Epitaxial silicon carbide single crystal wafer and process for producing the same

    公开(公告)号:US11114295B2

    公开(公告)日:2021-09-07

    申请号:US16901435

    申请日:2020-06-15

    Abstract: An epitaxial silicon carbide single crystal wafer having a small depth of shallow pits and having a high quality silicon carbide single crystal thin film and a method for producing the same are provided. The epitaxial silicon carbide single crystal wafer according to the present invention is produced by forming a buffer layer made of a silicon carbide epitaxial film having a thickness of 1 μm or more and 10 μm or less by adjusting the ratio of the number of carbon to that of silicon (C/Si ratio) contained in a silicon-based and carbon-based material gas to 0.5 or more and 1.0 or less, and then by forming a drift layer made of a silicon carbide epitaxial film at a growth rate of 15 μm or more and 100 μm or less per hour. According to the present invention, the depth of the shallow pits observed on the surface of the drift layer can be set at 30 nm or less.

    Method for producing silicon carbide single crystal

    公开(公告)号:US11078598B2

    公开(公告)日:2021-08-03

    申请号:US16468413

    申请日:2017-12-15

    Abstract: A silicon carbide single crystal is grown by a method comprising: a single crystal growth step of growing a silicon carbide single crystal so as to not close a gap between a side surface of the silicon carbide single crystal growing on a silicon carbide seed crystal, and an inner-side surface of a guide member and a crystal deposited on the inner-side surface of the guide member; a crystal growth termination step of terminating crystal growth by temperature lowering; and a gap enlargement step, performed between the single crystal growth step and the crystal growth termination step, of enlarging the gap by maintaining a difference, Pin−Pout, between partial pressure Pin of Si2C in a source gas in the vicinity of an inlet of the gap and partial pressure Pout of Si2C in a source gas in the vicinity of an outlet of the gap at 0.18 torr or less.

    METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

    公开(公告)号:US20210230768A2

    公开(公告)日:2021-07-29

    申请号:US16468413

    申请日:2017-12-15

    Abstract: A method for producing a silicon carbide single crystal according to the present invention is a method for producing a silicon carbide single crystal in which a single crystal of silicon carbide is grown on a silicon carbide seed crystal by using a guide member, the method comprising: a single crystal growth step of growing a silicon carbide single crystal in a manner so as to not close a gap between a side surface of the silicon carbide single crystal growing on the silicon carbide seed crystal, and an inner-side surface of the guide member and a crystal deposited on the inner-side surface of the guide member; a crystal growth termination step of terminating crystal growth by lowering the temperature; and a gap enlargement step, performed between the single crystal growth step and the crystal growth termination step, of enlarging the gap by maintaining a difference, Pin-Pout, between a partial pressure Pin of Si2C in a source gas in the vicinity of an inlet of the gap and a partial pressure Pout of Si2C in a source gas in the vicinity of an outlet of the gap at 0.18 torr or less.

    MAGNETIC RECORDING MEDIUM AND MAGNETIC STORAGE DEVICE

    公开(公告)号:US20210201944A1

    公开(公告)日:2021-07-01

    申请号:US17116223

    申请日:2020-12-09

    Abstract: A magnetic recording medium includes a substrate; a soft magnetic underlayer laminated on the substrate; an amorphous barrier layer laminated on the soft magnetic underlayer; and a magnetic recording layer laminated on the amorphous barrier layer, wherein the soft magnetic underlayer includes Fe, B, Si, and one or more elements selected from the group consisting of Nb, Zr, Mo, and Ta, wherein the amorphous barrier layer includes Si, W, and one or more elements selected from the group consisting of Nb, Zr, Mo, and Ta, and wherein the magnetic recording layer includes an alloy having an L10 structure.

