公开(公告)号：US20050003642A1

公开(公告)日：2005-01-06

申请号：US10835259

申请日：2004-04-30

Applicant: Thomas Hecht ,  Uwe Schroder ,  Ulrich Mantz ,  Stefan Jakschik ,  Andreas Orth

Inventor： Thomas Hecht ,  Uwe Schroder ,  Ulrich Mantz ,  Stefan Jakschik ,  Andreas Orth

IPC: G01B11/22 ,  G01J3/453 ,  G01N21/21 ,  H01L21/337

CPC classification number: G01N21/211 ,  G01B11/22 ,  G01J3/453

Abstract: The present invention relates to a method for determining the depth of a buried structure in a semiconductor wafer. According to the invention, the layer behavior of the semiconductor wafer which is brought about by the buried structure when the semiconductor wafer is irradiated with electromagnetic radiation in the infrared range and arises as a result of the significantly longer wavelengths of the radiation used in comparison with the lateral dimensions of the buried structure is utilized to determine the depth of the buried structure by spectrometric and/or ellipsometric methods.

Abstract translation: 本发明涉及一种用于确定半导体晶片中的掩埋结构的深度的方法。 根据本发明，当半导体晶片在红外范围内被电磁辐射照射时，由掩埋结构引起的半导体晶片的层行为，并且由于与所使用的辐射相比显着更长的辐射波长而产生 掩埋结构的横向尺寸用于通过光谱测量和/或椭偏方法确定掩埋结构的深度。

公开(公告)号：US20040201850A1

公开(公告)日：2004-10-14

申请号：US10750633

申请日：2003-12-22

Inventor： Arsen R. Hajian ,  J. Thomas Armstrong ,  David Mozurkewich

IPC: G01B009/02

CPC classification number: G01J3/453

Abstract: A dispersing Fourier Transform interferometer (DFTS) includes a Fourier Transform Spectrometer having an input for receiving a source light and an output, and a dispersive element having an input coupled to the Fourier Transform Spectrometer output and an output for providing the resulting multiple narrowband interferogram outputs of different wavelengths representative of the source light input. A processor applies a sparse sampling algorithm for determining the best fit between a set of model interferograms and the set of data interferograms. The model interferogram is inferred as specified at a discrete set of lags, a difference is determined between the model interferogram and the data interferogram, and an optimization method determines the model interferogram best matched to the data interferogram. The DFTS interferometer improves the sensitivity of a standard FTS by including a dispersive element, increasing the SNR by a factor of (Rg)1/2 as compared to the FTS, where Rg is the resolving power of the conventional dispersing spectrometer (i.e. Rgnullnull/nullnull).

Abstract translation: 分散傅里叶变换干涉仪（DFTS）包括具有用于接收源光和输出的输入的傅立叶变换光谱仪，以及具有耦合到傅里叶变换光谱仪输出的输入的色散元件和用于提供所得到的多个窄带干涉图输出的输出 不同波长代表源光输入。 处理器应用稀疏抽样算法来确定一组模型干涉图与数据干涉图集之间的最佳拟合。 模型干涉图按照离散的滞后集合推定，在模型干涉图和数据干涉图之间确定差异，优化方法确定与数据干涉图最佳匹配的模型干涉图。 DFTS干涉仪通过包括色散元件提高标准FTS的灵敏度，与FTS相比，将SNR提高了（Rg）1/2倍，其中Rg是常规分散光谱仪的分辨率（即 Rg = lambda / Deltalambda）。

公开(公告)号：US06747742B1

公开(公告)日：2004-06-08

申请号：US10179724

申请日：2002-06-24

Applicant: Ravi Kant Verma

Inventor： Ravi Kant Verma

IPC: G01B902

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0254 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/453

Abstract: The present invention is a cost-effective and compact micro-spectrometer for rapid detection of chemical compounds in the low concentration limit. The invention provides for significantly higher sensitivity compared to conventional spectroscopy techniques (continuous wave and Fourier transform methods) by placing the sample within a high Finesse etalon cavity. An Optical Spectrum Analyzer (OSA) built on either continuous wave (CW-SPEC), or Fourier Transform Absorption Spectroscopy (FT-SPEC) is used to monitor the spectrum from the etalon cavity/sample combination during tuning of the etalon cavity˜this information is then used to reconstruct the absorption spectrum.

