公开(公告)号：US20040120870A1

公开(公告)日：2004-06-24

申请号：US10329251

申请日：2002-12-23

Inventor： Jason Blackburn ,  Jeremie Dalton

IPC: B01J010/00 ,  B01J008/04

CPC classification number: B01J3/008 ,  Y02P20/544

Abstract: A reactor vessel is provided with a solvent in a supercritical PVT state for use in depositing films on a deposition substrate. A metal organic precursor is dissolved in the supercritical solvent, as is a reaction agent. A chemical reaction deposits a film, such as a metal film on a semiconducting wafer, and reaction byproducts including a ligand ensue from the chemical reaction. Effluent from the reactor vessel is submitted to a precursor-forming agent that reacts with the ligand to rejuvenate the precursor. Alternatively, the precursor-forming agent can be used for point-of-use formation of the precursor with or without recycle of reaction byproducts.

Abstract translation: 反应器容器设置有超临界PVT状态的溶剂，用于在沉积基板上沉积膜。 金属有机前体与反应剂一样溶解在超临界溶剂中。 化学反应在半导体晶片上沉积诸如金属膜的膜，并且由化学反应引起包括配体的反应副产物。 将来自反应器容器的流出物送到与配体反应以使前体恢复活力的前体形成剂。 或者，前体形成剂可以用于使用或不使反应副产物再循环的前体的使用点形成。

公开(公告)号：US06576262B1

公开(公告)日：2003-06-10

申请号：US09700441

申请日：2001-03-08

Applicant: Mazen Hermiz Hanna ,  Peter York

Inventor： Mazen Hermiz Hanna ,  Peter York

IPC: A61K914

CPC classification number: B01D11/0407 ,  A61K9/1688 ,  B01D11/0403 ,  B01D11/0488 ,  B01J2/04 ,  B01J3/008 ,  Y02P20/544

Abstract: The invention provides a method for forming particles of a target substance (26), involving: (a) preparing a solution or suspension of the substance in a vehicle (21) which is or includes either a near-critical fluid (21) or a first supercritical fluid; (b) introducing the solution or suspension into a particle formation vessel (32); and (c) contacting the solution or suspension, in the particle formation vessel, with a second super-critical fluid, under conditions which allow the second supercritical fluid to cause precipitation of particles of the target substance from the solution or suspension; wherein the second supercritical fluid is miscible or substantially miscible with the vehicle and is a fluid in which the target substance is insoluble or substantially insoluble. Also provided is apparatus for use in carrying out an embodiment of the method, including a particle formation vessel and means for controlling the temperature and pressure inside it; a fluid mixing vessel and means for controlling the temperature and pressure inside it; first fluid inlet means for introducing into the fluid mixing vessel a vehicle and a solution of a target substance in a primary solvent, so as to form in the fluid mixing vessel a solution of the substance and the primary solvent in the vehicle; and second fluid inlet means for introducing the solution thus formed, preferably together with a second supercritical fluid, into the particle formation vessel. The invention also provides a particulate product formed using the method.

Abstract translation: 本发明提供一种形成目标物质（26）的颗粒的方法，其包括：（a）制备物质在车辆（21）中的溶液或悬浮液，所述车辆（21）是或包括近临界流体（21）或 第一超临界流体; （b）将溶液或悬浮液引入颗粒形成容器（32）中; 和（c）在允许第二超临界流体从溶液或悬浮液中引起目标物质颗粒沉淀的条件下使颗粒形成容器中的溶液或悬浮液与第二超临界流体接触; 其中所述第二超临界流体与所述载体是可混溶的或基本上可混溶的，并且是其中所述目标物质不溶或基本不溶的流体。 还提供了用于实施该方法的实施例的装置，包括颗粒形成容器和用于控制其内的温度和压力的装置; 流体混合容器和用于控制其内的温度和压力的装置; 第一流体入口装置，用于将载体和目标物质溶液引入流体混合容器中，以在流体混合容器中形成物质和主要溶剂在载体中的溶液; 以及用于将如此形成的溶液优选与第二超临界流体一起引入颗粒形成容器的第二流体入口装置。 本发明还提供了使用该方法形成的颗粒产物。

公开(公告)号：US06576185B2

公开(公告)日：2003-06-10

申请号：US09753320

申请日：2000-12-28

Applicant: David A. Hazlebeck

Inventor： David A. Hazlebeck

IPC: B01D3500

CPC classification number: F28F19/02 ,  B01J3/008 ,  B01J3/04 ,  B01J19/02 ,  B01J2219/00085 ,  B01J2219/00094 ,  B01J2219/0204 ,  B01J2219/0218 ,  B01J2219/0236 ,  C22B7/00 ,  F23M2900/05001 ,  F23M2900/05004 ,  Y02P10/212

