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    Reducing fast ions in a plasma radiation source
    71.
    发明授权
    Reducing fast ions in a plasma radiation source 失效
    降低等离子体辐射源中的快速离子

    公开(公告)号：US07518135B2

    公开(公告)日：2009-04-14

    申请号：US11641945

    申请日：2006-12-20

    Applicant: Vladimir Vital'evich Ivanov ,  Vadim Yevgenyevich Banine ,  Konstantin Nikolaevich Koshelev

    Inventor： Vladimir Vital'evich Ivanov ,  Vadim Yevgenyevich Banine ,  Konstantin Nikolaevich Koshelev

    IPC: H01J65/04

    CPC classification number: H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

    Abstract: A radiation source with an anode and a cathode to create a discharge in a discharge space between the anode and the cathode is disclosed. A plasma is formed in the radiation source which generates electromagnetic radiation, such as EUV radiation. The radiation source includes a first activation source to direct a first energy pulse onto a first spot in the radiation source near the discharge space to create a main plasma channel which triggers the discharge. The radiation source also has a second activation source to direct a second energy pulse onto a second spot in the radiation source near the discharge space to create an additional plasma channel. By directing the second energy pulse during the same discharge, a shortcutting of the main plasma current is realized which in turn may reduce the amount of fast ions produced.

    Abstract translation: 公开了一种具有阳极和阴极以在阳极和阴极之间的放电空间中产生放电的辐射源。 在辐射源中形成等离子体，其产生诸如EUV辐射的电磁辐射。 辐射源包括第一激活源，用于将第一能量脉冲引导到放电空间附近的辐射源中的第一点上，以产生触发放电的主等离子体通道。 辐射源还具有第二激活源，以将第二能量脉冲引导到放电空间附近的辐射源中的第二点上，以产生附加的等离子体通道。 通过在相同的放电期间引导第二能量脉冲，实现了主等离子体电流的快捷方式，这又可以减少产生的快速离子的量。

    Radiation source for the generation of short-wavelength radiation
    74.
    发明授权
    Radiation source for the generation of short-wavelength radiation 有权
    用于产生短波长辐射的辐射源

    公开(公告)号：US07233013B2

    公开(公告)日：2007-06-19

    申请号：US11393325

    申请日：2006-03-30

    Applicant: Guido Hergenhan ,  Kai Gaebel ,  Thomas Brauner

    Inventor： Guido Hergenhan ,  Kai Gaebel ,  Thomas Brauner

    IPC: G01J3/10 ,  G01J1/00 ,  H05G2/00 ,  H01J65/04

    CPC classification number: H05G2/003 ,  G03F7/70841 ,  G03F7/70858 ,  G03F7/70908 ,  G03F7/70916

    Abstract: In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without substantially reducing the radiation transmission. A vacuum chamber which encloses a radiation-emitting plasma and is outfitted with at least one feed line and one outlet line for a buffer gas in order to ensure protection against debris for at least one optical element which directs the radiation to a radiation outlet opening in the vacuum chamber has chamber areas with particle deceleration of varying magnitude by the buffer gas. The particle deceleration is greater at least in a first chamber area in which the optical element is arranged than in any other chamber area.

    Abstract translation: 在用于产生短波长辐射的辐射源中，本发明的目的是通过缓冲气体有效地增加对准直器光学元件的保护，而不会基本上减少辐射透射。 包围发射辐射的等离子体的真空室，并配备有用于缓冲气体的至少一个进料管线和一个出口管线，以便确保防止碎片对于至少一个将辐射引导到辐射出口开口处的碎片 真空室具有通过缓冲气体具有不同大小的粒子减速的腔室区域。 至少在布置光学元件的第一室区域中，粒子减速度比在任何其它室区域中更大。

    High intensity light source
    75.
    发明申请
    High intensity light source 审中-公开
    高强度光源

    公开(公告)号：US20060250090A9

    公开(公告)日：2006-11-09

    申请号：US09818092

    申请日：2001-03-26

    Applicant: Charles Guthrie ,  Edmund Sandberg ,  Donald Wilson ,  Gregory Prior

    Inventor： Charles Guthrie ,  Edmund Sandberg ,  Donald Wilson ,  Gregory Prior

    IPC: H01J65/04

    CPC classification number: H01J65/044 ,  H01J65/048

    Abstract: In one aspect the plasma lamp according to the present invention comprises a gas envelope that is constructed from ceramic material and a sapphire window rather than quartz. According to another aspect of the present invention, a plasma lamp comprises an RF structure for the radio wave radiation and an envelope for housing the excitation gas that are formed so as to constitute a single, integrated ceramic structure. According to yet another aspect of the present invention, the plasma lamp comprises a waveguide structure having solid material such as ceramic rather than air for the dielectric and a gas housing made of a combination of solid ceramic and a sapphire window. In this way, the separate quartz gas envelope and air-filled waveguide structure employed in the prior art are replaced by a single, integrated structure.

