Improved Microvalve Device
    72.
    发明申请
    Improved Microvalve Device 有权
    改进的微型阀装置

    公开(公告)号:US20110127455A1

    公开(公告)日:2011-06-02

    申请号:US13058146

    申请日:2009-07-09

    Inventor: Harry Hunnicutt

    Abstract: A microvalve device includes a body, a valve element supported for movement relative to the body, and an actuator operatively coupled to the valve element for moving the valve element in a normal range of travel. A travel limiting structure operatively cooperates with at least one of the valve element and the actuator to effectively limit the magnitude of movement of the valve element or the actuator outside the normal range of travel to prevent failure of the body, the valve element, or the actuator due to exceeding failure stress limits. A method of forming a microvalve with such a travel limiting structure is also disclosed.

    Abstract translation: 微型阀装置包括主体,被支撑用于相对于主体运动的阀元件,以及可操作地联接到阀元件的致动器,用于在正常行驶范围内移动阀元件。 行程限制结构与阀元件和致动器中的至少一个可操作地配合以有效地限制阀元件或致动器在正常行程范围内的运动的大小,以防止阀体,阀元件或 由于超过故障应力极限,执行器。 还公开了一种用这种行程限制结构形成微型阀的方法。

    Hysteretic mems thermal device and method of manufacture
    73.
    发明申请
    Hysteretic mems thermal device and method of manufacture 有权
    滞后装置及制造方法

    公开(公告)号:US20090201119A1

    公开(公告)日:2009-08-13

    申请号:US12318634

    申请日:2009-01-05

    Applicant: Paul J. Rubel

    Inventor: Paul J. Rubel

    Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

    Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中,而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时,它加热多个光束,使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时,它们可以以不同的轨迹移动,在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触,并在衬底表面上提供另一个固定的电触点,MEMS滞后致动器可形成可靠的电开关,其制造和操作相对简单。

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