公开(公告)号：US5286974A

公开(公告)日：1994-02-15

申请号：US962250

申请日：1992-10-16

Applicant: Andrew R. Walker ,  Simon C. Page

Inventor： Andrew R. Walker ,  Simon C. Page

IPC: G01N23/225 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/02 ,  H01J37/20 ,  H01J37/252 ,  H01J37/285 ,  H01J49/08 ,  H01J49/44

CPC classification number: H01J37/026 ,  H01J37/285

Abstract: A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.

Abstract translation: 带电粒子能量分析仪具有诸如浮潜型透镜的磁性透镜和用于将电离辐射引导到试样上的源，从而使带电粒子从其表面发射。 将样品浸入磁性透镜的磁性成像领域，使具有预定能量范围内的能量的粒子聚焦，由能量分析仪分析聚焦粒子的能量。 提供了一种电极装置，用于使得磁性透镜的磁性成像领域能够利用未被聚焦的颗粒来引起样品的电荷中和。 或者，来自源极的带电粒子经受横向于磁性透镜的光轴的电场，并通过磁性透镜的磁性成像场被引导到样品上。

公开(公告)号：US5138169A

公开(公告)日：1992-08-11

申请号：US735532

申请日：1991-07-26

Applicant: Yuichiro Yamazaki ,  Motosuke Miyoshi ,  Katsuya Okumura

Inventor： Yuichiro Yamazaki ,  Motosuke Miyoshi ,  Katsuya Okumura

IPC: G21K5/04 ,  H01J37/02 ,  H01J37/05 ,  H01J37/073 ,  H01J37/252 ,  H01J37/30 ,  H01J37/317 ,  H01J49/08

CPC classification number: H01J37/05 ,  H01J37/026 ,  H01J37/073

Abstract: There is disclosed a method of irradiating low-energy electrons that has the steps of irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam, accelerating the emitted secondary electron beam, removing high-energy components from that accelerated secondary beam, and decelerating the secondary electron beam without the high-energy components into a focus. And there is also disclosed an apparatus for irradiating low-energy electron that has a primary electron beam irradiating section, a secondary electron emitting section which receives the primary electron beam and emits a secondary electron beam, a secondary electron beam accelerating section, energy analyzing section which removes high-energy components from the accelerated secondary electron beam, to obtain low-energy secondary electrons, and deceleration section for decelerating the low-energy secondary electrons into a focus.

公开(公告)号：US4752685A

公开(公告)日：1988-06-21

申请号：US871739

申请日：1986-06-09

Applicant: Yoshiro Shiokawa ,  Kiyoshi Hoshino

Inventor： Yoshiro Shiokawa ,  Kiyoshi Hoshino

IPC: G01Q60/04 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

CPC classification number: H01J49/482 ,  H01J37/252 ,  H01J49/08

Abstract: A photoelectron spectrometer includes a target, an electron gun, a crystal plate, a spectrum-analyzer and a detector. The target and the sample to be inspected are aligned with a reference line. The electron gun is positioned on the coaxially line with respect to the reference axis. The crystal plate is arranged in a circular region with respect to the reference axis, so that X-ray beams emitted from the target are omnidirectionally irradiated to the sample surface in an electron shower form. The sensitivity of the photoelectron spectrometer is increased.

Abstract translation: 光电子能谱仪包括靶，电子枪，晶体板，光谱分析仪和检测器。 要检查的目标和样品与参考线对齐。 电子枪相对于参考轴线位于同轴线上。 晶体板相对于基准轴配置在圆形区域，使从靶射出的X射线束以电子喷淋状态全方位照射到样品表面。 光电子能谱仪的灵敏度提高。

公开(公告)号：US4639597A

公开(公告)日：1987-01-27

申请号：US663855

申请日：1984-10-23

Applicant: Yoshiro Shiokawa

Inventor： Yoshiro Shiokawa

IPC: G01N23/227 ,  H01J37/10 ,  H01J37/143 ,  H01J37/145 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

CPC classification number: H01J37/252 ,  H01J49/08 ,  H01J49/482

Abstract: In an Auger electron spectrometer for use in analyzing a surface of an object by the use of Auger electrons resulting from impingement of an electron beam, an electron gun comprises an electron beam source for generating the electron beam and an electron lens system for guiding the electron beam towards the surface. The electron lens system comprises a combination of a condenser lens and a permanent magnet member nearer to the surface than the condenser lens. The permanent magnet member may comprise either a plurality of permanent magnet pieces radially and azimuthally spaced apart from one another or a single permanent magnet piece. An ion gun may be disposed in the vicinity of the electron gun to generate an ion beam oblique to the electron beam and substantially concurrent with the electron beam on the surface. Magnetic pole pieces may be attached to each permanent magnet piece and bypassed to control a magnetic field generated by each permanent magnet piece. Each permanent magnet piece may be coated with a combination of a nonmagnetic film and a magnetic film. Anyway, the electron gun can be disposed in an inner cylindrical space of an inner cylindrical electrode member when the electron spectrometer is of a cylindrical mirror type.

Abstract translation: 在用于通过使用由电子束撞击产生的俄歇电子来分析物体表面的俄歇电子能谱仪中，电子枪包括用于产生电子束的电子束源和用于引导电子的电子透镜系统 朝向表面。 电子透镜系统包括聚光透镜和比聚光透镜更靠近表面的永磁体构件的组合。 永磁体构件可以包括彼此径向和方位间隔开的多个永磁体片或单个永磁体片。 离子枪可以设置在电子枪的附近，以产生与电子束倾斜的离子束，并且基本上与表面上的电子束同时存在。 磁极片可以附接到每个永磁体片上并被旁路以控制由每个永磁体片产生的磁场。 每个永磁体片可以涂覆有非磁性膜和磁性膜的组合。 无论如何，当电子光谱仪是圆柱形反射镜类型时，电子枪可以设置在内圆柱形电极部件的内圆柱形空间中。

公开(公告)号：US4476392A

公开(公告)日：1984-10-09

申请号：US334489

申请日：1981-12-28

Applicant: Robert A. Young

Inventor： Robert A. Young

IPC: H01J49/08 ,  H01J27/20 ,  H01J27/24 ,  H01J49/10 ,  H01J49/14

CPC classification number: H01J49/08

Abstract: An ionization source is disclosed for use with mass spectrometers and electron capture species detectors having an ionization light source excited so as to illuminate a fluid sample which flows past the light source whereby electrons are photoelectrically generated by a light source. Means are also provided to accelerate the photoelectrons and to extract heavy ions generated by the accelerated photoelectrons from the fluid sample. Further means are provided to focus the extracted heavy ions so that they may be detected. Also included is a means to maintain a vacuum between the light source and the sample and the detector.

Abstract translation: 公开了用于质谱仪和电子捕获物质检测器的电离源，其具有激发的电离光源，以便照射流过光源的流体样品，由此电子由光源光电产生。 还提供了用于加速光电子并从流体样品中提取由加速光电子产生的重离子的方法。 提供了进一步的手段来聚焦提取的重离子，使得它们可以被检测。 还包括在光源和样品与检测器之间保持真空的方法。