Abstract translation: 本发明是用于在低浓度限度下快速检测化合物的成本有效且紧凑的微光谱仪。 通过将样品放置在高Finesse标准具腔内，本发明提供了与常规光谱技术（连续波和傅里叶变换方法）相比显着更高的灵敏度。 使用连续波（CW-SPEC）或傅立叶变换吸收光谱（FT-SPEC）建立的光谱分析仪（OSA）来监测标准具腔/样品组合在标准光腔调谐期间的光谱〜该信息 然后用于重建吸收光谱。

公开(公告)号：US06654125B2

公开(公告)日：2003-11-25

申请号：US10116267

申请日：2002-04-04

Applicant: John D. Maynard ,  Trent Ridder

Inventor： John D. Maynard ,  Trent Ridder

IPC: G01B902

CPC classification number: G01J3/453

Abstract: A vertical cavity surface-emitting laser (VCSEL) package utilized as a laser reference for use in interferometry. The primary disadvantage of VCSELs, in terms of interferometry, has been found to be the relatively poor wavenumber stability of the beam. The present invention is a method and apparatus that makes viable a VCSEL package suitable for use as a reference in interferometry. The VCSEL package incorporates current control, temperature control and an algorithm for correcting wavenumber drift. The algorithm is derived from spectroscopic analysis of a reference sample having a known spectrum and comparing the generated spectrum to the known spectrum.

Abstract translation: 垂直腔表面发射激光器（VCSEL）封装，用作激光参考，用于干涉测量。 已经发现VCSEL在干涉测量方面的主要缺点是光束的波数相对较差。 本发明是一种可行的VCSEL封装的方法和装置，适用于干涉测量中的参考。 VCSEL封装包含电流控制，温度控制和用于校正波数漂移的算法。 该算法来源于具有已知光谱的参考样品的光谱分析，并将生成的光谱与已知光谱进行比较。

公开(公告)号：US06555821B1

公开(公告)日：2003-04-29

申请号：US09544147

申请日：2000-04-06

Applicant: Jaakko-Juhani Himberg ,  Olli Laakso ,  Reijo Laaksonen

Inventor： Jaakko-Juhani Himberg ,  Olli Laakso ,  Reijo Laaksonen

IPC: G06F1520

CPC classification number: G01N21/3504 ,  G01J3/453 ,  G01J2003/2866 ,  G01N2021/3595

Abstract: A method for detecting and measuring volatile components in expired gas by sampling the expired gas containing the volatile components; passing infrared radiation from an interferometer through the sample; detecting infrared radiation transmitted from the sample to produce a signal characteristic for the volatile components in the sample; and processing the signal and a set of single component reference library spectra of pure molecular gases in order to detect and calculate the amount of the volatile components in the blood of an individual expiring the gas, including the use of a low resolution FT-IR spectrometer in the detecting and processing.

Abstract translation: 一种用于通过对含有挥发性组分的过期气体进行取样来检测和测量呼出气体中挥发性成分的方法 将干涉仪的红外辐射通过样品; 检测从样品发射的红外辐射，以产生样品中挥发性组分的信号特征; 并处理信号和一组纯分子气体的单一组分参考文献光谱，以便检测和计算个体到达气体的血液中的挥发性成分的量，包括使用低分辨率FT-IR光谱仪 在检测和处理中。

