公开(公告)号：US07088451B2

公开(公告)日：2006-08-08

申请号：US11256764

申请日：2005-10-24

Applicant: Abdurrahman Sezginer

Inventor： Abdurrahman Sezginer

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02044 ,  G01B9/02069 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2210/56 ,  G01B2290/70 ,  G01J3/453

Abstract: A phase-sensitive interferometric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.

Abstract translation: 相敏干涉测量宽带反射计包括用于产生光束的照明源。 分束器或其他光学元件将光束分成探测光束和参考光束部分。 探测光束被被测物体反射，然后用参考光束重新连接。 两个光束的组合产生干涉图案，其可以通过改变由探针或参考光束行进的路径的长度来调制。 组合光束由光谱仪接收和分析。

公开(公告)号：US07061623B2

公开(公告)日：2006-06-13

申请号：US10647742

申请日：2003-08-25

Applicant: Mark P. Davidson

Inventor： Mark P. Davidson

IPC: G01B9/02

CPC classification number: G03F7/70633 ,  G01J3/453 ,  G01N21/95684

Abstract: An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

Abstract translation: 干涉光谱仪可以同时测量多个波长和角度上的镜面散射。 光谱仪器包括由科勒照明器照明的干涉显微镜和摄像机，其用于对显微镜物镜的后焦面进行成像，同时路径长度差在参考路径和对象路径之间变化。 多通道傅里叶分析将合成的强度信息转换为镜面反射率数据作为波长的函数。 这种大量的测量数据提供了一种更敏感的散射测量工具，在测量半导体器件上的小图案以及测量这些器件上的覆盖层方面具有卓越的性能。

公开(公告)号：US20060119856A1

公开(公告)日：2006-06-08

申请号：US11293931

申请日：2005-12-05

Applicant: Jun Koshoubu

Inventor： Jun Koshoubu

IPC: G01B9/02

CPC classification number: G01J3/453 ,  G01J3/2889 ,  G02B21/0096

Abstract: A microscope comprising: a light sampler for collecting light from a measurement area of a sample; a multi-element detector having a plurality of photoelectric elements, for detecting the light collected by the light sampler, each photoelectric element corresponding to a minute measurement region in the measurement area with one-to-one correspondence; a Fourier transform spectrophotometer as a spectroscope; a data sampler for concurrently sampling intensity data sent from each photoelectric element of the multi-element detector at a timing determined by the Fourier transform spectrophotometer; and a data processor for obtaining time-resolved spectrum data for each minute measurement region according to temporally changed interference light data obtained by the data sampler.

Abstract translation: 一种显微镜，包括：用于收集来自样品的测量区域的光的光采样器; 具有多个光电元件的多元件检测器，用于检测由光采样器收集的光，每个光电元件对应于测量区域中的微小测量区域与一一对应; 傅里叶变换分光光度计作为分光镜; 数据采样器，用于在由傅里叶变换分光光度计确定的时刻同时采样从多元素检测器的每个光电元件发送的强度数据; 以及数据处理器，用于根据由数据采样器获得的时间上改变的干涉光数据，为每个微小测量区域获得时间分辨的光谱数据。

公开(公告)号：US20050248769A1

公开(公告)日：2005-11-10

申请号：US10521516

申请日：2002-07-15

Applicant: Thilo Weitzel

Inventor： Thilo Weitzel

IPC: G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/32 ,  G01J3/36 ,  G01J3/45 ,  G01J3/453 ,  G01B9/02

CPC classification number: G01J3/453

Abstract: The present invention relates to an apparatus and a method for optical spectroscopy and for optical sensory technology and to the use of the apparatus. An apparatus having high spectral resolution with simultaneously comparatively low demands on the quality of the optical components is provided in that the apparatus for optical spectroscopy comprises means for the generation of an interference pattern, means for the coupling of the incoming light field to be examined such that only one or several individual spatial modes of the field are permitted, and a detector which can record the intensity of the generated interference pattern at a plurality of spatially different positions, with the wavefronts and/or the propagation direction of at least one of the light fields involved in the interference pattern being changed by spectrally dispersive or diffractive optical elements in dependence on the wavelength. The present invention furthermore relates to a method of determining the optical spectrum and/or of other measurands encoded or transmitted by an optical spectrum by analysis of the interference pattern measured using an apparatus in accordance with the invention or using an apparatus in accordance with the invention.

