公开(公告)号：US20150185468A1

公开(公告)日：2015-07-02

申请号：US14215088

申请日：2014-03-17

Applicant: LITE-ON IT CORPORATION

Inventor： Chia-Hao Hsu ,  Yu-Nan Tsai

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B2201/042 ,  B81C99/003 ,  G02B26/105

Abstract: The invention provides a driving calibration apparatus of an electrostatic MEMS scanning mirror and a driving calibration method thereof The driving calibration method includes the following steps. Different reference voltages are sequentially set to drive a plane mirror of the electrostatic MEMS scanning mirror to swing. Projection positions on a projected surface corresponding to the reference voltages that the laser beam projects to are determined. A driving lookup table is established according to the reference voltages and the corresponding projection positions. Calibrated driving voltages corresponding to ideal projection positions are determined according to the driving lookup table. The pane mirror is driven to swing according to the calibrated driving voltages.

Abstract translation: 本发明提供静电MEMS扫描镜的驱动校准装置及其驱动校准方法。驱动校准方法包括以下步骤。 依次设置不同的参考电压以驱动静电MEMS扫描镜的平面镜摆动。 确定与激光束投射到的参考电压相对应的投影表面上的投影位置。 根据参考电压和相应的投影位置建立驱动查找表。 根据驱动查找表确定对应于理想投影位置的校准驱动电压。 根据校准的驱动电压驱动窗格反射镜进行摆动。

公开(公告)号：US20150168715A1

公开(公告)日：2015-06-18

申请号：US14564237

申请日：2014-12-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H02N1/00 ,  H04N9/31

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

Abstract translation: 静电驱动的振荡结构包括第一定子子区域，第二定子子区域，第一转子子区域和第二转子子区域。 安装到第一和第二转子子区域上的扭转弹性元件限定了旋转轴线。 移动元件联接到扭转弹性元件。 定子子区域静电耦合到移动元件上的各个致动区域。 定子子区域呈现结构不对称的元件，使得第一定子子区域和第一致动区域之间的静电耦合表面与第二定子子区域和第二致动区域之间的静电耦合表面不同。

公开(公告)号：US09052510B2

公开(公告)日：2015-06-09

申请号：US13134021

申请日：2011-05-25

Applicant: Steffi Lindenkreuz ,  Gerhard Kiesewetter ,  Stefan Pinter ,  Joerg Muchow

Inventor： Steffi Lindenkreuz ,  Gerhard Kiesewetter ,  Stefan Pinter ,  Joerg Muchow

IPC: G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2207/07 ,  Y10T29/49826

Abstract: A micromechanical component has a holding device and an adjustable component, which is adjustable with respect to the holding device at least from a first position into a second position, and which is connected via at least one spring to the holding device. The micromechanical component also includes at least one silicide-containing line segment situated on the at least one spring.

Abstract translation: 微机械部件具有保持装置和可调部件，其可相对于保持装置至少从第一位置调整到第二位置，并且经由至少一个弹簧连接到保持装置。 微机械部件还包括位于至少一个弹簧上的至少一个含硅化物的线段。

公开(公告)号：US20150066161A1

公开(公告)日：2015-03-05

申请号：US14471809

申请日：2014-08-28

Applicant: Mohamad IYAD AL DIBS

Inventor： Mohamad IYAD AL DIBS

IPC: G05B11/01

CPC classification number: B81B7/008 ,  B81B2201/042 ,  B81B2207/03

Abstract: A controller for a micromechanical actuator, and corresponding actuating system, micro-mirror system and method, including a first input for a reference signal, a second input for a measuring signal denoting a recorded response to a control signal, a first controller element to filter/attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered/attenuated reference signal, a second controller element to modify the received measuring signal to minimize the quality of the first/further modes by processing the received measuring signal and to output a modified measuring signal, a third controller element to minimize deviation between the filtered/attenuated reference and received measuring signals and to output a minimized reference signal, a fourth controller element to rotate the phase of the difference between the minimized reference and modified measuring signals for at least one predefined frequency and to transmit the modified reference as the control signal.