    Chloroprene graft copolymer latex, method for producing same, bonding agent and adhesive

    公开(公告)号:US11028212B2

    公开(公告)日:2021-06-08

    申请号:US16324204

    申请日:2017-08-01

    Abstract: Provided is a method for producing a chloroprene graft copolymer latex containing no organic solvent and exhibiting high adhesive strength even for soft polyvinyl chloride. A method for producing a chloroprene graft copolymer latex includes a chloroprene polymerization step of giving a chloroprene polymer latex and a graft copolymerization step of giving a chloroprene graft copolymer latex. The chloroprene polymerization step is a step of subjecting at least chloroprene (A-1) of chloroprene (A-1) and a monomer (A-2) copolymerizable with chloroprene (A-1) to emulsion radical polymerization. The graft copolymerization step is a step of adding, to the chloroprene polymer latex, a (meth)acrylate (B) and an organic peroxide (C) having an octanol/water partition coefficient of −2.0 or more and 3.0 or less to subject the chloroprene polymer to graft copolymerization with the (meth)acrylate (B) at a temperature of 10° C. or more and 40° C. or less.

    PRODUCTION METHOD OF ALUMINUM ALLOY FORGING FOR AUTOMOBILE SUSPENSION

    公开(公告)号:US20210156016A1

    公开(公告)日:2021-05-27

    申请号:US17104265

    申请日:2020-11-25

    Inventor: Takumi MARUYAMA

    Abstract: Provided is a production method of an aluminum alloy forging for an automobile suspension having a disturbance affectable surface with not excessively notch-sensitive. The production method includes, as heat treatment processes, a solution heat treatment process, a quenching process, and an artificial age hardening process. The quenching process is performed by bringing a lower surface of the aluminum forging to be disposed on a ground side when assembled to the automobile into contact with water before an upper surface of the aluminum forging opposite to the lower surface is brought into contact with the water.

    GAS-BARRIER RESIN COMPOSITION AND USE THEREOF

    公开(公告)号:US20210147669A1

    公开(公告)日:2021-05-20

    申请号:US16624055

    申请日:2018-07-17

    Abstract: A gas-barrier resin (A) having an oxygen permeability coefficient of 1.0×10−14 (cm3·cm/cm2·s·Pa) or less; and a copolymer (B) containing monomer structural units represented by the formula (1), the formula (2), and the formula (3): where: R1 represents a hydrogen atom or a methyl group; R2 represents a hydrocarbon group having 1 to 20 carbon atoms that may be substituted with a halogen atom, a hydroxy group, an alkoxy group, or an amino group; 1, m, and n represent numerical values representing molar proportions of the respective monomer structural units, and n may represent 0; and p represents an integer of from 1 to 4, wherein a ratio of a mass of the copolymer (B) to a total mass of the gas-barrier resin (A) and the copolymer (B) is from 1 mass % to 40 mass %.

    Shielding member and single crystal growth device having the same

    公开(公告)号:US10995418B2

    公开(公告)日:2021-05-04

    申请号:US16406539

    申请日:2019-05-08

    Inventor: Yohei Fujikawa

    Abstract: A shielding member, wherein the shielding member is formed of at least one of structure which has a non-flat plate shape having an inclined surface, and the inclined surface is located on a side of a substrate support part when the shielding member is disposed in a single crystal growth device, wherein the single crystal growth device comprising: a crystal growth container; a source storage part that is positioned at a lower inner part of the crystal growth container; the substrate support part, wherein the support part is disposed above the source storage part and supports a substrate to make the substrate face the source storage part; and a heating device that is disposed on an outer circumference of the crystal growth container, wherein the shielding member is disposed between the source storage part and the substrate support part, and wherein a single crystal of a source is grown on the substrate by sublimating the source from the source storage part.

    Method of manufacturing SiC epitaxial wafer

    公开(公告)号:US10985079B2

    公开(公告)日:2021-04-20

    申请号:US16672650

    申请日:2019-11-04

    Abstract: The invention provides a method of manufacturing a SiC epitaxial wafer in which stacking faults are less likely to occur when a current is passed in a forward direction. The method of manufacturing the SiC epitaxial wafer includes a measurement step for measuring a basal plane dislocation density, a layer structure determining process for determining the layer structure of the epitaxial layer, and an epitaxial growth step for growing the epitaxial layers. And in the layer structure determination step, in the case of (i) when the basal plane dislocation density is lower than a predetermined value, the epitaxial layer includes a conversion layer and a drift layer from the SiC substrate side; and in the case of (ii) when the density is equal to or higher than the predetermined value, the epitaxial layer includes a conversion layer, a recombination layer, and a drift layer from the SiC substrate side.

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