公开(公告)号：US20060108549A1

公开(公告)日：2006-05-25

申请号：US11197293

申请日：2005-08-03

Applicant: Jerome Eldridge

Inventor： Jerome Eldridge

IPC: F16K31/18

CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

公开(公告)号：US06869818B2

公开(公告)日：2005-03-22

申请号：US10298847

申请日：2002-11-18

Applicant: James M. Harris ,  Sapna Patel

Inventor： James M. Harris ,  Sapna Patel

IPC: B81B7/00 ,  B81C99/00 ,  F16K99/00 ,  H01L21/02 ,  H01L21/66 ,  H01L23/544 ,  H01L21/00

CPC classification number: H01L22/20 ,  B81B7/0012 ,  B81B2201/054 ,  B81B2201/058 ,  B81C99/0045 ,  B81C2203/038 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0059 ,  F16K2099/0074 ,  H01L21/02071 ,  H01L22/24 ,  H01L22/34

Abstract: A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like ClF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.

公开(公告)号：US06612535B1

公开(公告)日：2003-09-02

申请号：US09012309

申请日：1998-01-23

Applicant: Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean

Inventor： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean

IPC: F16K3102

CPC classification number: F16K99/0001 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008

Abstract: A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.

Abstract translation: 阀膜由硅橡胶制成。 优选地，阀是微机电系统（MEMS）热气动阀。 由于硅橡胶的有利的物理性能，阀门具有合理的功耗所需的性能。

公开(公告)号：US06345502B1

公开(公告)日：2002-02-12

申请号：US09191267

申请日：1998-11-12

Applicant: Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

Inventor： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F01B2900

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US20010017287A1

公开(公告)日：2001-08-30

申请号：US09745367

申请日：2000-12-22

Applicant: California Institute of Technology, a California corportion

Inventor： Xu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F02G001/04 ,  B44C001/22 ,  C23F001/00

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US06240962B1

公开(公告)日：2001-06-05

申请号：US09442076

申请日：1999-11-16

Applicant: Yu-Chong Tai ,  Xuan-Qi Wang

Inventor： Yu-Chong Tai ,  Xuan-Qi Wang

IPC: F16K1514

CPC classification number: F16K99/0001 ,  B81B3/001 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C2201/115 ,  F15C5/00 ,  F16K15/144 ,  F16K99/0009 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7888 ,  Y10T137/7895

Abstract: The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.

公开(公告)号：US6023121A

公开(公告)日：2000-02-08

申请号：US232940

申请日：1999-01-19

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

IPC: B81B3/00 ,  B81C1/00 ,  F03G7/06 ,  F15C5/00 ,  F16K99/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H65/00 ,  H01H67/26 ,  H04Q1/16 ,  H02N10/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  H01H1/0036 ,  H01H61/02 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  G02B6/3803 ,  G02B6/4226 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H67/26 ,  H01H9/14 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：US5962949A

公开(公告)日：1999-10-05

申请号：US965277

申请日：1997-11-06

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood

IPC: G01B21/00 ,  B25J7/00 ,  B81B3/00 ,  B81B7/02 ,  F03G7/06 ,  G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H37/32 ,  H01L37/00

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining an XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction. As such, the MEMS positioning apparatus can precisely position the stage as well as any objects carried by the stage in each of the X, Y and Z directions. As a result of the construction of the MEMS positioning apparatus, the MEMS positioning apparatus can also be fabricated in an affordable, reliable and reproducible manner without compromising the precision alignment provided by the MEMS positioning apparatus.

Abstract translation: 提供了一种微机电（MEMS）定位装置，其能够精确地将对象在X，Y和Z方向中的每一个定位。 MEMS定位设备包括参考表面，设置在参考表面的固定位置的支撑件以及限定垂直于支撑件悬挂并在参考表面的至少一部分上方的XY平面的平台。 MEMS定位装置还包括至少一个并且更典型的几个致动器，用于精确地定位平台，并且依次由舞台承载的物体。 例如，MEMS定位装置可以包括用于在致动时在XY平面中移动台的第一和第二MEMS致动器。 此外，MEMS定位装置可以包括用于在Z方向上移动台的Z致动器，例如热双压电晶片结构。 因此，MEMS定位装置可以精确地定位舞台以及在X，Y和Z方向中的每一个中由舞台承载的任何物体。 作为MEMS定位装置的结构的结果，MEMS定位装置也可以以可承受的，可靠的和可再生的方式制造，而不会损害由MEMS定位装置提供的精确对准。

公开(公告)号：US5729074A

公开(公告)日：1998-03-17

申请号：US407155

申请日：1995-03-20

Applicant: Hiromu Shiomi ,  Yoshiki Nishibayashi ,  Shin-ichi Shikata

Inventor： Hiromu Shiomi ,  Yoshiki Nishibayashi ,  Shin-ichi Shikata

IPC: B81B3/00 ,  B81C1/00 ,  G01C19/56 ,  G01H3/08 ,  G01H11/00 ,  G01H11/06 ,  G01L9/00 ,  G01P15/08 ,  G01P15/125 ,  G01Q70/14 ,  G01Q80/00

CPC classification number: G01P15/0802 ,  B81B3/007 ,  B81C1/0015 ,  B81C1/00682 ,  G01H11/00 ,  G01H11/06 ,  G01H3/08 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/034 ,  B81B2201/035 ,  B81B2201/054 ,  B81B2203/0118 ,  B81B2203/04 ,  B81C2201/0109 ,  G01P2015/0828

Abstract: A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.

公开(公告)号：US11944412B2

公开(公告)日：2024-04-02

申请号：US17336725

申请日：2021-06-02

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Ying-Lun Chang ,  Ching-Sung Lin ,  Chi-Feng Huang ,  Yung-Lung Han ,  Chang-Yen Tsai ,  Wei-Ming Lee ,  Chun-Yi Kuo ,  Tsung-I Lin

IPC: A61B5/021 ,  B81B3/00

CPC classification number: A61B5/02133 ,  B81B3/0021 ,  A61B2560/0214 ,  A61B2562/028 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2207/012

Abstract: A blood pressure detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a gas-pressure-sensing element, a driving-chip element, an encapsulation layer and a valve layer. The substrate includes inlet apertures. The microelectromechanical element and the gas-pressure-sensing element are stacked and integrally formed on the substrate. The encapsulation layer is encapsulated and positioned on the substrate. A flowing-channel space is formed above the microelectromechanical element and the gas-pressure-sensing element. The encapsulation layer includes an outlet aperture in communication with an airbag. The driving-chip element controls the microelectromechanical element, the gas-pressure-sensing element and valve units to transport gas. The gas is introduced into the flowing-channel space through the inlet apertures and transported into the airbag through the outlet aperture, to inflate the airbag for blood pressure measurement, and a detection datum of blood pressure outputted by the gas-pressure-sensing element is transmitted to the microprocessor to calculate.