Abstract translation: 本发明涉及一种用于光学光学和光学感测技术的装置和方法以及该装置的使用。 提供了一种具有高光谱分辨率并且对光学部件的质量要求相对较低的要求的装置，其特征在于，用于光学光学的装置包括用于产生干涉图案的装置，用于耦合待检测的入射光场的装置 允许场的只有一个或几个单独的空间模式，以及可以在多个空间不同的位置记录生成的干涉图案的强度的检测器，其中波前和/或传播方向至少是 根据波长，通过光谱色散或衍射光学元件改变涉及干涉图案的光场。 本发明还涉及一种通过分析使用根据本发明的装置或使用根据本发明的装置测量的干涉图案来确定由光谱编码或传输的其他被测量的光谱和/或其他被测量的方法 。

公开(公告)号：US06963405B1

公开(公告)日：2005-11-08

申请号：US10894216

申请日：2004-07-19

Applicant: Peter J. Wheel ,  Loren M. Woody

Inventor： Peter J. Wheel ,  Loren M. Woody

IPC: G01B9/02 ,  G01J3/28 ,  G01J3/453 ,  G01S7/495

CPC classification number: G01J3/2823 ,  G01J3/453 ,  G01S7/495

Abstract: In an imaging system providing an image of a target of interest, a method of reducing interference from a laser beam includes the steps of: (a) receiving optical energy from the target of interest and the laser beam; (b) forming an interferogram of spectral energy, at each spatial position of an image, based on the optical energy received in step (a); (c) detecting the interferogram of spectral energy, at each of the spatial positions, to provide a corresponding spectral band of intensity values; (d) selecting an intensity level in the spectral band, detected in step (c), that is greater than a predetermined value, and reducing the selected intensity level; and (e) forming an image of the target of interest, after reducing the selected intensity level of step (d).

Abstract translation: 在提供感兴趣的目标的图像的成像系统中，减少来自激光束的干扰的方法包括以下步骤：（a）从感兴趣的目标物体和激光束接收光能; （b）基于在步骤（a）中接收的光能量，在图像的每个空间位置处形成光谱能量的干涉图; （c）在每个空间位置处检测光谱能量的干涉图，以提供强度值的相应光谱带; （d）选择在步骤（c）中检测到的大于预定值的频谱带中的强度水平，并减小所选择的强度水平; 以及（e）在减小所选择的步骤（d）的强度水平之后，形成目标目标的图像。

公开(公告)号：US06940599B1

公开(公告)日：2005-09-06

申请号：US10364777

申请日：2003-02-10

Applicant: David Christian Hovde

Inventor： David Christian Hovde

IPC: G01C3/08 ,  G01J3/433 ,  G01J3/453 ,  G01N21/00 ,  G01N21/35 ,  G01N21/39

CPC classification number: G01J3/433 ,  G01J3/453 ,  G01N2021/3595 ,  G01N2021/399

Abstract: A spectrometer and spectrometry method comprising modulating a light source with a carrier waveform multiplied by an envelope function, directing light from the light source through a sample region and to a photodetector, and demodulating current from the photodetector at a reference frequency. Also a method for computing a modulation waveform comprising specifying a target detection efficiency in a Fourier space, computing a response of a waveform that comprises a carrier wave multiplied by an envelope function, and modifying the envelope function using nonlinear optimization means to minimize a difference between the computed response and a predetermined target gain spectrum.

Abstract translation: 一种光谱仪和光谱测定方法，包括用载体波形乘以包络函数调制光源，将来自光源的光引导通过样品区域和光电检测器，以及以参考频率解调来自光电检测器的电流。 还有一种用于计算调制波形的方法，包括在傅里叶空间中指定目标检测效率，计算包括乘以包络函数的载波的波形的响应，以及使用非线性优化装置修改包络函数，以最小化 计算的响应和预定的目标增益谱。

公开(公告)号：US20050087677A1

公开(公告)日：2005-04-28

申请号：US10917272

申请日：2004-08-11

Applicant: Ray Chen ,  David Miller

Inventor： Ray Chen ,  David Miller

IPC: H01J40/14 ,  H01L31/00

CPC classification number: G01J3/32 ,  G01J3/453 ,  H01L31/1085

Abstract: An electronically tuned, wavelength-dependent optical detector is provided. The electronically tuned, wavelength-dependent optical detector is a modified metal-semiconductor-metal photodetector including a comb-like metal electrode at a common voltage and metal electrodes each supplied with a control voltage by a voltage means. The wavelength to be detected in an optical input illuminating the detector is selected based on the set of control voltages applied to the metal electrodes. In another embodiment of the invention, the wavelength to be detected with the electronically tuned, wavelength-dependent optical detector is also selected using a standing wave generator, such as an interferometer, to produce a spatially varying light intensity on the surface of the electronically tuned, wavelength-dependent optical detector. Electronic wavelength demultiplexing is also provided. Design flexibility can be obtained by providing two or more optical patterns at a detector surface, each pattern having a different wavelength dependence.

