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    Optical Modulator And Laser Interferometer
    61.
    发明公开
    Optical Modulator And Laser Interferometer 审中-公开

    公开(公告)号：US20240176157A1

    公开(公告)日：2024-05-30

    申请号：US18522741

    申请日：2023-11-29

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Kohei YAMADA ,  Atsushi MATSUO

    IPC: G02B27/10 ,  G01B9/02001

    CPC classification number: G02B27/1086 ,  G01B9/0201

    Abstract: An optical modulator includes: a vibrator configured to perform flexural vibration along a first direction; and a diffraction grating disposed in the vibrator and having a plurality of grooves arranged in parallel along the first direction. A frequency of laser light incident on the diffraction grating is shifted. In addition, it is preferable that the vibrator includes a base portion, a first vibration arm, and a second vibration arm disposed side by side along the first direction and coupled to the base portion, the first vibration arm and the second vibration arm perform the flexural vibration along the first direction, and the diffraction grating is disposed on at least one of the first vibration arm and the second vibration arm.

    SOUND MEASUREMENT METHOD
    62.
    发明公开
    SOUND MEASUREMENT METHOD 审中-公开

    公开(公告)号：US20230288247A1

    公开(公告)日：2023-09-14

    申请号：US18017025

    申请日：2020-07-28

    Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATION

    Inventor： Kenji ISHIKAWA ,  Yoshifumi SHIRAKI ,  Takehiro MORIYA ,  Kenichi HITACHI ,  Atsushi ISHIZAWA ,  Katsuya OGURI

    IPC: G01H9/00 ,  G01B9/02001 ,  H04R23/00

    CPC classification number: G01H9/00 ,  G01B9/0201 ,  H04R23/008

    Abstract: An optical phase modulation amount measurement technology using sound without being affected by noise included in an average light intensity is provided. A sound measurement method includes an interference light generation step of obtaining first light including light subjected to light phase modulation by a sound measurement unit and second light including light subjected to light phase modulation by the sound measurement unit, which differs from the first light, from light emitted from a light source, a first light detection step of obtaining a first electrical signal from the first light, a second light detection step of obtaining a second electrical signal from the second light, and a differential signal generation step of obtaining a differential signal that is a difference between the first electrical signal and the second electrical signal, wherein a phase of the light subjected to light phase modulation included in the first light and a phase of the light subjected to the light phase modulation included in the second light are in an inverted relationship, and an optical phase modulation amount φs by sound is measured as a current Δi of the differential signal expressed by an equation Δi=βIA cos (φs+φ0) (where β is a predetermined constant, IA is an amplitude of an interference fringe, and φ0 is an optical phase modulation amount by an element other than sound).

    THREE-DIMENSIONAL MEASUREMENT DEVICE
    63.
    发明申请
    THREE-DIMENSIONAL MEASUREMENT DEVICE 审中-公开

    公开(公告)号：US20190219379A1

    公开(公告)日：2019-07-18

    申请号：US16363975

    申请日：2019-03-25

    Applicant: CKD Corporation

    Inventor： Hiroyuki Ishigaki ,  Takahiro Mamiya

    IPC: G01B9/02

    CPC classification number: G01B9/02011 ,  G01B9/02 ,  G01B9/0201 ,  G01B11/00 ,  G01B2290/70

    Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights and radiates lights to a measurement object and to a reference surface, and recombines the two lights to emit combined light; a first irradiator that emits first light including first polarized light and entering a first surface; a second irradiator that emits second light including second polarized light and entering a second surface; a first imaging system to which the first output light enters wherein the first output light is emitted from the first surface when the first light enters the first surface; a second imaging system to which the second output light enters wherein the second output light is emitted from the second surface when the second light enters the second surface; and an image processor that performs three-dimensional measurement based on interference fringe images obtained by the first and second imaging systems.

    ARRANGEMENT AND METHOD OF DETERMINING PROPERTIES OF A SURFACE AND SUBSURFACE STRUCTURES
    65.
    发明申请
    ARRANGEMENT AND METHOD OF DETERMINING PROPERTIES OF A SURFACE AND SUBSURFACE STRUCTURES 审中-公开

    公开(公告)号：US20180372476A1

    公开(公告)日：2018-12-27

    申请号：US16061285

    申请日：2015-12-11

    Applicant: UNIVERSITY OF HELSINKI

    Inventor： Ivan KASSAMAKOV ,  Edward HAEGGSTRÖM

    IPC: G01B9/02 ,  G02B27/58

    CPC classification number: G01B9/0209 ,  G01B9/0201 ,  G01B9/02035 ,  G01B9/02067 ,  G02B21/0016 ,  G02B21/0056 ,  G02B27/58 ,  H05B41/34

    Abstract: An arrangement for determining four-dimensional properties of an interface of an object, including a light source includes: a unit for forming photonic jets, a unit for performing large field of view interferometric imaging of the interface and their combination, a unit for passing the light being close to the interface and direct the light to the interface, and an image unit. The arrangement includes a unit for performing phase shifting interferometric imaging of the interface, imaging a unit for receiving light from the interface modulated by e.g. microspheres for forming super-resolution image information by combining light interferometry with the photonic jets, and a processor unit for determining four-dimensional properties of the interface on the basis of the image information formed by the phase shifting interferometric imaging by utilizing effect of the photonic jets. The arrangement also can also include a unit to carry out the measurement using polarized light.