Abstract: A system and method for performing hydrothermal treatment includes reactor vessel formed with a pressure bearing wall surrounding a reactor chamber. A liner protects the wall from exposure to temperature extremes, corrosives and salt deposits. The liner is formed with three layers: a non-porous, corrosion resistant primary layer; a porous layer; and a non-porous, secondary layer. The porous layer is sealed between the primary layer and the secondary layer. The liner is positioned in the reactor chamber with the secondary layer facing the pressure bearing wall of the reactor chamber and the primary layer facing the reactor chamber. Connectors extend through the wall of the reactor vessel and the secondary layer to allow a fluid to be pumped through the porous layer to maintain the temperature of the liner. The connectors also allow for sampling of the fluid within the porous layer to detect leaks in the primary layer.

公开(公告)号：US20030073876A1

公开(公告)日：2003-04-17

申请号：US09940015

申请日：2001-08-27

Inventor： Bala Subramaniam ,  Christopher James Lyon

IPC: C07C002/58 ,  C07C002/56 ,  C07C015/067 ,  C07C015/12

CPC classification number: B01J31/4007 ,  B01J3/008 ,  B01J8/0207 ,  B01J8/0278 ,  B01J31/10 ,  B01J35/10 ,  B01J35/1014 ,  B01J35/1019 ,  B01J38/00 ,  B01J2038/005 ,  B01J2208/00628 ,  B01J2219/00202 ,  B01J2219/00213 ,  B01J2219/00231 ,  B01J2231/323 ,  B01J2231/52 ,  B01J2231/641 ,  C07C2/58 ,  C07C2531/10 ,  C10G29/205 ,  Y02P20/544 ,  Y02P20/584 ,  Y10S585/952

Abstract: Improved methods for conducting solid acid-catalyzed, near- or supercritical heterogeneous chemical reactions (e.g., alkylation reactions) are provided which give enhanced product yields and permit longer processing runs. The preferred reactions of the invention are carried out in the presence of a solid macroporous catalyst having a surface area of from about 50-400 m2/g and a pore size of from about 70-150 null. Product selectivity is enhanced by pressure-tuning of the reaction to promote production and separation of desired reaction products. In continuous processing, the chemical reaction may be interrupted before significant catalyst deactivation, followed by increasing reactor pressure and/or reducing reactor temperature to remove the accumulating coke; when the catalyst is regenerated, the original reaction conditions and reactant introduction may be resumed.

Abstract translation: 提供了用于进行固体酸催化，近或超临界异质化学反应（例如烷基化反应）的改进方法，其提供增强的产物产率并允许更长的处理运行。 本发明的优选反应在表面积为约50-400m 2 / g和孔径为约70-150的固体大孔催化剂存在下进行。 产物选择性通过反应的压力调节来增强，以促进所需反应产物的产生和分离。 在连续加工中，化学反应可能在显着的催化剂失活之前中断，随后增加反应器压力和/或降低反应器温度以除去积聚的焦炭; 当再生催化剂时，可以恢复原始的反应条件和反应物的引入。

公开(公告)号：US06334266B1

公开(公告)日：2002-01-01

申请号：US09665932

申请日：2000-09-20

Applicant: Heiko D Moritz ,  Jonathan A. Talbott ,  Mohan Chandra ,  James A. Tseronis ,  Ijaz Jafri

Inventor： Heiko D Moritz ,  Jonathan A. Talbott ,  Mohan Chandra ,  James A. Tseronis ,  Ijaz Jafri

IPC: F26B300

CPC classification number: B01J3/008 ,  B01J3/06 ,  F26B21/14 ,  H01L21/67034 ,  H01L21/67126 ,  H01L21/67757 ,  Y10S134/902

Abstract: A method and apparatus for fabricating and drying wafers, including micro-electro-mechanical system (MEMS) structures, in a second, supercritical processing fluid environment. The apparatus utilizes an inverted pressure vessel connected to a supercritical processing fluid supply and recover system, with an internal heat exchanger connected to external heating and cooling sources, which is closed with a vertically movable base plate. A wafer cassette configured for supporting multiple wafers is submerged in a first processing fluid within a container, which is installed on the base plate for insertion into the pressure vessel. Vessel inlet and outlet tubes extend vertically downward from the ceiling of the pressure vessel to nearly the base plate. Container inlet and outlet tubes extend vertically downward from the ceiling of the pressure vessel to inside the container and nearly to the bottom of the container. The tubes provide for displacement of the first processing fluid with the second processing fluid still in a liquid state, from which it is raised to supercritical state.

