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    Accelerometer and methods thereof
    61.
    发明申请
    Accelerometer and methods thereof 失效
    加速计及其方法

    公开(公告)号：US20030079543A1

    公开(公告)日：2003-05-01

    申请号：US10280299

    申请日：2002-10-24

    Inventor： Michael D. Potter

    IPC: G01P015/125

    CPC classification number: G01P15/125 ,  G01P2015/0828

    Abstract: An accelerometer includes a housing with a chamber, a member with a stored static charge, and a pair of electrodes connected to the housing. The member is connected to the housing and extends at least partially across the chamber. The pair of electrodes are each spaced from and on substantially opposing sides of the member from each other and are at least partially in alignment with each other. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member.

    Abstract translation: 加速度计包括具有室的壳体，具有存储的静电荷的构件和连接到壳体的一对电极。 该构件连接到壳体并且至少部分地延伸穿过该腔室。 该对电极每个与构件的基本上相对的两侧彼此间隔开并且至少部分地彼此对准。 该构件可相对于一对电极移动，或者该对电极中的一个可相对于构件移动。

    Semiconductor mechanical sensor
    62.
    发明授权
    Semiconductor mechanical sensor 失效

    公开(公告)号：US06550331B2

    公开(公告)日：2003-04-22

    申请号：US09947409

    申请日：2001-09-07

    Applicant: Tetsuo Fujii ,  Masahito Imai

    Inventor： Tetsuo Fujii ,  Masahito Imai

    IPC: G01P15125

    CPC classification number: B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

    Abstract: A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

    Sensor with controlled surface conductivity
    63.
    发明申请
    Sensor with controlled surface conductivity 审中-公开
    传感器具有受控的表面电导率

    公开(公告)号：US20020139647A1

    公开(公告)日：2002-10-03

    申请号：US09820542

    申请日：2001-03-29

    Inventor： Jonathan J. Bernstein

    IPC: H01H035/02

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0828

    Abstract: Charge transient errors in an inertial sensor are substantially reduced, by forming an ion-implanted, conductive layer on a surface of a dielectric substrate. The substrate has at least two electrodes disposed thereon, and includes a plurality of alkali atoms dispersed near the substrate surface. A proof mass having a conductive, planar surface is supported relative to the substrate, so that the conductive surface of the proof mass is opposite to and nominally parallel with the substrate surface between the electrodes. A plurality of ions are implanted near the substrate surface and between the electrodes. The implantation dose is sufficient to decrease a resistivity of the ion-implanted layer from a relatively high, substantially ion-based resistivity to a relatively low, substantially electron-based resistivity, and to reduce the charge transient time constant of the sensor to the order of milliseconds.

    Abstract translation: 通过在电介质基板的表面上形成离子注入的导电层，可大大减少惯性传感器中的充电瞬态误差。 基板具有设置在其上的至少两个电极，并且包括分散在基板表面附近的多个碱金属原子。 具有导电的平坦表面的检测物质相对于基底被支撑，使得证明物质的导电表面与电极之间的基底表面相反并且标称地平行于基底表面。 在基板表面附近和电极之间注入多个离子。 植入剂量足以将离子注入层的电阻率从相对高的基本上基于离子的电阻率降低到基本上基于电子的电阻率，并且将传感器的充电暂态时间常数降低到 的毫秒。

    Microstructures
    64.
    发明授权
    Microstructures 失效
    微结构

    公开(公告)号：US6436853B2

    公开(公告)日：2002-08-20

    申请号：US79445501

    申请日：2001-02-27

    Applicant: UNIV MICHIGAN

    Inventor： LIN LIWEI ,  CHENG YU-TING ,  NAJAFI KHALIL ,  WISE KENSALL D

    IPC: B81B7/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/10 ,  H01L21/00 ,  H01L23/20

    CPC classification number: H03H9/1057 ,  B81C1/00269 ,  B81C2203/0181 ,  G01P2015/0828 ,  H01L2924/16235 ,  H03H3/0072

    Abstract: A method for making a microstructure assembly, the method including the steps of providing a first substrate and a second substrate; depositing an electrically conductive material on the second substrate; contacting the second substrate carrying the electrically conductive material with the first substrate; and then supplying current to the electrically conductive material to locally elevate the temperature of said electrically conductive material and cause formation of a bond between the first substrate and the second substrate.

