公开(公告)号：US20130070576A1

公开(公告)日：2013-03-21

申请号：US13678017

申请日：2012-11-15

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Jie Zou ,  Kaizhong Gao ,  William Albert Challener ,  Mark Henry Ostrowski ,  Venkateswara Rao Inturi ,  Tong Zhao ,  Michael Christopher Kautzky

IPC: G11B13/04

CPC classification number: G11B13/08 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/6088 ,  G11B13/04 ,  G11B2005/0021 ,  Y10T428/11

Abstract: An apparatus includes a near field transducer positioned adjacent to an air bearing surface, a first magnetic pole, a heat sink positioned between the first magnetic pole and the near field transducer, and a diffusion barrier positioned between the near field transducer and the first magnetic pole. The diffusion barrier can be positioned adjacent to the magnetic pole or the near field transducer.

公开(公告)号：US12057147B2

公开(公告)日：2024-08-06

申请号：US17511741

申请日：2021-10-27

Applicant: Seagate Technology LLC

Inventor： Tong Zhao ,  Li Wan ,  Michael Christopher Kautzky

IPC: G11B5/31 ,  B81C1/00 ,  B82B1/00 ,  H01F10/30 ,  H01L21/3065 ,  H01L21/67 ,  B82Y10/00 ,  G11B5/00 ,  G11B11/24 ,  H01L21/3213

CPC classification number: G11B5/3163 ,  B81C1/00111 ,  B82B1/003 ,  G11B5/3133 ,  H01F10/30 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/67069 ,  B81C2201/0132 ,  B81C2201/0143 ,  B82Y10/00 ,  G11B2005/0021 ,  G11B11/24 ,  H01L21/32136

Abstract: A method of forming a thin film structure involves performing one or more repetitions to form a template on a wafer. The repetitions include: depositing a layer of a template material to a first thickness T1; and ion beam milling the layer of the template material to remove thickness T2, where T2

公开(公告)号：US11164600B1

公开(公告)日：2021-11-02

申请号：US16551085

申请日：2019-08-26

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Tong Zhao ,  Michael C. Kautzky ,  Lance Nevala

IPC: G11B5/31 ,  G11B5/147 ,  G11B5/00 ,  G11B13/08 ,  C30B19/08 ,  C30B29/08 ,  C30B29/02

Abstract: Methods of forming a near field transducer (NFT), the methods including the steps of depositing plasmonic material on a substrate; laser annealing at least a portion of the deposited plasmonic material at a wavelength from 100 nm to 2.0 micrometers (μm) to induce liquid phase epitaxy (LPE) in the annealed deposited plasmonic material to form a epitaxially modified plasmonic material; and forming a NFT from at least a portion of the epitaxially modified plasmonic material are disclosed as well as other methods and devices such as those formed.

公开(公告)号：US11162169B2

公开(公告)日：2021-11-02

申请号：US16726512

申请日：2019-12-24

Applicant: Seagate Technology LLC

Inventor： Tong Zhao ,  Michael C. Kautzky ,  Sarbeswar Sahoo ,  Justin Brons ,  Jie Gong ,  Yuhang Cheng

IPC: C23C14/58 ,  G11B5/31 ,  G11B5/00 ,  G11B5/60

Abstract: Devices having an air bearing surface (ABS), the device including a near field transducer, the near field transducer having a peg and a disc, the peg having a region adjacent the ABS, the peg including a plasmonic material selected from gold (Au), silver (Ag), copper (Cu), ruthenium (Ru), rhodium (Rh), aluminum (Al), or combinations thereof; and at least one other secondary atom selected from germanium (Ge), tellurium (Te), aluminum (Al), antimony (Sb), tin (Sn), mercury (Hg), indium (In), zinc (Zn), iron (Fe), copper (Cu), manganese (Mn), silver (Ag), chromium (Cr), cobalt (Co), and combinations thereof, wherein a concentration of the secondary atom is higher at the region of the peg adjacent the ABS than a concentration of the secondary atom throughout the bulk of the peg. Methods of forming NFTs are also disclosed.

