Piezoelectric accelerometer with wake function

    公开(公告)号:US11726105B2

    公开(公告)日:2023-08-15

    申请号:US16900185

    申请日:2020-06-12

    Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

    READ CIRCUIT FOR CAPACITIVE SENSORS, CORRESPONDING SENSOR DEVICE AND METHOD

    公开(公告)号:US20230232165A1

    公开(公告)日:2023-07-20

    申请号:US18151207

    申请日:2023-01-06

    CPC classification number: H04R19/04 G01R19/16576 H04R2201/003

    Abstract: A read circuit for capacitive sensors such as a MEMS microphones includes a sensor node configured to be coupled to a capacitive sensor to apply a bias voltage to the sensor and sense the capacitance value of the sensor wherein the voltage at the sensor node is indicative of the capacitance value of the capacitive sensor. A switch is provided between the sensor node and the intermediate node. A shock detector coupled to the sensor node and the switch asserts a shock signal to make the switch conductive in response to a shock applied to the capacitive sensor, and de-asserts the shock signal to make the switch non-conductive with a delay after the end of the shock applied to the capacitive sensor.

    MEMS microphone and method of manufacturing the same

    公开(公告)号:US11689863B2

    公开(公告)日:2023-06-27

    申请号:US16503221

    申请日:2019-07-03

    Inventor: Jong Won Sun

    CPC classification number: H04R19/04 H04R7/02 H04R31/00 H04R2201/003

    Abstract: A MEMS microphone includes a substrate having a cavity, a diaphragm disposed over the substrate to cover the cavity, an anchor extending from and end portion of the diaphragm to surround a periphery of the diaphragm, the anchor being fixed to a lower surface of the substrate to support the diaphragm from the substrate, a back plate disposed over the diaphragm, the back plate being spaced apart from the diaphragm to define an air gap therebetween and having a plurality of acoustic holes, an upper insulation layer covering an upper surface of the back plate to hold the back plate, and a strut positioned on the anchor, the strut being connected to the upper insulation layer and making contact with a lower surface of the anchor to support the upper insulation layer and to be spaced from the diaphragm.

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