公开(公告)号：US20140239202A1

公开(公告)日：2014-08-28

申请号：US14183134

申请日：2014-02-18

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC: H01J61/02

CPC classification number: H01J61/025 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有变化的厚度的壁以补偿系统中的光学像差。

公开(公告)号：US08796652B2

公开(公告)日：2014-08-05

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H05G2/00

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

公开(公告)号：US20140042336A1

公开(公告)日：2014-02-13

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-TENCOR CORPORATION

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H01J61/02

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

公开(公告)号：US20130169140A1

公开(公告)日：2013-07-04

申请号：US13667203

申请日：2012-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Won-Don JOO ,  Min-Kook KIM ,  Sang-Kil LEE ,  Byeong-Hwan JEON

IPC: H05H1/46 ,  H01J65/04

CPC classification number: H01J65/04

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。

公开(公告)号：US20110181191A1

公开(公告)日：2011-07-28

申请号：US13024027

申请日：2011-02-09

Applicant: Donald K. Smith ,  Matthew Besen ,  Huiling Zhu ,  Daniil Stolyarov ,  Hongke Ye ,  Gordon Hill ,  Ron Collins

Inventor： Donald K. Smith ,  Matthew Besen ,  Huiling Zhu ,  Daniil Stolyarov ,  Hongke Ye ,  Gordon Hill ,  Ron Collins

IPC: H05B37/02 ,  H01J61/12 ,  H01K1/30 ,  H01J61/40 ,  H05K13/00

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

公开(公告)号：US20110148305A1

公开(公告)日：2011-06-23

申请号：US13059372

申请日：2009-08-14

Applicant: Daiyu Hayashi ,  Georg Greuel ,  Rainer Hilbig ,  Norbert Braun

Inventor： Daiyu Hayashi ,  Georg Greuel ,  Rainer Hilbig ,  Norbert Braun

IPC: H01J61/52 ,  H01J61/00 ,  H01J61/26

CPC classification number: H01J65/04 ,  H01J61/12 ,  H01J61/26

Abstract: It is provided a dielectric barrier discharge lamp with a metal material in the gas discharge vessel. The metal material increases the efficacy of the lamp.

Abstract translation: 在气体放电容器中设置有金属材料的介质阻挡放电灯。 金属材料增加了灯的功效。

公开(公告)号：US20090278433A1

公开(公告)日：2009-11-12

申请号：US12091037

申请日：2005-10-25

Applicant: Takehito Nakashima ,  Makoto Noda ,  Chiaki Ota

Inventor： Takehito Nakashima ,  Makoto Noda ,  Chiaki Ota

IPC: H01J1/96

CPC classification number: H01J9/38 ,  H01J9/395 ,  H01J61/305 ,  H01J65/04 ,  H01J2209/387

Abstract: A flat discharge lamp includes a projection formed on an outer surface of a case body. The projection forms a thick portion, which is relatively thick, in the case body. An intake-outtake port is formed in the thick portion so that it can receive a chip tube having an outer diameter of a size larger than or the same as a gap. The large chip tube can be coupled to a hermetic case without any limitations resulting from the gap of a discharge chamber (15). The large chip tube resists damaging and improves gas replacement efficiency in the discharge chamber without affecting discharge characteristics of the flat discharge lamp.

Abstract translation: 扁平放电灯包括形成在壳体外表面上的突起。 突起在壳体中形成较厚的较厚部分。 在厚部分上形成进气口，从而可以容纳具有大于或等于间隙的尺寸的外径的切屑管。 大芯片管可以联接到密封的壳体，而没有由排放室（15）的间隙导致的任何限制。 大型芯片管可以抵抗损坏，提高放电室的气体替换效率，而不会影响平板放电灯的放电特性。

公开(公告)号：US20080143667A1

公开(公告)日：2008-06-19

申请号：US12001211

申请日：2007-12-10

Applicant: Yong Keun Jee ,  Hun Suk Yoo ,  Hwan Woong Lee ,  Sang Soo Hwang

Inventor： Yong Keun Jee ,  Hun Suk Yoo ,  Hwan Woong Lee ,  Sang Soo Hwang

IPC: G09G3/36

CPC classification number: H01J61/305 ,  G02F1/133602 ,  G09G3/342 ,  G09G2310/024 ,  G09G2320/064 ,  H01J65/04