公开(公告)号：US10580440B2

公开(公告)日：2020-03-03

申请号：US16260910

申请日：2019-01-29

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sarbeswar Sahoo ,  Martin Blaber ,  Hui Brickner ,  Tong Zhao ,  Yuhang Cheng ,  John Duda ,  Tae-Woo Lee

IPC: G11B7/00 ,  G11B5/31 ,  G11B5/60 ,  G11B5/00

Abstract: Devices having an air bearing surface (ABS), the devices including a write pole; a near field transducer (NFT) that includes a peg and a disc, wherein the peg is at the ABS of the device; a heat sink positioned adjacent the disc of the NFT; a dielectric gap positioned adjacent the peg of the NFT at the ABS of the device; and a conformal diffusion barrier layer positioned between the write pole and the dielectric gap, the disc, and the heat sink, wherein the conformal diffusion barrier layer forms at least one angle that is not greater than 135°.

公开(公告)号：US10519540B2

公开(公告)日：2019-12-31

申请号：US16260925

申请日：2019-01-29

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Tong Zhao ,  Michael C. Kautzky ,  Sarbeswar Sahoo ,  Justin Brons ,  Jie Gong ,  Yuhang Cheng

IPC: G11B11/105 ,  C23C14/58 ,  G11B5/31 ,  G11B5/00 ,  G11B5/60

Abstract: Devices having an air bearing surface (ABS), the device including a near field transducer, the near field transducer having a peg and a disc, the peg having a region adjacent the ABS, the peg including a plasmonic material selected from gold (Au), silver (Ag), copper (Cu), ruthenium (Ru), rhodium (Rh), aluminum (Al), or combinations thereof; and at least one other secondary atom selected from germanium (Ge), tellurium (Te), aluminum (Al), antimony (Sb), tin (Sn), mercury (Hg), indium (In), zinc (Zn), iron (Fe), copper (Cu), manganese (Mn), silver (Ag), chromium (Cr), cobalt (Co), and combinations thereof, wherein a concentration of the secondary atom is higher at the region of the peg adjacent the ABS than a concentration of the secondary atom throughout the bulk of the peg. Methods of forming NFTs are also disclosed.

公开(公告)号：US10510364B2

公开(公告)日：2019-12-17

申请号：US14935753

申请日：2015-11-09

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Tong Zhao ,  Justin Brons ,  Steven C. Riemer ,  Michael C. Kautzky ,  Xiaoyue Huang ,  Sarbeswar Sahoo

IPC: G11B5/00 ,  G11B5/31 ,  C23C14/34 ,  C23C14/08 ,  C23C14/06 ,  C23C14/00 ,  C23C14/18 ,  C23C16/455 ,  C23C16/40

Abstract: Devices that include a near field transducer (NFT) including a crystalline plasmonic material having crystal grains and grain boundaries; and nanoparticles disposed in the crystal grains, on the grain boundaries, or some combination thereof, wherein the nanoparticles are oxides of, lanthanum (La), barium (Ba), strontium (Sr), erbium (Er), hafnium (Hf), germanium (Ge), or combinations thereof; nitrides of zirconium (Zr), niobium (Nb), or combinations thereof; or carbides of silicon (Si), aluminum (Al), boron (B), zirconium (Zr), tungsten (W), titanium (Ti), niobium (Nb), or combinations thereof.