公开(公告)号：US20020167670A1

公开(公告)日：2002-11-14

申请号：US09854070

申请日：2001-05-11

Inventor： Douglas M. Baney ,  Bogdan Szafraniec

IPC: G01B009/02

CPC classification number: G01J9/04 ,  G01J3/453

Abstract: Heterodyne-based optical spectrum analysis involves measuring the sweep rate of a swept local oscillator signal and then generating an output signal that accounts for non-uniformities in the sweep rate of the swept local oscillator signal. In an embodiment, an input signal is combined with a swept local oscillator signal in an optical coupler and the sweep rate of the swept local oscillator signal is measured in a relative frequency measurement system. The combined optical signal is output from the optical coupler to a receiver and a heterodyne beat signal is generated. The heterodyne beat signal and measured local oscillator frequency sweep rate information are utilized by a signal processor to generate an output signal that is indicative of an optical parameter of the input signal and that accounts for non-uniformities in the sweep rate of the local oscillator signal. Because the actual sweep rate of the swept local oscillator signal is measured during analysis of the input signal, the horizontal scale accuracy of heterodyne-based OSAs is improved.

Abstract translation: 基于异步的光谱分析涉及测量扫描本地振荡器信号的扫描速率，然后产生考虑扫描本地振荡器信号的扫描速率的不均匀性的输出信号。 在一个实施例中，输入信号与光耦合器中的扫频本地振荡器信号组合，并且在相对频率测量系统中测量扫频本地振荡器信号的扫描速率。 组合的光信号从光耦合器输出到接收器，并产生外差拍信号。 外差拍信号和测量的本地振荡器频率扫描速率信息被信号处理器利用以产生指示输入信号的光学参数并且考虑到本地振荡器信号的扫描速率的不均匀性的输出信号 。 由于在分析输入信号期间测量扫频本地振荡器信号的实际扫描速率，因此改善了基于外差的OSA的水平刻度精度。

公开(公告)号：US06466961B1

公开(公告)日：2002-10-15

申请号：US09932438

申请日：2001-08-16

Applicant: David A. B. Miller

Inventor： David A. B. Miller

IPC: G06E300

CPC classification number: G01J3/453 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/457

Abstract: A method for adaptive spectral sensing developed for a two-dimensional image made up of picture elements. The method calls for illuminating at least one of the picture elements with an input light and deriving a time-varying spectral signal from the input light for that picture element. The time-varying spectral signal is processed with a time-varying reference signal by using a mathematical function such as convolution, multiplication, averaging, integrating, forming an inner product, matched filtering, addition, subtraction or division to obtain a processed output value for the picture element and this output value is then used in determining a spectral characteristic of the input light. The time-varying spectral signal is conveniently derived by optical filtering of the input light yielding an optical time-varying spectral signal. This method can be used by itself or in combination with at least one other adaptive technique such as adaptive spatial sensing and/or adaptive temporal sensing.

Abstract translation: 一种用于由图像元素组成的二维图像的自适应光谱感测方法。 该方法要求用输入光照射至少一个像素，并从该图像元素的输入光导出时变光谱信号。 时变频谱信号通过使用诸如卷积，乘法，平均，积分，形成内积，匹配滤波，加法，减法或除法等数学函数，用时变参考信号进行处理，以获得处理后的输出值 然后将像素和该输出值用于确定输入光的光谱特性。 时变光谱信号通过对产生光时变光谱信号的输入光的光学滤波方便地得出。 该方法可以单独使用或与至少一种其他自适应技术组合使用，例如自适应空间感测和/或自适应时间感测。

公开(公告)号：US20020072676A1

公开(公告)日：2002-06-13

申请号：US09783266

申请日：2000-12-01

Inventor： Natalia I. Afanassieva

IPC: A61B005/00

CPC classification number: A61B5/444 ,  A61B5/0075 ,  A61B5/415 ,  A61B5/7257 ,  G01J3/453 ,  G01N21/35 ,  G01N2021/3595

Abstract: The present invention relates to methods employing fiberoptic evanescent wave Fourier transform infrared (FEW-FTIR) spectroscopy using fiberoptic sensors operated in the attenuated total reflection (ATR) regime in the middle infrared (MIR) region of the spectrum (850 to 4000 cmnull1). The apparatus and method claimed is applied to diagnostics and characterization of noninvasive and rapid (seconds) direct measurements of spectra (in real time) of normal and pathological tissues in vivo, ex vivo and in vitro. The aim of our invention is testing and monitoring of normal skin and various skin tumor tissues at the early stages of their development. Furthermore the apparatus and method is suitable for fluid diagnostics, as well as endoscopic and biopsy applications. Specifically the remote diagnostics of normal skin and malignant tissue on the skin surface (directly on patient) can distinguish between normal and malignant skin. In addition the apparatus and method can be applied for different types of clinical diagnostics. Finally the invention relates to diagnostics of environmental damage of skin tissue and acupuncture points, and treatment of skin tissue on a molecular level.