Abstract translation: 用于微机械致动器的控制器和相应的致动系统，微镜系统和方法，包括用于参考信号的第一输入端，用于表示对控制信号的记录响应的测量信号的第二输入端，用于滤波的第一控制器元件 /衰减接收到的参考信号中的预定频率模式和/或预定义的频率分量并输出滤波/衰减的参考信号，第二控制器元件来修改所接收的测量信号，以通过处理接收到的参考信号来最小化第一/另外模式的质量 测量信号并输出​​修改的测量信号，第三控制器元件，以最小化滤波/衰减的参考和接收的测量信号之间的偏差并输出最小化的参考信号;第四控制器元件，用于旋转最小化参考值之间的差的相位 以及用于至少一个预定义频率的修改的测量信号和反相 修改参考作为控制信号。

公开(公告)号：US20150040368A1

公开(公告)日：2015-02-12

申请号：US14361392

申请日：2012-09-28

Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

Inventor： Hans Joachim Quenzer ,  Ulrich Hofmann ,  Vanessa Stenchly

IPC: G02B27/00 ,  G02B26/08 ,  B81C1/00 ,  G02B1/11

CPC classification number: G02B27/0006 ,  B81B2201/042 ,  B81C1/00317 ,  B81C1/00793 ,  G02B1/118 ,  G02B5/0242 ,  G02B5/0278 ,  G02B26/0833 ,  G02B26/0841 ,  Y10T29/49826

Abstract: The method according to the invention is used for producing optical components, in particular covers for encapsulating micro-systems, wherein at least one reinforcing element, which is produced before being arranged, is arranged on a first substrate, as a result of which a stack is produced. This stack is heated after being connected to a second substrate, as a result of which the first substrate is deformed such that at least one region, covered by the reinforcing element, of the first substrate is moved and/or is inclined or the first substrate is brought into contact with the reinforcing element. In an alternative method according to the invention, the reinforcing element is arranged on the second substrate, wherein this stack is then connected to the first substrate. The first substrate is subsequently heated and deformed such that a region of the first substrate is brought into contact with the reinforcing element.

Abstract translation: 根据本发明的方法用于制造光学部件，特别是用于封装微系统的盖，其中在布置之前产生的至少一个加强元件布置在第一基板上，结果是堆叠 生产。 该叠层在与第二基板连接之后被加热，其结果是第一基板变形使得第一基板的被增强元件覆盖的至少一个区域移动和/或倾斜，或者第一基板 与增强元件接触。 在根据本发明的替代方法中，加强元件布置在第二基板上，其中该堆叠然后连接到第一基板。 随后第一衬底被加热和变形，使得第一衬底的区域与增强元件接触。

公开(公告)号：US20150022872A1

公开(公告)日：2015-01-22

申请号：US14382734

申请日：2013-02-21

Applicant: Lemoptix SA

Inventor： Faouzi Khechana ,  Nicolas Abele

IPC: G02B26/08 ,  B81C3/00

CPC classification number: G02B26/085 ,  B81B7/007 ,  B81B2201/042 ,  B81B2207/098 ,  B81C1/00214 ,  B81C1/00873 ,  B81C3/005 ,  B81C2203/054 ,  B81C2203/057 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/008 ,  H01L2224/48091 ,  H01L2924/1461 ,  H05K1/0269 ,  H05K1/0281 ,  H05K1/118 ,  H05K1/189 ,  H05K3/328 ,  H05K3/34 ,  H05K2201/083 ,  H05K2201/10083 ,  H05K2203/049 ,  Y10T29/4913 ,  H01L2924/00014 ,  H01L2924/00

Abstract: According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

Abstract translation: 根据本发明，提供了一种制造MEMS微镜组件（250）的方法，包括将PCB板（205）安装在金属板（206）上的步骤，将MEMS器件（240）安装在PCB上 板（205），其中MEMS器件（240）包括MEMS管芯（241）和磁体（230）。

公开(公告)号：US08883021B2

公开(公告)日：2014-11-11

申请号：US13465928

申请日：2012-05-07

Applicant: Yi-Hsien Chang ,  Chun-Ren Cheng ,  Yi-Shao Liu ,  Allen Timothy Chang ,  Ching-Ray Chen ,  Yeh-Tseng Li ,  Wen-Hsiang Lin

Inventor： Yi-Hsien Chang ,  Chun-Ren Cheng ,  Yi-Shao Liu ,  Allen Timothy Chang ,  Ching-Ray Chen ,  Yeh-Tseng Li ,  Wen-Hsiang Lin

IPC: B23P15/00 ,  C03C25/00 ,  C23F1/00 ,  H01B13/00

CPC classification number: B81C1/00349 ,  B81B2201/042 ,  B81C1/00111 ,  B81C1/00206 ,  B81C1/00214 ,  B82Y20/00 ,  G01N27/44791

Abstract: A method of forming of MEMS nanostructures includes a portion of a substrate is recessed to form a plurality of mesas in the substrate. Each of the plurality of mesas has a top surface and a sidewall surface. A light reflecting layer is deposited over the substrate thereby covering the top surface and the sidewall surface of each mesa. A protection layer is formed over the light reflecting layer. An ARC layer is formed over the protection layer. An opening in a photo resist layer is formed over the ARC layer over each mesa. A portion of the ARC layer, the protection layer and the light reflecting layer are removed through the opening to expose the top surface of each mesa. The photo resist layer and the ARC layer over the top surface of each mesa are removed.