Abstract translation: 一种用于在第二超临界处理流体环境中制造和干燥晶片的方法和装置，包括微电子机械系统（MEMS）结构。 该设备利用与超临界加工流体供应和回收系统连接的倒置压力容器，内部热交换器连接到外部加热和冷却源，该外部加热和冷却源用可垂直移动的基板封闭。 构造成用于支撑多个晶片的晶片盒被浸没在容器内的第一处理流体中，该容器安装在基板上用于插入压力容器中。 容器入口和出口管从压力容器的天花板垂直向下延伸到几乎基板。 容器入口和出口管从压力容器的天花板垂直向下延伸到容器内部并且几乎到容器的底部。 这些管提供第一处理流体与第二处理流体的位移，该第二处理流体仍处于液态，从而将其升高到超临界状态。

公开(公告)号：US20010029971A1

公开(公告)日：2001-10-18

申请号：US09778124

申请日：2001-02-05

Inventor： Robert B. Farmer ,  Jonathan A. Talbott ,  Mohan Chandra ,  James A. Tseronis ,  Heiko D. Moritz

IPC: B08B013/00

CPC classification number: H01L21/67126 ,  B01J3/008 ,  B01J3/06 ,  H01L21/67034 ,  Y10S134/902

Abstract: An inverted pressure vessel system for conducting automated industrial processes requiring elevated pressure and temperatures has a vertically movable pedestal for opening and closing the underside loading port, with pedestal drive system and locking mechanism located below the pedestal top and isolated from the chamber opening. The chamber is connectible to a pressure control and process fluid supply system, and has heat exchangers connected to an external source for temperature control. Process fluids are distributed across a central process cavity through divergent inflow and convergent outflow process fluid channels.

Abstract translation: 用于进行需要升高的压力和温度的自动化工业过程的倒置压力容器系统具有用于打开和关闭下侧装载口的可垂直移动的底座，底座驱动系统和锁定机构位于基座顶部下方并与腔室开口隔离。 该室可连接到压力控制和过程流体供应系统，并具有连接到外部温度控制源的热交换器。 过程流体通过发散流入和汇流流出流体通道分布在中心过程腔中。

公开(公告)号：US20010007313A1

公开(公告)日：2001-07-12

申请号：US09733350

申请日：2000-12-08

Inventor： Akira Suzuki ,  Takashi Nishimoto

IPC: B01D017/00

CPC classification number: B01F15/00889 ,  B01F7/00458 ,  B01F7/00633 ,  B01F7/26 ,  B01F15/00883 ,  B01J3/008 ,  B01J19/1806 ,  B01J2219/00094 ,  B01J2219/00159 ,  B01J2219/00164 ,  C02F3/205 ,  C02F2101/363 ,  Y02W10/15

Abstract: For conversion of harmful compound in contaminated liquid into harmless compound by use of reactant, a plurality of agitators are arranged in a vertical superposition within a closed agitation chamber and, after the contaminated liquid is charged into the agitation chamber, the agitators are driven for rotation at a high speed in a rage from 10,000 to 18,000 rpm in order to create a field of super critical conditions in which free radicals are liberated from the harmful compound and coupled by the reactant. Neither high temperature heating nor high level pressurization is needed for processing of the contaminated liquid.

Abstract translation: 为了通过使用反应物将污染液体中的有害化合物转化为无害化合物，多个搅拌器在封闭的搅拌室内以垂直叠加方式布置，并且在将污染的液体装入搅拌室之后，搅拌器被驱动旋转 以高达10,000至18,000rpm的速度，以产生超临界条件的领域，其中自由基从有害化合物中释放并通过反应物偶联。 加工污染液体不需要高温加热也不需要高水平的加压。

公开(公告)号：US06241953B1

公开(公告)日：2001-06-05

申请号：US09337483

申请日：1999-06-21

Applicant: Pieter Krijgsman

Inventor： Pieter Krijgsman

IPC: F28D2100

CPC classification number: B01J3/02 ,  B01J3/008 ,  B01J3/04 ,  B01J19/0066 ,  B01J19/02 ,  B01J19/1862 ,  B01J2219/0009 ,  B01J2219/0236 ,  C01B13/366 ,  F22B1/16 ,  F28D7/16 ,  F28F19/06 ,  Y10T137/0396 ,  Y10T137/86196

Abstract: A reaction product is formed and transferred from an autoclave to a receiving vessel at a laminar flow rate, using a self-adjusting transfer mechanism. A specific amount of water in the receiving vessel is heated and vaporized prior to the reaction product transfer to raise the pressure in the receiving vessel to saturation pressure. A flow passage between the autoclave and the receiving vessel is now opened, and a resulting pressure differential between the autoclave and the receiving vessel initiates the transfer process. A heat exchanger cools the reaction product flowing from the autoclave to the receiving vessel, where the amount of cooling is dependent upon the transfer rate of the reaction product. An increased transfer rate will cause the hotter reaction product entering the receiving vessel to increase the pressure inside the receiving vessel, thereby reducing, or self-adjusting, the transfer rate. The heat exchanger may also generate steam which is fed into the receiving vessel to adjust the pressure in the receiving vessel and thus adjust the transfer rate of the reaction product.

