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    Method of making extreme ultraviolet lithography glass substrates
    85.
    发明申请
    Method of making extreme ultraviolet lithography glass substrates 审中-公开
    制造极紫外光刻玻璃基板的方法

    公开(公告)号：US20040025542A1

    公开(公告)日：2004-02-12

    申请号：US10456318

    申请日：2003-06-05

    Inventor： Laura J. Ball ,  Sylvain Rakotoarison

    IPC: C03B019/06 ,  C03B037/018

    CPC classification number: C03B19/143 ,  C03B19/01 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/42

    Abstract: A method for making extreme ultraviolet lithography tool glass substrates includes generating a plasma, delivering reactants comprising a silica precursor and a titania precursor into the plasma to produce titania and silica particles, and depositing the titania and silica particles on a deposition surface to form a homogeneous titania-doped silica. The invention provides for homogeneous glass substrates that are free of striae variations and provides for beneficial extreme ultraviolet lithography reflective optics.

    Abstract translation: 用于制造极紫外光刻工具玻璃基板的方法包括产生等离子体，将包含二氧化硅前体和二氧化钛前体的反应物输送到等离子体中以产生二氧化钛和二氧化硅颗粒，并将二氧化钛和二氧化硅颗粒沉积在沉积表面上以形成均匀的 二氧化钛掺杂二氧化硅。 本发明提供了不含条纹变化的均匀玻璃基底，并提供有益的极紫外光刻反射光学器件。

    Two step etching process for an optical fiber preform
    87.
    发明申请
    Two step etching process for an optical fiber preform 失效
    光纤预制棒的两步蚀刻工艺

    公开(公告)号：US20030150242A1

    公开(公告)日：2003-08-14

    申请号：US10319044

    申请日：2002-12-12

    Inventor： Julie E. Caplen ,  Jean-Philippe J. deSandro ,  Joohyun Koh

    IPC: C03B037/10

    CPC classification number: C03B37/01861 ,  C03B37/01466 ,  C03B2201/31 ,  C03C25/68 ,  Y02P40/57

    Abstract: This invention relates to a method of preparing an optical fiber preform with the preform having a uniform refractive index profile for the deposited oxide material that ultimately forms the optical fiber core. One embodiment of the invention relates to a process for preparing an optical fiber preform comprising the steps of etching a substrate a first time to remove a portion of a deposited oxide material from the preform by using a gas comprising an etchant gas containing fluorine at a sufficient temperature and gas concentration to create a fluorine contamination layer in the remaining deposited oxide material; and etching the preform a second time using a gas comprising an etchant gas containing fluorine at a sufficient temperature and gas concentration to remove the fluorine contamination layer without any substantial further fluorine contamination of the remaining deposited oxide material. Further embodiments relate to similar processes.

    Abstract translation: 本发明涉及一种制备光纤预型件的方法，其中预成型件对于最终形成光纤芯的沉积的氧化物材料具有均匀的折射率分布。 本发明的一个实施方案涉及一种制备光纤预制件的方法，其包括以下步骤：首先通过使用包含含氟的蚀刻剂气体的气体第一次蚀刻从预成型体中沉积的氧化物材料的一部分， 温度和气体浓度，以在剩余的沉积氧化物材料中产生氟污染层; 并且在足够的温度和气体浓度下使用包含含氟蚀刻剂气体的气体第二次蚀刻预成型件以除去氟污染层，而没有剩余的沉积氧化物材料的任何实质上的进一步的氟污染。 另外的实施例涉及类似的过程。

    Dispersion compensating fiber
    88.
    发明授权
    Dispersion compensating fiber 失效
    色散补偿光纤

    公开(公告)号：US06597848B1

    公开(公告)日：2003-07-22

    申请号：US09558649

    申请日：2000-04-26

    Applicant: George E. Berkey ,  Lei Jiang ,  Dale R. Powers ,  V. Srikant

    Inventor： George E. Berkey ,  Lei Jiang ,  Dale R. Powers ,  V. Srikant

    IPC: G02B618

    CPC classification number: G02B6/03688 ,  C03B37/01413 ,  C03B37/01446 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2203/26 ,  C03B2203/36 ,  C03B2207/36 ,  G02B6/02261 ,  G02B6/03677

