公开(公告)号：US07230701B2

公开(公告)日：2007-06-12

申请号：US10333415

申请日：2001-07-16

Applicant: Jean-Louis Stehle ,  Jean-Philippe Piel ,  Pierre Boher ,  Luc Tantart ,  Jean-Pierre Rey

Inventor： Jean-Louis Stehle ,  Jean-Philippe Piel ,  Pierre Boher ,  Luc Tantart ,  Jean-Pierre Rey

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: The invention concerns an ellipsometer comprising: a source (2) capable of emitting a broadband ray (4), a polarizer (10) for producing a polarised incident beam (12) adapted to illuminate a sample (16) according to at least a selected angle; an analyzer (24) providing an output beam (28) in response to said reflected beam (20) and at least a reflecting optical element (14) arranged between the source (2) and the sample (16) and/or between the sample (16) and the sensor, and capable of focusing the incident beam (12) and/or the reflected beam (20) according to a selected spot The ellipsometer further comprises at least a first refracting optical element (22) arranged between the sample (16) and the sensor and/or between the source (2) and the sample (16) to collect and focus said reflected beam and/or said incident beam, thereby enabling to provide at least a refracting element (22) and a reflecting element (14) on either side of the sample (16) and hence to place the source and the sensor on the same side relative to said spot.

Abstract translation: 本发明涉及一种光谱椭偏仪，包括：能够发射宽带射线（4）的源极（2），用于偏振宽带光束（4）的偏振器（10），以及用于产生适于照射光束的偏振入射光束 至少一个选定角度的样品（16）; 分析器（24），用于接收由所述照明样品（16）反射的光束（20）并响应于所述反射光束（20）产生输出光束（28）; 以及至少一个布置在源（2）和样品（16）之间和/或样品和传感器之间并且能够聚焦入射光束（12）和/或反射光线（12）的反射光学元件（14） 20）根据选定的地点。 椭偏仪还包括布置在样品（16）和传感器之间和/或在源（2）和样品（16）之间的至少第一折射元件（22），以收集和聚焦所述反射光束和/或所述事件 从而能够在样品（16）的任一侧上提供至少一个折射元件（22）和反射元件（14），从而使源和传感器相对于所述光斑位于同一侧。

公开(公告)号：US07227645B2

公开(公告)日：2007-06-05

申请号：US10544638

申请日：2003-02-06

Applicant: Normand Cyr

Inventor： Normand Cyr

IPC: G01B9/02

CPC classification number: G01J4/04 ,  G01M11/331 ,  G01M11/336

Abstract: Apparatus for measuring polarization mode dispersion (PMD) of a device, e.g. a waveguide, comprises a broadband light source (10,12) for passing polarized broadband light through the device (14), an interferometer (20) for dividing and recombining light that has passed through the device to form interferograms, a polarization separator (30) for receiving the light from the interferometer and separating such received light along first and second orthogonal Feb. 25, 2003 Feb. 25, 2003 polarization states, detectors (32x,32y) for converting the first and second orthogonal polarization states, respectively, into corresponding first and second electrical signals (Px(τ),Py(τ)), and a processor (36) for computing the modulus of the difference and such, respectively, of the first and second electrical signals to produce a cross-correlation envelope (EC(τ)) and an auto-correlation envelope (Ec(τ)), and determining the polarization mode dispersion according to the expression PMD=where and τ is the delay difference between the paths of the interferometer.

Abstract translation: 用于测量装置的偏振模色散（PMD）的装置，例如， 波导，包括用于使偏振宽带光通过装置（14）的宽带光源（10,12），用于分割和重新组合通过该装置的光以形成干涉图的干涉仪（20）;偏振分离器（30） ），用于接收来自干涉仪的光并且在2003年2月25日的第一和第二正交方向上分离这样的接收光，2003年2月25日，偏振态，检测器（32×32， 分别将第一和第二正交极化状态转换成对应的第一和第二电信号（P SUB）（τ），P SUB（τ））， 以及用于分别计算第一和第二电信号的差的模数和处理器（36）以产生互相关包络（E SUB）（τ） 相关包络（τ）（τ）），以及根据表达式PMD =其中确定偏振模色散 并且τT是干涉仪的路径之间的延迟差。

公开(公告)号：US07221454B2

公开(公告)日：2007-05-22

申请号：US10504796

申请日：2003-02-13

Applicant: D. Scott Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Scott Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US07206070B2

公开(公告)日：2007-04-17

申请号：US11269204

申请日：2005-11-08

Applicant: Jon Opsal

Inventor： Jon Opsal

IPC: G01N11/06

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.

