-
公开(公告)号:US5259737A
公开(公告)日:1993-11-09
申请号:US724697
申请日:1991-07-02
Applicant: Shinichi Kamisuki , Yasuto Nose , Nobuo Shimizu , Shinichi Yotsuya
Inventor: Shinichi Kamisuki , Yasuto Nose , Nobuo Shimizu , Shinichi Yotsuya
IPC: B81B3/00 , F04B43/04 , F04B53/10 , H01L21/308 , F04B35/04
CPC classification number: B81B3/0005 , F04B43/046 , F04B53/102 , H01L21/3083 , B81B2201/036 , B81B2201/054 , B81B2203/0127
Abstract: A micropump for pumping liquid from an entry channel to an exit channel is disclosed. The micropump is formed in a semiconductor substrate sealed by two glass substrates. The micropump includes first and second chambers and flow channel means coupled between the two chambers. The micropump also includes a valve coupled between the entry channel and the first chamber. The valve includes a flexible valve membrane positioned closer to a second side of the semiconductor substrate than to its first side for causing the valve to be or not to be in contact with the second side of the semiconductor substrate for closing or opening the valve on the glass substrate. Additionally, the micropump includes a diaphragm forming part of a flexible wall of the second chamber and positioned closer to the second side of the semiconductor substrate than to its first side. The diaphragm is responsive to external pressure for causing liquid to be pumped from the entry channel to the exit channel. Thus, the height of the valve is reduced, preventing deformation due to strength such as its own weight and may impact due to a dropping. As a result, the valve sealing is improve on the glass substrate. Therefore, the micropump can accurately discharge a small quantity of liquid.
Abstract translation: 公开了一种用于将液体从进入通道泵送到出口通道的微型泵。 微型泵形成在由两块玻璃基板密封的半导体基板中。 微型泵包括连接在两个室之间的第一和第二室和流动通道装置。 微型泵还包括连接在入口通道和第一室之间的阀。 阀包括位于比半导体衬底的第二侧更靠近第一侧的柔性阀膜,用于使阀与半导体衬底的第二侧接触或不与第二侧接触,以关闭或打开阀 玻璃基板。 此外,微型泵包括形成第二室的柔性壁的一部分并且比其第一侧更靠近半导体衬底的第二侧的膜片。 隔膜响应于外部压力,以使液体从入口通道泵送到出口通道。 因此,阀的高度减小,防止由于其自身重量等强度而引起的变形,并且可能由于跌落而撞击。 结果,玻璃基板上的阀密封得到改善。 因此,微型泵可以精确地排出少量的液体。
-
公开(公告)号:US12044235B2
公开(公告)日:2024-07-23
申请号:US17386475
申请日:2021-07-27
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Hao-Jan Mou , Ching-Sung Lin , Chin-Chuan Wu , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo , Chin-Wen Hsieh
CPC classification number: F04B53/20 , F04B43/043 , B81B2201/036
Abstract: A filtration and purification device includes a main body and one or more filtration passage layer. A plurality of purification chambers is disposed in the filtration passage layer. Each of the purification chambers has a flow-guiding unit, a filtration unit, a gas sensor, and an outlet valve. The flow-guiding unit introduces the gas into the purification chamber, the filtration unit filters the gas, and the gas sensor determines that if the filtered gas reaches a threshold for breathing so as to determine to open the outlet valve to discharge the gas out of the filtration and purification device.
-
73.
公开(公告)号:US20230212002A1
公开(公告)日:2023-07-06
申请号:US18182758
申请日:2023-03-13
Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. , Arioso Systems GmbH
Inventor: Anton MELNIKOV , Lutz EHRIG , Hermann SCHENK
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B2201/036 , B81B2201/0257 , B81B2203/0163 , B81B2203/0315 , B81B2203/04 , B81B2203/051
Abstract: An MEMS device includes a substrate with a substrate plane, a mass element having a rest position and configured to perform a deflection from the rest position parallel to the substrate plane and in a fluid surrounding the mass element. Further, the MEMS device includes a spring arrangement that is coupled between the substrate and the mass element and configured to deform based on the deflection. An actuator structure is provided that is coupled to the mass element by means of a coupling and configured to apply a force to the mass element by means of the coupling to cause the deflection and a movement of the fluid.
-
74.