    Abstract translation: 在一个方面，根据本发明的等离子体灯包括由陶瓷材料和蓝宝石窗而不是石英构成的气体封套。 根据本发明的另一方面，一种等离子体灯包括用于无线电波辐射的RF结构和用于容纳激发气体的外壳，其形成为构成单一的一体化陶瓷结构。 根据本发明的另一方面，等离子体灯包括具有诸如陶瓷的固体材料而不是用于电介质的空气的波导结构，以及由固体陶瓷和蓝宝石窗口的组合制成的气体壳体。 以这种方式，现有技术中采用的独立石英气体包络和充气波导结构被单一的一体化结构所取代。

    Multi-use planar photoluminescent lamp and method of making such lamp
    76.
    发明授权
    Multi-use planar photoluminescent lamp and method of making such lamp 失效
    多用平面光致发光灯及其制作方法

    公开(公告)号：US07128439B2

    公开(公告)日：2006-10-31

    申请号：US10747003

    申请日：2003-12-23

    Applicant: Mark Winsor

    Inventor： Mark Winsor

    IPC: H01J65/04 ,  G09F13/26

    CPC classification number: H01J9/248 ,  G09F13/26 ,  H01J61/305 ,  H01J61/35 ,  H01J65/046

    Abstract: A planar photoluminescent lamp includes a plurality of glass spacer beads affixed to a first glass plate, and a second glass plate in contact with the glass spacer beads. The glass plates are hermetically sealed to form a chamber, which is filled with a selected gas. Transparent electrodes are placed on the exterior of the first and second glass plates, over which electrically insulating layers are extended. First and second semi-transparent decorative layers are laid over the insulating layers, out of which light is transmitted. One or more transparent insulating layers extend over transparent electrodes placed on the exterior surface of the first and second glass plates.

    Abstract translation: 平面光致发光灯包括固定到第一玻璃板上的多个玻璃间隔珠和与玻璃间隔珠接触的第二玻璃板。 玻璃板被气密地密封，以形成填充有选定气体的室。 透明电极放置在第一和第二玻璃板的外部，电绝缘层延伸穿过该玻璃板的外部。 第一和第二半透明装饰层铺设在绝缘层上，光透射。 一个或多个透明绝缘层在位于第一和第二玻璃板的外表面上的透明电极上延伸。

    Injection pinch discharge extreme ultraviolet source
    77.
    发明授权
    Injection pinch discharge extreme ultraviolet source 失效
    注射夹紧放电极紫外线源

    公开(公告)号：US07075096B2

    公开(公告)日：2006-07-11

    申请号：US10911334

    申请日：2004-08-04

    Applicant: Malcolm W. McGeoch

    Inventor： Malcolm W. McGeoch

    IPC: H01J65/04

    CPC classification number: H05G2/003 ,  H05G2/005

    Abstract: A source of extreme ultraviolet or soft X-ray photon source includes discharge chamber containing a buffer gas, first and second electrodes in the discharge chamber configured to deliver a heating current to a plasma discharge region, and an injector to project a particle of a working substance into the plasma discharge region. The particle is evaporated and ionized by the heating current to form a hot plasma that radiates extreme ultraviolet or soft X-ray photons.

    Abstract translation: 极紫外或软X射线光子源的来源包括包含缓冲气体的放电室，放电室中的第一和第二电极被配置成将加热电流传送到等离子体放电区域，以及喷射器来投射工作颗粒 物质进入等离子体放电区域。 通过加热电流将颗粒蒸发并离子化，形成辐射极紫外或软X射线光子的热等离子体。

    Method for producing a silent flat radiator by softening a limited number of supports
    79.
    发明授权
    Method for producing a silent flat radiator by softening a limited number of supports 失效
    通过软化有限数量的支撑件来生产无声平坦辐射器的方法

    公开(公告)号：US06976898B2

    公开(公告)日：2005-12-20

    申请号：US10398661

    申请日：2002-06-26

    Applicant: Lothar Hitzschke ,  Frank Vollkommer

    Inventor： Lothar Hitzschke ,  Frank Vollkommer

    IPC: H01J9/26 ,  H01J61/30 ,  H01J65/00 ,  H01J65/04 ,  H01J9/00 ,  H01J9/24

    CPC classification number: H01J65/046 ,  H01J9/261 ,  H01J61/305

    Abstract: The invention relates to an improved method of production for a flat radiator discharge lamp designed for dielectrically impeded discharges, in which, during a filling step for the discharge vessel, a plate of the discharge vessel is jacked up on parts, later softening, of support elements in order to be lowered onto the other plate at a specific temperature. In this case, the support elements serve, in addition, to improve the mechanical stability of the finished flat radiator. According to the invention, only a small number of the support elements present in a relatively large number are used for the outlined function of holding up the plate.

    Abstract translation: 本发明涉及一种设计用于介电阻碍放电的扁平辐射器放电灯的改进方法，其中在放电容器的填充步骤期间，将放电容器的板片放置在部件上，然后软化支撑件 元件以便在特定温度下降到另一个板上。 在这种情况下，支撑元件另外用于提高成品扁平辐射体的机械稳定性。 根据本发明，只有少数以较大数量存在的支撑元件用于夹紧板的概述功能。

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