如PCB的薄层电容器。

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