Detector configurations for optical metrology
    61.
    发明授权
    Detector configurations for optical metrology 有权
    用于光学计量的检测器配置

    公开(公告)号:US07667841B2

    公开(公告)日:2010-02-23

    申请号:US12288395

    申请日:2008-10-20

    Applicant: Jon Opsal

    Inventor: Jon Opsal

    CPC classification number: G01B11/0641 G01J4/04 G01N21/211 G01N2021/213

    Abstract: An apparatus is disclosed for obtaining ellipsometric measurements from a sample. A probe beam is focused onto the sample to create a spread of angles of incidence. The beam is passed through a quarter waveplate retarder and a polarizer. The reflected beam is measured by a detector. In one preferred embodiment, the detector includes eight radially arranged segments, each segment generating an output which represents an integration of multiple angle of incidence. A processor manipulates the output from the various segments to derive ellipsometric information.

    Abstract translation: 公开了一种用于从样品获得椭偏测量的装置。 探针光束聚焦在样品上以产生入射角的扩展。 光束通过四分之一波片延迟器和偏振器。 反射光束由检测器测量。 在一个优选实施例中,检测器包括八个径向布置的段,每个段产生代表多个入射角的积分的输出。 处理器处理来自各个段的输出以导出椭偏信息。

    POLARIZATION FILTER UTILIZING BREWSTER'S ANGLE
    62.
    发明申请
    POLARIZATION FILTER UTILIZING BREWSTER'S ANGLE 失效
    极化滤波器利用布鲁斯角的角度

    公开(公告)号:US20100033815A1

    公开(公告)日:2010-02-11

    申请号:US12581411

    申请日:2009-10-19

    Applicant: James PLANT

    Inventor: James PLANT

    CPC classification number: G01J4/04 G01J1/04 G01J1/0425 G02B5/3066 G02B27/285

    Abstract: A polarization filter utilizing Brewster's angle. The polarization filter includes a stimulus receiving body having more than one facet. At least two of the more than one facet being arranged at Brewster's angle (relative to the plane of polarization of the incident stimulus) and positioned in different radial orientations (relative to the incident stimulus) which are adapted to provide differential transmission or reflection of polarized electro-magnetic radiation coming from a common source.

    Abstract translation: 利用布鲁斯特角的偏振滤光片。 偏振滤光器包括具有多于一个刻面的刺激接收体。 多于一个面中的至少两个面以布鲁斯特角度(相对于入射刺激的极化平面)布置并且位于不同的径向取向(相对于入射刺激),其适于提供偏振的差分透射或反射 来自共同来源的电磁辐射。

    On-Chip Polarimetry for High-Throughput Screening of Nanoliter and Smaller Sample Volumes
    63.
    发明申请
    On-Chip Polarimetry for High-Throughput Screening of Nanoliter and Smaller Sample Volumes 有权
    用于高通量筛选纳升级和较小样品体积的片上偏振镜

    公开(公告)号:US20100027008A1

    公开(公告)日:2010-02-04

    申请号:US11666046

    申请日:2005-10-24

    CPC classification number: G01J4/04 G01N21/21

    Abstract: A polarimetry technique for measuring optical activity that is particularly suited for high throughput screening employs a chip or substrate (22) having one or more microfluidic channels (26) formed therein. A polarized laser beam (14) is directed onto optically active samples that are disposed in the channels. The incident laser beam interacts with the optically active molecules in the sample, which slightly alter the polarization or the loser beam as it passes multiple times through the sample. Interference fringe patters (28) are generated by the interaction of the laser beam with the sample and the channel walls. A photodetector (34) is positioned to receive the interference fringe patterns and generate an output signal that is input to a computer or other analyzer (38) for analyzing the signal and determining the rotation of plane polarized light by optically active material in the channel from polarization rotation calculations.

    Abstract translation: 特别适用于高通量筛选的用于测量光学活性的偏振测定技术采用在其中形成有一个或多个微流体通道(26)的芯片或衬底(22)。 偏振激光束(14)被引导到设置在通道中的光学活性样品上。 入射激光束与样品中的光学活性分子相互作用,当样品经过多次时,其稍微改变偏振或失败光束。 干涉条纹图案(28)通过激光束与样品和通道壁的相互作用产生。 定位光电检测器(34)以接收干涉条纹图案并产生输入到计算机或其他分析器(38)的输出信号,用于分析信号并通过光通道材料在通道中确定平面偏振光的旋转, 极化旋转计算。

    RAPID ACQUISITION ELLIPSOMETRY
    64.
    发明申请
    RAPID ACQUISITION ELLIPSOMETRY 失效
    快速获取ELLIPSOMETRY

    公开(公告)号:US20100007882A1

    公开(公告)日:2010-01-14

    申请号:US12170234

    申请日:2008-07-09

    CPC classification number: G02B1/08 G01J4/04 G01N21/211 G02B5/3083 G02B27/286

    Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.

    Abstract translation: 所公开的实施例涉及将线性偏振光赋予空间相关旋转的光学组件。 可以使用一对光学组件将空间相关旋转施加到光学组件之间的区域中的线性偏振光,并且在穿过第二光学组件之后产生空间上独立的旋转。 一对光学组件可以与波片组合使用以允许确定椭圆偏振光束的斯托克斯参数。

    Local non-perturbative remote sensing devices and method for conducting diagnostic measurements of magnetic and electric fields of optically active mediums

    公开(公告)号:US07599062B2

    公开(公告)日:2009-10-06

    申请号:US11900948

    申请日:2007-09-14

    Applicant: Roger Smith

    Inventor: Roger Smith

    CPC classification number: G01J4/04 G01N21/21 G01N2021/1793

    Abstract: Embodiments of the present invention are directed to pulsed polarimeters for conducting remote, non-perturbative diagnostic measurements of inducing fields of a medium demonstrating induced optical activity. In one aspect, a pulse polarimeter includes a light source emitting a polarized light pulse having sufficiently narrow spatial extent at a prescribed wavelength and a light gathering optical system including a light gathering optic having an optic axis directed toward the medium and positioned to collect and collimate a predetermined solid angle of an emission from the medium into a collimated emission beam, while preserving the polarization state of the emission. The pulse polarimeter includes a directional coupler that makes coincident the propagation direction of the polarized light pulse with the optic axis and a polarization detection system for measuring the intensity and determining the polarization state of the collimated emission beam continuously in time as the polarized light pulse transits the medium.