Abstract: There is a provided a surface light source device comprising: a light source body having an inner space therein in which a discharge gas is contained; a plurality of electrodes formed on the light source body in such a manner as to electrically divide the inner space into at least three blocks and applying discharge voltages to the blocks; and a driving unit sequentially applying the discharge voltages to the blocks through the electrodes in synchronization with a video signal of an external display device. The light source body may have a plurality of discharge spaces or a single discharge space therein. In accordance with the present invention, the surface light source device sequentially applies the discharge voltages to the blocks, and thereby can reduce an after-image occurring in a liquid crystal display device. Further, the surface light source device is driven with a duty ratio varied depending on brightness of the video signal, and thereby integrated power consumption can be reduced and a contrast ratio can be improved.

Abstract translation: 提供了一种表面光源装置，包括：光源体，其内部具有排出气体的内部空间; 多个电极，其形成在所述光源体上，以将所述内部空间电分为至少三个块并向所述块施加放电电压; 以及与外部显示装置的视频信号同步地通过电极将放电电压顺序地施加到块的驱动单元。 光源体可以具有多个放电空间或其中的单个放电空间。 根据本发明，面光源装置顺序地对各块施加放电电压，能够减少在液晶显示装置中产生的后期图像。 此外，由于根据视频信号的亮度而变化的占空比来驱动面光源装置，从而能够降低集成的电力消耗，提高对比度。

公开(公告)号：US20080129210A1

公开(公告)日：2008-06-05

申请号：US11606562

申请日：2006-11-30

Applicant: Scot Olson ,  Bruce Pitman

Inventor： Scot Olson ,  Bruce Pitman

IPC: H05B41/00 ,  H01J7/24 ,  H05B41/36

CPC classification number: H01J65/04 ,  H01J61/305 ,  H01J61/52

Abstract: An assembly for heating a fluorescent lamp (such as the lamp used in a flat panel display) includes a circuit card having a plurality of transistors each configured to produce heat disposed thereon. A thermally-conductive layer is disposed proximate to the plurality of transistors, and the fluorescent lamp is disposed proximate the thermally-conductive layer such that the heat from the transistors is transmitted to the fluorescent lamp via the thermally conductive layer. By controlling the heat applied to the fluorescent lamp, microclimates in the lamp can be reduced or eliminated, thereby improving the performance of the lamp.

Abstract translation: 用于加热荧光灯（例如平板显示器中使用的灯）的组件包括具有多个晶体管的电路卡，每个晶体管被配置为产生设置在其上的热量。 导热层设置在多个晶体管附近，并且荧光灯设置在导热层附近，使得来自晶体管的热量经由导热层传输到荧光灯。 通过控制施加到荧光灯上的热量，可以减少或消除灯中的微气候，从而提高灯的性能。

公开(公告)号：US20070247052A1

公开(公告)日：2007-10-25

申请号：US11570346

申请日：2005-06-10

Applicant: Thomas Juestel ,  Walter Mayr ,  Olaf Mastenbroek

Inventor： Thomas Juestel ,  Walter Mayr ,  Olaf Mastenbroek

IPC: H01J1/63

CPC classification number: C09K11/778 ,  H01J61/44 ,  H01J61/72 ,  H01J65/04

Abstract: The invention relates to a low-pressure gas discharge lamp provided with a gas discharge vessel comprising a gas filling with a discharge-maintaining composition, wherein at least part of a wall of the discharge vessel is provided with a luminescent material comprising a first UV-B phosphor containing, in a host lattice, gadolinium(III) as an activator and praseodymium(III) as a sensitizer, which lowpressure gas discharge lamp is further provided with means for generating and maintaining a low-pressure gas discharge Such a lamp is particularly useful for narrow-band UV-B phototherapy. The invention also relates to a UV-B phosphor containing, in a host lattice, gadolinium(III) as an activator and praseodymium(III) as a sensitizer.

Abstract translation: 本发明涉及一种具有气体放电容器的低压气体放电灯，该气体放电容器包括填充有放电保持组合物的气体，其中放电容器的壁的至少一部分设置有发光材料，该发光材料包括第一UV- B荧光体在主体晶格中含有作为活化剂的钆（III）和作为敏化剂的镨（III），该低压气体放电灯还具有产生和保持低压气体放电的装置。这种灯特别是 适用于窄带UV-B光疗。 本发明还涉及在主体晶格中含有作为活化剂的钆（III）和作为敏化剂的镨（III）的UV-B荧光体。