Abstract translation: 本发明涉及使用在光谱的中红外（MIR）区域中的衰减全反射（ATR）区域中操作的光纤传感器使用光纤ev逝波傅里叶变换红外（FEW-FTIR）光谱的方法（850至4000cm -1） ）。 所要求的装置和方法应用于体内，离体和体外正常和病理组织的无创和快速（秒）直接测量光谱（实时）的诊断和表征。 我们发明的目的是在正常皮肤和各种皮肤肿瘤组织的发育早期阶段进行测试和监测。 此外，该装置和方法适用于流体诊断以及内窥镜和活检应用。 具体来说，皮肤表面（直接在患者身上）的正常皮肤和恶性组织的远程诊断可以区分正常和恶性皮肤。 此外，该装置和方法可以应用于不同类型的临床诊断。 最后本发明涉及皮肤组织和针刺穴位的环境损伤的诊断以及在分子水平上对皮肤组织的治疗。

公开(公告)号：US20010033364A1

公开(公告)日：2001-10-25

申请号：US09752833

申请日：2001-01-03

Inventor： Dario Cabib ,  Michael Adel ,  Robert A. Buckwald

IPC: A61B003/10

CPC classification number: A61B5/14555 ,  A61B3/10 ,  A61B5/411 ,  A61B5/7257 ,  C12Q1/6816 ,  C12Q1/6841 ,  C12Q1/6883 ,  G01J3/02 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/4406 ,  G01J3/453 ,  G01J3/4535 ,  G01J2003/2866 ,  G01N21/6428 ,  G01N21/6456 ,  G01N21/6458 ,  G01N33/5005 ,  G01N33/56966 ,  G01N33/582 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6441 ,  G06K9/00127 ,  G06K9/76

Abstract: A spectral bio-imaging method for enhancing pathologic, physiologic, metabolic and health related spectral signatures of an eye tissue, the method comprising the steps of (a) providing an optical device for eye inspection being optically connected to a spectral imager; (b) illuminating the eye tissue with light via the iris, viewing the eye tissue through the optical device and spectral imager and obtaining a spectrum of light for each pixel of the eye tissue; and (c) attributing each of the pixels a color according to its spectral signature, thereby providing an image enhancing the spectral signatures of the eye tissue.

公开(公告)号：US06233054B1

公开(公告)日：2001-05-15

申请号：US09288609

申请日：1999-04-09

Applicant: Jean-Marc Thériault

Inventor： Jean-Marc Thériault

IPC: G01B902

CPC classification number: G01J3/45 ,  G01J3/453 ,  G01J2003/2866

Abstract: A beamsplitter for a double beam interferometer with the interferometer and beamsplitter being designed to provide suppression of the interferometer's self emissions by optical substraction. The beamsplitter is formed of two flat transparent substrates having balanced transmission characteristics at the wavelengths of interest. These substrates are superposed and mounted next to each other with a thin layer of air squeezed between adjacent flat surfaces of the substrates. A temperature sensor on a mount in which the beamsplitter is installed allows for simplified radiometric calibration of the interferometer.

Abstract translation: 用于具有干涉仪和分束器的双光束干涉仪的分束器被设计成通过光学减法来抑制干涉仪的自发射。 分束器由在感兴趣的波长处具有平衡的传输特性的两个平坦的透明基板形成。 这些基板被叠置并且彼此相邻地安装有在衬底的相邻平坦表面之间挤压的薄的空气层。 安装分光镜的安装座上的温度传感器允许简化干涉仪的辐射校准。