Abstract translation: 提供电子调谐的，依赖于波长的光学检测器。 电子调谐的，依赖于波长的光学检测器是一种改进的金属 - 半导体 - 金属光电探测器，其包括在公共电压下的梳状金属电极和各自由电压装置提供控制电压的金属电极。 基于施加到金属电极的控制电压的集合来选择在照射检测器的光学输入中要检测的波长。 在本发明的另一个实施例中，使用诸如干涉仪之类的驻波发生器也可以使用电子调谐的，依赖于波长的光学检测器来检测波长，以在电子调谐的表面上产生空间变化的光强度 ，依赖于波长的光检测器。 还提供电子波长解复用。 通过在检测器表面提供两个或更多个光学图案可以获得设计灵活性，每个图案具有不同的波长依赖性。

公开(公告)号：US20050087673A1

公开(公告)日：2005-04-28

申请号：US10693652

申请日：2003-10-23

Applicant: Ray Chen ,  David Miller

Inventor： Ray Chen ,  David Miller

IPC: H01J40/14 ,  H01L31/00

CPC classification number: H01L31/1085 ,  G01J3/32 ,  G01J3/453

Abstract: An apparatus and method for an electronically tuned, wavelength-dependent optical detector are disclosed. The electronically tuned, wavelength-dependent optical detector is a modified metal-semiconductor-metal photodetector comprising a comb-like metal electrode at a common voltage and metal electrodes each supplied with a control voltage by a voltage means. The wavelength to be detected in a stream of light illuminating the electronically tuned, wavelength-dependent optical detector is selected based on the set of control voltages applied to the metal electrodes using the voltage means and the relative position of the electronically tuned, wavelength-dependent optical detector. In another embodiment of the invention, the wavelength to be detected with the electronically tuned, wavelength-dependent optical detector is also selected using a standing wave generator, such as an interferometer, to produce a spatially varying light intensity on the surface of the electronically tuned, wavelength-dependent optical detector.

Abstract translation: 公开了一种用于电子调谐的，依赖于波长的光学检测器的装置和方法。 电子调谐的，依赖于波长的光学检测器是一种改进的金属 - 半导体 - 金属光电探测器，其包括在公共电压下的梳状金属电极和金属电极，每个金属电极通过电压装置提供控制电压。 基于使用电压装置施加到金属电极的控制电压的集合以及电子调谐的波长依赖的光学检测器的相对位置来选择在被照亮电波调谐的波长相关光学检测器的光流中被检测的波长 光学检测器。 在本发明的另一个实施例中，使用诸如干涉仪的驻波发生器也可以使用电子调谐的，依赖于波长的光学检测器来检测波长，以在电子调谐的表面上产生空间变化的光强度 ，依赖于波长的光检测器。

公开(公告)号：US20050056785A1

公开(公告)日：2005-03-17

申请号：US10663310

申请日：2003-09-16

Applicant: Mau-Song Chou ,  Larry Yujiri ,  David Dixon

Inventor： Mau-Song Chou ,  Larry Yujiri ,  David Dixon

IPC: G01J3/453 ,  G01J5/06 ,  G01N21/35 ,  G01J5/00

CPC classification number: G01N21/3581 ,  G01J3/453 ,  G01J5/061 ,  G01N21/3504

Abstract: A system for detecting and analyzing chemical and biological materials in a sample. The system includes a spectrometer for passively receiving emissions from the sample in the terahertz frequency band to detect the materials therein. A telescope or other device can be used to confine the field-of-view of the spectrometer. A cold surface is positioned filling the field-of-view of the spectrometer at an opposite side of the sample from the spectrometer. The cold surface provides a low temperature background relative to the sample so as to reduce the background emission and enhance the detection of the emission from the sample.

Abstract translation: 用于检测和分析样品中化学和生物材料的系统。 该系统包括用于被动地接收来自太赫兹频带中的样本的发射的光谱仪，以检测其中的材料。 望远镜或其他设备可用于限制光谱仪的视场。 将冷表面放置在样品与光谱仪相反的一侧，填充光谱仪的视场。 冷表面相对于样品提供了低温背景，以便减少背景辐射并增强对样品的发射的检测。

公开(公告)号：US20050046862A1

公开(公告)日：2005-03-03

申请号：US10647176

申请日：2003-08-25

Applicant: Ivan Melnyk

Inventor： Ivan Melnyk

IPC: G01B9/02 ,  G01D5/353 ,  G01J3/02 ,  G01J3/10 ,  G01J3/26 ,  G01J3/453 ,  G01N21/45

CPC classification number: G01J3/02 ,  G01D5/35303 ,  G01J3/0218 ,  G01J3/10 ,  G01J3/26 ,  G01J3/453 ,  G01N21/45

Abstract: A fiber optic sensing device uses a Fabry-Perot cavity to sense a physical parameter. The cavity modulates the incident polychromatic light. The modulated light is recorded by an optical spectrometer means. The spectrum is analyzed in a signal processing unit which normalizes the spectrum and determines the phase of the modulated signal. The phase, accumulated over whole range of wavelengths, has been used for identification of the physical parameter using a look-up-table. The cavity, the polychromatic light source and the spectroscope means are connected by fiber optic means.

Abstract translation: 光纤感测装置使用法布里 - 珀罗腔来感测物理参数。 空腔调制入射的多色光。 调制光由光谱仪装置记录。 频谱在信号处理单元中进行分析，该信号处理单元对频谱进行归一化并确定调制信号的相位。 在整个波长范围内累积的相位已被用于使用查找表识别物理参数。 空腔，多色光源和分光装置通过光纤装置连接。