Abstract translation: 使用自调节转移机构，以层流速度从高压釜形成反应产物并将其转移到接收容器。 接收容器中的特定量的水在反应产物转移之前被加热和蒸发，以将接收容器中的压力升高至饱和压力。 现在打开高压釜和接收容器之间的流动通道，并且在高压釜和接收容器之间产生的压力差开始转移过程。 热交换器将从高压釜流动的反应产物冷却至接收容器，其中冷却量取决于反应产物的转移速率。 增加的转移速率将导致更热的反应产物进入接收容器以增加接收容器内的压力，从而减少或自调整传送速率。 热交换器还可以产生进入接收容器的蒸汽，以调节接收容器中的压力，从而调节反应产物的传送速率。

公开(公告)号：US06238568B1

公开(公告)日：2001-05-29

申请号：US09306594

申请日：1999-05-06

Applicant: David A. Hazlebeck

Inventor： David A. Hazlebeck

IPC: C02F172

CPC classification number: A62D3/20 ,  A62D2101/20 ,  B01J3/008 ,  C02F1/72 ,  C02F11/086 ,  Y02E50/30 ,  Y02P20/13

Abstract: A system (10) and method for hydrothermal treatment of a feed material (11) includes a reaction chamber (14) in a reactor (12). Importantly, an additive (16) is added with the feed material (11) to the reaction chamber (14). The additive (16) causes a reaction medium (18) in the reaction chamber (14) to include phosphate compounds. The phosphate compounds allow precipitating salts to be transported through the reactor (12) without plugging and inhibiting the build-up of precipitating salts in the reaction chamber (14).

Abstract translation: 用于进料（11）的水热处理的系统（10）和方法包括在反应器（12）中的反应室（14）。 重要的是，将添加剂（16）加入到反应室（14）中。 添加剂（16）使反应室（14）中的反应介质（18）包含磷酸盐化合物。 磷酸盐化合物允许沉淀盐通过反应器（12）输送，而不堵塞并抑制沉淀盐在反应室（14）中的积聚。

公开(公告)号：US06214944B1

公开(公告)日：2001-04-10

申请号：US09243217

申请日：1999-02-02

Applicant: Thanh Nguyen ,  Wes Parker ,  Don Austin Duggar ,  Aron Griffith

Inventor： Thanh Nguyen ,  Wes Parker ,  Don Austin Duggar ,  Aron Griffith

IPC: C08F11006

CPC classification number: B01J19/1837 ,  B01J3/008 ,  B01J19/0006 ,  B01J19/0013 ,  B01J19/1818 ,  B01J2219/00056 ,  B01J2219/00083 ,  B01J2219/00108 ,  B01J2219/00162 ,  B01J2219/002 ,  B01J2219/00238 ,  Y02P20/544

Abstract: A system for pressurizing a propylene polymerization reactor includes: a pressurization vessel including an internal heat exchanger; a pressure sensor for monitoring the pressure in the vessel, the pressure sensor providing a signal indicative of the pressure in the vessel; a control valve for supplying heated gas to a first region of the vessel in response to signals from the pressure sensor, the first region of the vessel being maintained above the critical temperature and pressure of propylene; a temperature sensor for monitoring the temperature in a second region of the pressurization vessel, the temperature sensor providing a signal indicative of the temperature in the second region of the vessel; and a control valve for supplying a cooling medium to the internal heat exchanger to cool propylene in the second region below the critical temperature of propylene at the pressure in the pressurization vessel.

Abstract translation: 一种用于加压丙烯聚合反应器的系统包括：加压容器，包括内部热交换器; 用于监测容器中的压力的​​压力传感器，压力传感器提供指示容器中的压力的​​信号; 用于响应于来自压力传感器的信号将加热的气体供应到容器的第一区域的控制阀，容器的第一区域保持在丙烯的临界温度和压力之上; 温度传感器，用于监测加压容器的第二区域中的温度，温度传感器提供指示容器的第二区域中的温度的信号; 以及控制阀，用于向内部热交换器供应冷却介质，以在加压容器中的压力下将丙烯的丙烯在低于丙烯的临界温度下冷却。