    Abstract translation: 一种制造微结构组件的方法，所述方法包括提供第一基板和第二基板的步骤; 在第二基板上沉积导电材料; 使承载导电材料的第二基板与第一基板接触; 然后向导电材料提供电流以局部地升高所述导电材料的温度，并引起在第一衬底和第二衬底之间形成结合。

    Active cover accelerometer
    65.
    发明授权
    Active cover accelerometer 失效
    主动式加速度计

    公开(公告)号：US06401535B1

    公开(公告)日：2002-06-11

    申请号：US09492894

    申请日：2000-01-27

    Applicant: Steven A. Foote

    Inventor： Steven A. Foote

    IPC: G01P1508

    CPC classification number: G01P15/097 ,  G01P1/023 ,  G01P15/0802 ,  G01P2015/0828

    Abstract: A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover or covers in the total active reaction mass.

    Abstract translation: 一种下摆式加速度计，其中所述活性反应物质被下摆地安装在固定的支撑结构外部，并且可以包括所述总活性反应物质中的传感器盖或盖。

    Triaxial angular rate and acceleration sensor
    68.
    发明申请
    Triaxial angular rate and acceleration sensor 失效
    三轴角速度和加速度传感器

    公开(公告)号：US20010042405A1

    公开(公告)日：2001-11-22

    申请号：US09788166

    申请日：2001-02-15

    Inventor： Rand H. Hulsing II

    IPC: G01P015/00

    CPC classification number: G01P15/18 ,  F02G1/044 ,  F02G1/0445 ,  F16L37/24 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01P15/0802 ,  G01P15/097 ,  G01P2015/0828

    Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes of the accelerometers of the second substrate are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along same three but oppositely directed axes. The sensing axes of the first and second substrates are aligned to prevent angular acceleration sensitivity.

    Abstract translation: 三轴传感器基板适用于沿三个正交轴测量移动体的加速度和角速度。 三轴传感器基板包括三个单独的传感器，它们相对于彼此以120度的角度布置在基板的平面中。 每个传感器由两个加速度计形成，其加速度传感器的感测轴相对于基板的平面倾斜一定角度，并进一步沿相反的方向。 速度检测轴因此位于三个正交轴上。 为了减少或消除角加速度灵敏度，可以使用两个基板构造。 每个衬底包括三个加速度计，它们以相对于彼此为120度的角度布置在衬底的平面中。 第一基板的加速度计的感测轴相对于第一基板的平面朝向其中央部分倾斜一定角度，使得它们沿三个倾斜轴线倾斜。 类似地，第二基板的加速度计的感测轴相对于第二基板的平面偏离其中心部分一角度倾斜，使得它们沿着相同的三个但相对定向的轴线。 对准第一和第二基板的感测轴线以防止角加速度灵敏度。

    Capacitance detecting circuit
    69.
    发明授权
    Capacitance detecting circuit 有权
    电容检测电路

    公开(公告)号：US06278283B1

    公开(公告)日：2001-08-21

    申请号：US09164628

    申请日：1998-10-01

    Applicant: Masahiro Tsugai

    Inventor： Masahiro Tsugai

    IPC: G01R2726

    CPC classification number: G01R27/2605 ,  G01P2015/0828

    Abstract: A capacitance detecting circuit which can ensure flexibility in application without restriction imposed by a capacitance arrangement such as a single capacitance, differential capacitance, differential capacitance electrostatic servo and like arrangements, to a great advantage includes an operational amplifier having an inverting input terminal and an output terminal between which a feedback capacitance component is connected, a capacitance sensor having an electrostatic capacitance subjected to change under action of an external force, a switch for electrically charging the capacitance component of the capacitance sensor by connecting a charge/discharge terminal of the capacitance component to a reference voltage at a first clock timing for discharging the feedback capacitance component and switching the charge/discharge terminal to the feedback capacitance component at a second clock timing to transfer electric charge, and a sample-and-hold circuit for converting the transferred electric charge to the sensor output voltage.

    Abstract translation: 能够确保应用灵活性的静电电容检测电路，具有反相输入端子和输出端的运算放大器，具有运算放大器，具有反相输入端子和输出端 连接有反馈电容分量的端子，具有在外力作用下变化的静电电容的电容传感器，通过连接电容元件的充电/放电端子对电容传感器进行电荷充电的开关 到第一时钟定时的参考电压，用于放电反馈电容分量，并且在第二时钟定时将充电/放电端子切换到反馈电容分量以传送电荷;以及采样和保持电路，用于转换转移的电 三次充电到传感器输出电压。

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