    Measuring apparatus and a measuring method for measuring a polarization characteristic of an optical system
    66.
    发明授权
    Measuring apparatus and a measuring method for measuring a polarization characteristic of an optical system 失效
    用于测量光学系统的偏振特性的测量装置和测量方法

    公开(公告)号:US07548077B2

    公开(公告)日:2009-06-16

    申请号:US11875377

    申请日:2007-10-19

    CPC classification number: G01J4/04 G01J9/02

    Abstract: A measuring apparatus is disclosed which includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the test object and reference light, and measures a polarization characteristic of the test object. The measuring apparatus has a measuring unit for measuring a polarization characteristic matrix in a pupil plane of the test object while the reference light is blocked or fringe scan is performed.

    Abstract translation: 本发明公开了一种测量装置,其包括:干涉仪,用于通过被测对象的光与参考光之间的干涉测量透过测试对象的光的波前,并测量被测对象的极化特性。 测量装置具有测量单元,用于在参考光被阻挡或进行边缘扫描时测量测试对象的光瞳平面中的偏振特性矩阵。

    Modulated polarizer-based polarimeter, and method for determining the polarization state of an optical signal
    67.
    发明申请
    Modulated polarizer-based polarimeter, and method for determining the polarization state of an optical signal 审中-公开
    调制偏振器的偏振计,以及用于确定光信号的偏振状态的方法

    公开(公告)号:US20090128814A1

    公开(公告)日:2009-05-21

    申请号:US11986630

    申请日:2007-11-21

    CPC classification number: G01J4/04

    Abstract: In one embodiment, a polarimeter includes a modulated polarizer, a detector and a processing system. The modulated polarizer is modulated at a modulation frequency and is configured to transmit a portion of an optical signal based on its modulation. The detector is configured to generate a time-varying output signal related to a time-varying power of the transmitted portion of the optical signal. The processing system is configured to i) detect at least three frequency components of the time-varying output signal, and ii) determine the polarization state of the optical signal based on the at least three frequency components.

    Abstract translation: 在一个实施例中,偏振器包括调制的偏振器,检测器和处理系统。 调制的偏振器以调制频率被调制,并且被配置为基于其调制来发送光信号的一部分。 检测器被配置为产生与光信号的发送部分的时变功率相关的时变输出信号。 处理系统被配置为i)检测时变输出信号的至少三个频率分量,以及ii)基于至少三个频率分量来确定光信号的偏振状态。

    METHOD AND SYSTEM FOR STOKES POLARIZATION IMAGING
    68.
    发明申请
    METHOD AND SYSTEM FOR STOKES POLARIZATION IMAGING 有权
    用于STOC偏振成像的方法和系统

    公开(公告)号:US20090079982A1

    公开(公告)日:2009-03-26

    申请号:US12234103

    申请日:2008-09-19

    CPC classification number: G01J4/04

    Abstract: A device and a method for high-speed linear polarization imaging of a scene are disclosed. The device comprises a polarization modulator for modulating the polarization of light emitted from the scene in order to obtain at least three linear polarization states of the light. The polarization modulator comprises a polarizer, a first polarization rotation block comprising a fixed quarter-wave plate and a first liquid crystal operating as a quarter-wave plate, and a second polarization rotation block comprising a second liquid crystal operating as a half-wave plate. Each of the first and second liquid crystals arc switchable between two states, thereby providing the at least three polarization states to the polarization modulator. The device further comprises a sensor adapted to capture image frames of the light from the scene at each polarization state of the polarization modulator.

    Abstract translation: 公开了一种用于场景的高速线性偏振成像的装置和方法。 该装置包括用于调制从场景发射的光的偏振的偏振调制器,以便获得光的至少三个线偏振态。 偏振调制器包括偏振器,包括固定四分之一波长板和作为四分之一波片工作的第一液晶的第一偏振旋转块和包括作为半波片操作的第二液晶的第二偏振旋转块 。 第一和第二液晶中的每一个可在两种状态之间切换,从而向偏振调制器提供至少三种偏振状态。 该装置还包括适于在偏振调制器的每个偏振状态捕获来自场景的光的图像帧的传感器。

    Measuring Apparatus, Measuring Method, and Characteristic Measurement Unit
    69.
    发明申请
    Measuring Apparatus, Measuring Method, and Characteristic Measurement Unit 有权
    测量装置,测量方法和特性测量单元

    公开(公告)号:US20090051916A1

    公开(公告)日:2009-02-26

    申请号:US12087663

    申请日:2006-12-27

    CPC classification number: G01N21/21 G01J4/04

    Abstract: A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.

    Abstract translation: 测量装置包括光强度信息获取部分40,其获取与包含给定频带分量的测量光有关的光强度信息,测量光已被包括在光学系统10中的光学元件和测量对象(或样品 100),以及计算部50,其基于与测量光有关的光强度信息和测量光强度的理论表达式,计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素 光。 光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。 计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

Patent Agency Ranking