Abstract translation: MEMS纳米结构的形成方法包括：衬底的一部分被凹入以在衬底中形成多个台面。 多个台面中的每一个具有顶表面和侧壁表面。 光反射层沉积在衬底上，从而覆盖每个台面的顶表面和侧壁表面。 在光反射层上形成保护层。 在保护层上形成ARC层。 在每个台面上的ARC层上形成光致抗蚀剂层的开口。 通过开口去除ARC层，保护层和光反射层的一部分以暴露每个台面的顶表面。 去除每个台面的顶表面上的光致抗蚀剂层和ARC层。

公开(公告)号：US20140327946A1

公开(公告)日：2014-11-06

申请号：US14361472

申请日：2012-11-28

Applicant: Innoluce B.V.

Inventor： Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop ,  Matthijs Alexander Gerard Suijlen

IPC: G02B26/10 ,  B81C1/00 ,  G02B26/08

CPC classification number: G02B26/10 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  B81C1/00134 ,  B81C1/00666 ,  B81C2201/0147 ,  G02B26/0833 ,  G02B26/0841

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.

Abstract translation: 提供了一种MEMS微镜（30），其包括镜体（50），所述镜体围绕围绕由镜主体限定的平面延伸的旋转轴线（58）可旋转地布置在镜框架（60）中。 旋转轴线延伸穿过镜体的第一和第二相互相对的端部（51,53）。 反射镜具有反射的第一主表面（55）并且与第一主表面相对，第二主表面（57）设置有第一和第二对加强梁。 一对加强梁（91a，91b）从远离旋转轴线的相反方向从第一端部（51）延伸。 第二对加强梁（93a，93b）从第二端部（53）沿与旋转轴线相反的相反方向延伸。 所述第一对的加强梁朝向所述第二对中的相应的一对延伸。

公开(公告)号：US08873128B2

公开(公告)日：2014-10-28

申请号：US13377667

申请日：2010-07-06

Applicant: Holger Conrad ,  Thomas Grasshoff ,  Denis Jung ,  Thilo Sandner

Inventor： Holger Conrad ,  Thomas Grasshoff ,  Denis Jung ,  Thilo Sandner

IPC: G02B26/00 ,  G02B26/10

CPC classification number: G02B26/0833 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/051 ,  G02B26/0841

Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.

Abstract translation: 一种微机械镜装置，包括形成平移反射镜的镜板（1），所述平板镜经由至少一个保持元件（2）连接，优选地两个或更多个保持元件连接到框架结构（3），并且可平移相对移动 该框架结构的特征在于，从外边缘（5）观察，至少一个保持元件（2）的连接区域（4），优选地具有所有保持元件与镜板（1） 的镜板朝向镜板的中心（6）。

公开(公告)号：US20140310914A1

公开(公告)日：2014-10-23

申请号：US14207796

申请日：2014-03-13

Applicant: RAVIV ERLICH ,  YUVAL GERSON

Inventor： RAVIV ERLICH ,  YUVAL GERSON

IPC: E05D1/02 ,  B81C1/00

CPC classification number: F16C11/12 ,  B81B3/0043 ,  B81B2201/0235 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0163 ,  B81C1/0015 ,  B81C1/00198 ,  B81C1/00523 ,  B81C2201/013 ,  E05D1/02 ,  E05D7/00 ,  E05D11/0081 ,  F16F1/48 ,  F16F2224/025 ,  F16F2226/00 ,  F16F2226/042 ,  G01C19/02 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G02B26/0833 ,  G02B26/105 ,  Y10T16/522 ,  Y10T16/525 ,  Y10T29/24 ,  Y10T29/25

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract translation: 机械装置包括由刚性弹性材料制成的长而窄的元件。 刚性框架构造成锚固附接到框架的元件的至少一个端部并且限定沿着梁和框架之间的元件纵向延伸的间隙，使得元件在间隙内自由移动 。 与刚性弹性材料不同的固体填充材料填充元件和框架之间的间隙的至少一部分，以便允许元件在间隙内的第一移动模式，同时抑制不同的第二模式 运动。