公开(公告)号：US10217482B2

公开(公告)日：2019-02-26

申请号：US15606040

申请日：2017-05-26

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Vijay Karthik Sankar ,  Tong Zhao ,  Yongjun Zhao ,  Michael C. Kautzky ,  Hui Brickner ,  Sarbeswar Sahoo

IPC: G11B5/40 ,  G11B5/31 ,  G11B5/60 ,  G11B7/24059 ,  G11B5/84 ,  G11B5/48 ,  B05B1/36 ,  G11B5/85 ,  G11B5/00

Abstract: Devices that include a near field transducer (NFT), the NFT having a disc and a peg, and the peg having five surfaces thereof; and at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer including one or more of the following: yttrium (Y), tin (Sn), iron (Fe), copper (Cu), carbon (C), holmium (Ho), gallium (Ga), silver (Ag), ytterbium (Yb), chromium (Cr), tantalum (Ta), iridium (Ir), zirconium (Zr), yttrium (Y), scandium (Sc), cobalt (Co), silicon (Si), nickel (Ni), molybdenum (Mo), niobium (Nb), palladium (Pd), titanium (Ti), rhenium (Re), osmium (Os), platinum (Pt), aluminum (Al), ruthenium (Ru), rhodium (Rh), vanadium (V), germanium (Ge), tin (Sn), magnesium (Mg), iron (Fe), copper (Cu), tungsten (W), hafnium (Hf), carbon (C), boron (B), holmium (Ho), antimony (Sb), gallium (Ga), manganese (Mn), silver (Ag), indium (In), bismuth (Bi), zinc (Zn), ytterbium (Yb), and combinations thereof.

公开(公告)号：US10190210B2

公开(公告)日：2019-01-29

申请号：US15817503

申请日：2017-11-20

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Tong Zhao ,  Michael C. Kautzky ,  Sarbeswar Sahoo ,  Justin Brons ,  Jie Gong ,  Yuhang Cheng

IPC: G11B11/105 ,  C23C14/58 ,  G11B5/31 ,  G11B5/00 ,  G11B5/60

Abstract: Devices having an air bearing surface (ABS), the device including a near field transducer, the near field transducer having a peg and a disc, the peg having a region adjacent the ABS, the peg including a plasmonic material selected from gold (Au), silver (Ag), copper (Cu), ruthenium (Ru), rhodium (Rh), aluminum (Al), or combinations thereof; and at least one other secondary atom selected from germanium (Ge), tellurium (Te), aluminum (Al), antimony (Sb), tin (Sn), mercury (Hg), indium (In), zinc (Zn), iron (Fe), copper (Cu), manganese (Mn), silver (Ag), chromium (Cr), cobalt (Co), and combinations thereof, wherein a concentration of the secondary atom is higher at the region of the peg adjacent the ABS than a concentration of the secondary atom throughout the bulk of the peg. Methods of forming NFTs are also disclosed.

公开(公告)号：US10102872B2

公开(公告)日：2018-10-16

申请号：US15073396

申请日：2016-03-17

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Justin Brons ,  Tong Zhao ,  Yuhang Cheng ,  Dimitar V. Dimitrov

IPC: G11B5/31 ,  G11B5/00

Abstract: Devices that include a near field transducer (NFT), the NFT having at least one external surface; and at least one multilayer adhesion layer positioned on at least a portion of the at least one external surface, the multilayer adhesion layer including a first layer and a second layer, with the second layer being in contact with the portion of the at least one external surface of the NFT, the first layer including: yttrium (Y), scandium (Sc), zirconium (Zr), hafnium (Hf), silicon (Si), boron (B), tantalum (Ta), barium (Ba), aluminum (Al), titanium (Ti), niobium (Nb), calcium (Ca), beryllium (Be), strontium (Sr), magnesium (Mg), lithium (Li), or combinations thereof; and the second layer including: lanthanum (La), boron (B), lutetium (Lu), aluminum (Al), deuterium (D), cerium (Ce), uranium (U), praseodymium (Pr), yttrium (Y), silicon (Si), iridium (Ir), carbon (C), thorium (Th), scandium (Sc), titanium (Ti), vanadium (V), phosphorus (P), barium (Ba), europium (Eu), or combinations thereof.