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公开(公告)号：US20200346407A1
公开(公告)日：2020-11-05
申请号：US16957957
申请日：2018-12-22
Applicant: NIKON CORPORATION
Inventor： Eric Peter Goodwin , Johnathan Agustin Marquez , Michael Birk Binnard , Brett Herr , Matthew Parker-McCormick Bjork , Paul Derek Coon , Patrick Chang , Motofusa Ishikawa
IPC: B29C64/268 , B29C64/241 , B29C64/153 , B29C64/245 , B29C64/255 , B29C64/314 , B29C64/205 , B29C64/236 , B29C64/277
Abstract: A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.
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62.发明授权公开(公告)号：US10812695B2
公开(公告)日：2020-10-20
申请号：US15264108
申请日：2016-09-13
Applicant: NIKON CORPORATION
Inventor： Jonathan K. Wells , Matthew D. Rosa , Paul Derek Coon , Eric Peter Goodwin
IPC: H04N5/225 , H04N13/243 , G01B11/00 , G03F7/20 , H04N13/239 , H04N13/00
Abstract: A measuring device (233) for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (13), comprises a first image sensor combination (236), a second image sensor combination (237), and a control system (20A). The image sensor combinations (236, 237) capture first images and second images of the target surface (13) over time. The first image sensor combination (236) includes a first image sensor (236A) and a first lens assembly (236B). The second image sensor combination (237) includes a second image sensor (237A), and a second lens assembly (237B) having a second optical axis (237BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (13). The control system (20A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.
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公开(公告)号：US10753732B2
公开(公告)日：2020-08-25
申请号：US16298280
申请日：2019-03-11
Applicant: Nikon Corporation
Inventor： Eric Peter Goodwin
Abstract: System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.
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公开(公告)号：US10719017B2
公开(公告)日：2020-07-21
申请号：US15947459
申请日：2018-04-06
Applicant: Nikon Corporation
Inventor： Eric Peter Goodwin , Daniel Gene Smith
Abstract: Fringe-projection autofocus system devoid of a reference mirror. Contributions to error in determination of a target surface profile caused by air non-uniformities are measured based on multiple measurements of the target surface performed at different wavelengths, and/or angles of incidence, and/or grating pitches and subtracted from the measured profile, rendering the system substantially insensitive to presence of air turbulence. Same optical beams forming a fringe irradiance pattern on target surface are used for measurement of the surface profile and reduction of measurement error by the amount attributed to air turbulence.
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公开(公告)号：US10591826B2
公开(公告)日：2020-03-17
申请号：US15889412
申请日：2018-02-06
Applicant: Nikon Corporation
Inventor： Eric Peter Goodwin
Abstract: An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating. The use of the contraption solves problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head. The contraption is complemented with a birefringent prismatic element positioned across the axis of the contraption between the cuboid and the birefringent lens.
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Patent Agency Ranking
公开(公告)号：US20190107388A1
公开(公告)日：2019-04-11
申请号：US16212224
申请日：2018-12-06
Applicant: Nikon Corporation
Inventor： Daniel Gene Smith , Eric Peter Goodwin
CPC classification number: G01B11/25 , G01B11/0608 , G03F7/70641
Abstract: New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.
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公开(公告)号：US10139492B2
公开(公告)日：2018-11-27
申请号：US15443967
申请日：2017-02-27
Applicant: Nikon Corporation , Nikon Metrology NV
Inventor： Mina A. Rezk , Anthony R. Slotwinski , Daniel G. Smith , Eric Peter Goodwin , Alexander Cooper , Thomas M. Hedges
Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
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公开(公告)号：US09977343B2
公开(公告)日：2018-05-22
申请号：US14480810
申请日：2014-09-09
Applicant: Nikon Corporation
Inventor： Eric Peter Goodwin , Daniel Gene Smith
CPC classification number: G03F7/70641 , G02B7/32 , G02B7/365
Abstract: Fringe-projection autofocus system devoid of a reference mirror. Contributions to error in determination of a target surface profile caused by air non-uniformities measured based on multiple measurements of the target surface performed at different wavelengths, and/or angles of incidence, and/or grating pitches and subtracted from the measured profile, rendering the system substantially insensitive to presence of air turbulence. Same optical beams forming a fringe irradiance pattern on target surface are used for measurement of the surface profile and reduction of measurement error by the amount attributed to air turbulence.
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公开(公告)号：US09618619B2
公开(公告)日：2017-04-11
申请号：US13841021
申请日：2013-03-15
Applicant: Nikon Corporation , Nikon Metrology NV
Inventor： Mina A. Rezk , Anthony R. Slotwinski , Daniel G. Smith , Eric Peter Goodwin , Alexander Cooper , Thomas M. Hedges
CPC classification number: G01S17/325 , G01B9/02007 , G01S7/4812 , G01S7/4817 , G01S7/4818 , G01S7/4917 , G01S7/497 , G01S17/42 , G01S17/66
Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
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公开(公告)号：US09605948B2
公开(公告)日：2017-03-28
申请号：US14736118
申请日：2015-06-10
Applicant: NIKON CORPORATION
Inventor： Eric Peter Goodwin , Zhiqiang Liu
CPC classification number: G01B11/14 , G01D5/34 , G03F7/70775
Abstract: Methodology of measuring a position of a wafer with an encoder directing measurement beam(s) of light towards a wafer area that is being contemporaneously patterned in an exposure apparatus. The Abbe error of such measurement is minimized or even negated by combining the data from first and second measurement signals, one of which is defined as complementary, Abbe-error correcting measurement signal for which the induced Abbe error is either opposite to or at least different from the Abbe error corresponding to another, main measurement signal. The combination of the main and Abbe-error correcting signals is performed with a heterodyne interferometer employing a two-dimensional diffraction grating diffracting each of the measurement beams twice.
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