    Abstract: Disclosed is a dispersion compensating optical fiber that includes a core surrounded by a cladding layer of refractive index nCL. The core includes at least three radially adjacent regions, a central core region, a moat region having a refractive index nM that is sufficiently lower than nCL such that &Dgr;M≦−0.4%, and a ring region. As the ring region exhibits sufficiently high refractive index at a sufficiently long distance from the outer edge of the moat region, the fiber can exhibit low values of negative dispersion slope at low values of negative dispersion and yet exhibit good bending loss. This ring region is also capable of imparting to the fiber a relatively high cutoff wavelength, so that the present invention is particularly well suited for use in L-band systems. A particularly suitable fiber has an index profile in which that part of the ring region at the transition between the moat and the ring region has a refractive index such that its delta value is close to zero. Also disclosed is a method of forming the fiber of the present invention.

    Abstract translation: 公开了一种色散补偿光纤，其包括由折射率nCL的包覆层包围的芯。 芯包括至少三个径向相邻的区域，中心芯区域，具有足够低于nCL的折射率nM的护城河区域，使得DELTAM <= -0.4％，以及环形区域。 由于环形区域在距离护城河区域的外边缘足够长的距离处呈现足够高的折射率，所以在低分散负值下，纤维可以表现出低的负色散斜率值，并表现出良好的弯曲损耗。 该环形区域还能够赋予纤维相当高的截止波长，使得本发明特别适用于L波段系统。 特别合适的纤维具有折射率分布，其中在护环和环区之间的转变处的环区的那部分具有折射率使得其δ值接近于零。 还公开了形成本发明的纤维的方法。

    Isotopically altered optical fiber
    89.
    发明申请
    Isotopically altered optical fiber 失效
    同位素改变的光纤

    公开(公告)号：US20030128955A1

    公开(公告)日：2003-07-10

    申请号：US10322148

    申请日：2002-12-18

    Inventor： Douglas C. Allan ,  John T. Brown ,  Lisa C. Chacon ,  Adam J. G. Ellison ,  James C. Fajardo ,  Stuart Gray ,  Keith L. House ,  Karl W. Koch III ,  Dale R. Powers ,  James A. West

    IPC: G02B006/02

    CPC classification number: C03C13/045 ,  C03B37/01413 ,  C03B37/01446 ,  C03B37/01807 ,  C03B37/01823 ,  C03B37/01853 ,  C03B2201/20 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2207/30 ,  C03B2207/36 ,  C03C4/0042 ,  C03C13/046 ,  G02B6/02 ,  G02B6/02228 ,  G02B6/02271 ,  G02B6/03644 ,  G02B6/03677 ,  G02B6/03694

    Abstract: An isotopically-altered, silica based optical fiber is provided having lower losses, broader bandwidth, and broader Raman gain spectrum characteristics than conventional silica-based fiber. A heavier, less naturally abundant isotope of silicon or oxygen is substituted for a lighter, more naturally abundant isotope to shift the infrared absorption to a slightly longer wavelength. In one embodiment, oxygen-18 is substituted for the much more naturally abundant oxygen-16 at least in the core region of the fiber. The resulting isotopically-altered fiber has a minimum loss of 0.044 dB/km less than conventional fiber, and a bandwidth that is 17 percent broader for a loss range between 0.044-0.034 dB/km. The fiber may be easily manufactured with conventional fiber manufacturing equipment by way of a plasma chemical vapor deposition technique. When a 50 percent substitution of oxygen-18 for oxygen-16 is made in the core region of the fiber, the Raman gain spectrum is substantially broadened.

    Abstract translation: 提供了一种同位素改性的二氧化硅基光纤，其比传统的二氧化硅基光纤具有更低的损耗，更宽的带宽和更广泛的拉曼增益光谱特性。 更重，更不自然丰富的硅或氧的同位素代替较轻的，更自然的丰富的同位素，以将红外吸收转移到稍长的波长。 在一个实施方案中，氧-18至少在纤维的核心区域中替代天然丰富的氧-16。 所得到的同位素改变的光纤比常规光纤的损耗最小为0.044 dB / km，对于0.044-0.034 dB / km之间的损耗范围，宽带宽为17％。 纤维可以通过等离子体化学气相沉积技术容易地用传统的纤维制造设备制造。 当在纤维的纤芯区域中进行氧-16取代氧-16的50％时，拉曼增益谱显着扩大。

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