    REFRACTIVE INDEX MEASUREMENT METHOD, REFRACTIVE INDEX MEASUREMENT APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD
    67.
    发明申请
    REFRACTIVE INDEX MEASUREMENT METHOD, REFRACTIVE INDEX MEASUREMENT APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD 审中-公开

    公开(公告)号：US20170315053A1

    公开(公告)日：2017-11-02

    申请号：US15484813

    申请日：2017-04-11

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Tomohiro Sugimoto

    IPC: G01N21/45 ,  G01B9/02

    CPC classification number: G01N21/45 ,  G01B9/0201 ,  G01M11/02 ,  G01M11/0285 ,  G01N21/31 ,  G01N2021/414 ,  G01N2021/458

    Abstract: A refractive index measurement method uses an interference optical system which divides light from a light source having a plurality of discrete wavelengths into test light and reference light, causes the test light transmitted through the target to interfere with the reference light, and detect the interference light. The refractive index measurement method determines a first optical delay amount of the interference optical system so that a first and a second wavelength become adjacent to a wavelength corresponding to an extremal value of a phase of the interference light, measures phases of interference light at the first and second wavelengths at the first optical delay amount, and calculates a phase difference between a plurality of the discrete wavelengths at a predetermined optical delay amount using the first optical delay amount, the phases of the interference light at the first and second wavelengths to calculate the refractive index of the target.

    INSTANTANEOUS PHASE-SHIFT INTERFEROMETER
    69.
    发明申请
    INSTANTANEOUS PHASE-SHIFT INTERFEROMETER 审中-公开
    瞬态相移干涉仪

    公开(公告)号：US20170016711A1

    公开(公告)日：2017-01-19

    申请号：US15190912

    申请日：2016-06-23

    Applicant: MITUTOYO CORPORATION

    Inventor： Kazuhiko KAWASAKI ,  Shinpei MATSUURA

    IPC: G01B9/02 ,  G01B11/24

    CPC classification number: G01B9/0201 ,  G01B9/02 ,  G01B9/02027 ,  G01B11/24 ,  G01B11/2441 ,  G01B2290/70

    Abstract: An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.

    Abstract translation: 瞬时相移干涉仪使用相干长度短于从参考表面反射的光与从测量表面反射的光之间的光程长度差异的光源。 来自光源的光束被分离，并且使用可调延迟光路，第一光束被延迟以引起光路长度的差异，并且与第二光束重叠在相同的光轴上，之后参考光束和 生成测量光束。 在调整期间改变延迟光路的光程长度，分别捕获多个干涉条纹图像，并且在每个干涉条纹图像中获得的干涉条纹的偏移，幅度和相移量中的至少一个 被计算。 基于偏差计算结果，振幅计算结果和相移量计算结果测量被测物体的形状。

    Method and apparatus for generating tomography images
    70.
    发明授权
    Method and apparatus for generating tomography images 有权
    用于产生断层图像的方法和装置

    公开(公告)号：US09541375B2

    公开(公告)日：2017-01-10

    申请号：US13946240

    申请日：2013-07-19

    Applicant: Samsung Electronics Co., Ltd. ,  Korea Advanced Institute Of Science and Technology

    Inventor： Jae-guyn Lim ,  YongKeun Park ,  Jae-duck Jang ,  Hyeon-seung Yu ,  Seong-deok Lee ,  Woo-young Jang

    IPC: G01B11/02 ,  G01B9/02 ,  G01N21/17

    CPC classification number: G01B9/02091 ,  G01B9/0201 ,  G01B9/02083 ,  G01N2021/1787

    Abstract: A method and apparatus are provided to generate tomography images that performs the method. The apparatus and method are configured to determine a basis pattern from modulated phases of incident rays from a spatial light modulator according to a pattern of arranged pixels. The apparatus and method are further configured to perform spatial shift modulation shifting an arrangement of the pixels vertically or horizontally with respect to the basis pattern to obtain shift patterns of the basis pattern. The apparatus and method are configured to generate tomography images for the basis pattern and the shift patterns using spectrum signals of rays obtained from the incident rays passing through the spatial light modulator and entering a subject. The apparatus and method are configured to select a pattern that generates a clearest tomography image of the subject based on the generated tomography images.

    Abstract translation: 提供了一种用于产生执行该方法的断层摄影图像的方法和装置。 该装置和方法被配置为根据排列的像素的图案从空间光调制器的入射光线的调制相位确定基本图案。 该装置和方法还被配置为执行空间移位调制，以相对于基本图案垂直或水平地移位像素的布置，以获得基本图案的移位模式。 该装置和方法被配置为使用从通过空间光调制器的入射光线获得的光线的频谱信号来生成用于基础图案和移位图案的断层图像，并且进入对象。 该装置和方法被配置为基于所生成的断层摄影图像来选择产生对象的最清晰的断层摄影图像的图案。

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