公开(公告)号:US20180179048A1
公开(公告)日:2018-06-28
申请号:US15843332
申请日:2017-12-15
Inventor: Harald SCHENK , Holger CONRAD , Matthieu GAUDET , Klaus SCHIMMANZ , Sergiu LANGA , Bert KAISER
CPC classification number: B81B3/0021 , B81B2201/0257 , B81B2201/036 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0136 , B81B2203/019 , B81B2203/051 , B81C1/00142 , B81C1/0015 , B81C1/00158 , H04R1/023 , H04R1/08 , H04R9/02 , H04R15/00 , H04R17/00 , H04R19/005 , H04R23/002 , H04R2201/003 , H04R2499/11
Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
-
公开(公告)号:US09896327B2
公开(公告)日:2018-02-20
申请号:US15158947
申请日:2016-05-19
Applicant: INVENSENSE, INC.
Inventor: Matthew Julian Thompson
IPC: H01L29/00 , B81B3/00 , H01L41/113
CPC classification number: B81B3/0021 , B81B7/0048 , B81B7/0051 , B81B2201/0264 , B81B2201/036 , B81B2203/0307 , B81B2203/0315 , B81B2207/09 , H01L41/113 , H01L41/1132 , H01L41/1134
Abstract: A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.
-
公开(公告)号:US20180010589A1
公开(公告)日:2018-01-11
申请号:US15712458
申请日:2017-09-22
Applicant: Innovative Micro Technology
Inventor: Benedikt ZEYEN
CPC classification number: F04B19/006 , B81B3/0021 , B81B2201/0264 , B81B2201/032 , B81B2201/036 , B81C1/00182 , F04B17/003 , F04B43/043 , G01L9/0042 , G01L9/0054
Abstract: A microfabricated fluid pump is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied. The force may be provided by an embedded layer of piezoelectric material. Embedded strain gauges may allow self-sensing and convenient, precise operational control.
-
公开(公告)号:US20170334709A1
公开(公告)日:2017-11-23
申请号:US15158947
申请日:2016-05-19
Applicant: INVENSENSE, INC.
Inventor: Matthew Julian Thompson
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B7/0048 , B81B7/0051 , B81B2201/0264 , B81B2201/036 , B81B2203/0307 , B81B2203/0315 , B81B2207/09 , H01L41/113 , H01L41/1132 , H01L41/1134
Abstract: A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.
-
公开(公告)号:US20160193407A1
公开(公告)日:2016-07-07
申请号:US15015627
申请日:2016-02-04
Applicant: Cam Med LLC
Inventor: Yanzhe Qin , Zhifei Ge
CPC classification number: A61M5/14248 , A61M5/14586 , A61M5/16881 , A61M39/24 , A61M2005/14252 , A61M2205/3334 , A61M2205/35 , A61M2205/581 , A61M2205/582 , A61M2207/00 , B32B37/12 , B32B2535/00 , B81B2201/036 , B81C1/00158 , B81C2201/034 , F04B43/043 , F04B53/10 , F16K2099/008 , F16K2099/0094
Abstract: A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for to example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.
Abstract translation: 用于将一种或多种药物可控地精确皮下递送给患者的柔性贴剂泵包括层压层状结构。 泵可以具有刚性贮存器层,其包括设置在柔性材料中的多个刚性储存器; 柔性微流体层,其包括用于密封刚性贮存器的柔性膜,连接刚性储存器的微流体通道网络和对应于刚性储存器的多个入口和/或出口阀; 以及包括多个单独寻址的致动器的柔性刚性电子电路层。 在操作中,刚性贮存器可以包含在适当的时间以精确的体积分配的药剂,例如由于顺应性膜或其它致动元件的位移引起的地址储存器中的压力变化。
-
79.
公开(公告)号:US09216899B2
公开(公告)日:2015-12-22
申请号:US13862616
申请日:2013-04-15
Applicant: General Electric Company
Inventor: Mehmet Arik , Stanton Earl Weaver
IPC: F04B45/047 , B81B7/00 , H01L23/467 , B81C1/00 , H01L41/09
CPC classification number: B81B7/0093 , B81B2201/036 , B81B2201/058 , B81B2203/0127 , B81C1/00158 , F04B45/047 , H01L23/467 , H01L41/0973 , H01L2924/0002 , H01L2924/00
Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
Abstract translation: 微机电(MEM)合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底,使得第一开口形成在半导体衬底的第一表面中,并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜,其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸,以及一对致动器元件,其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。
-
公开(公告)号:US20150183633A1
公开(公告)日:2015-07-02
申请号:US14503252
申请日:2014-09-30
Applicant: California Institute of Technology
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: B81B3/00
CPC classification number: B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract translation: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
-
-
-
-
-
-
-
-
-