Abstract translation: 光学检查装置包括用于产生探测光束的光源。 探测光束被聚焦到样品上以产生入射角的扩展。 从样品反射后，将光成像到二维阵列的光电探测器上。 在到达检测器阵列之前，光束通过旋转补偿器。 处理器用于通过分析沿着一个或多个方位角并且处于不同补偿器位置的光电探测器的输出来评估样本。

公开(公告)号：US07196793B2

公开(公告)日：2007-03-27

申请号：US10488596

申请日：2002-09-06

Applicant: Nataliya Nabatova-Gabain ,  Yoko Wasai

Inventor： Nataliya Nabatova-Gabain ,  Yoko Wasai

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01B11/0641 ,  G01N21/211

Abstract: With extremely-thin-film and thin-film measurement, models are formed based upon a combination of film thickness, optical constants obtained using the dispersion formula, incident angle, etc., and the model and measured spectrums are fit by BLMC for a single layer of a structure with a certain number of iterations, obtaining information regarding the single layer. With thin-film multi-layer-structure measurement, models are formed for multiple layers of a thin-film multi-layer structure likewise, and fit by BLMC or EBLMC, obtaining information regarding the thin-film multi-layer structure. In either measurement, light is cast onto a thin film on a substrate to be measured while changing the wavelength as a parameter in order to obtain the spectrums ψE(λi) and ΔE(λi) for each wavelength λi, representing the change in polarization between the incident and reflected light. The measured spectrums are fit, obtaining the best model. The results are confirmed and stored, as necessary.

Abstract translation: 通过极薄膜和薄膜测量，基于膜厚度，使用分散公式获得的光学常数，入射角等组合形成型号，并且模型和测量的光谱由BLMC适合于单个 具有一定数量迭代的结构层，获得关于单层的信息。 利用薄膜多层结构测量，类似地形成了多层薄膜多层结构的模型，并且通过BLMC或EBLMC进行拟合，获得关于薄膜多层结构的信息。 在任一测量中，为了获得光谱，将光在要测量的基底上的薄膜上铸造，同时改变波长作为参数。 和对于每个波长λΛi的ΔE（λΠi），表示入射和反射光之间的偏振变化。 测量光谱拟合，获得最佳模型。 必要时确认和存储结果。

公开(公告)号：US07196792B2

公开(公告)日：2007-03-27

申请号：US10684361

申请日：2003-10-15

Applicant: Bernard Drevillon ,  Antonello De Martino

Inventor： Bernard Drevillon ,  Antonello De Martino

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: A liquid crystal based polarimetric system, a process for the calibration of this polarimetric system, and a polarimetric measurement process intended for measuring the representative parameters of a sample in which the polarimetric system contains an excitation section emitting a light beam that passes through a polarization state generator (PSG) and onto a sample. After reflection or transmission by the sample, the beam goes through an analysis section with a polarization state detector (PSD). The PSG and PSD each have a first and a second liquid crystal elements LCj (j=1,2) having, for each LCj element of the PSG (respectively for each LCj element of the PSD), an extraordinary axis making an angle θj (resp. θ′j) with respect to the polarization direction (i), and a retardation δj (resp (δ′j) between its ordinary and extraordinary axes, the liquid crystals LCj elements being positioned in reverse order in the PSD with respect to the LCj elements of the PSG.

Abstract translation: 基于液晶的偏振系统，用于校准该偏振系统的方法和用于测量样品的代表性参数的偏振测量过程，其中偏振系统包含发射通过偏振状态的光束的激发部分 发电机（PSG）和样品。 在通过样品反射或透射之后，光束通过具有偏振状态检测器（PSD）的分析部分。 PSG和PSD各自具有第一和第二液晶元件LC（j = 1,2），其对于PSG的每个LC SUB元素分别（分别用于 PSD的每个LC 元素），相对于极化的角度θθ（相对于θ'）的非常轴 方向（i）和在其普通轴和非常轴之间的延迟差Δ（分别为（δ'）），液晶LC＆lt; 元件在PSD中相对于PSG的LC <！ - SIPO - >元件以相反的顺序被定位。

公开(公告)号：US07193710B1

公开(公告)日：2007-03-20

申请号：US10829620

申请日：2004-04-22

Applicant: Blaine D. Johs ,  Martin M. Liphardt ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

Inventor： Blaine D. Johs ,  Martin M. Liphardt ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211 ,  G01N2021/213

Abstract: Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.

Abstract translation: 公开了一种分光椭偏仪系统，其包括偏振器和分析器元件，其在数据采集期间保持固定在适当的位置，以及至少一个连续旋转或逐步旋转的补偿器，其透过电磁束并且施加连续可变或多个顺序离散的极化状态 在电磁辐射束上; 以及至少一个透射电磁光束的多重元件透镜。

公开(公告)号：US07187442B2

公开(公告)日：2007-03-06

申请号：US10835747

申请日：2004-04-30

Applicant: Randal B. Chinnock ,  Jeffrey S. Melanson

Inventor： Randal B. Chinnock ,  Jeffrey S. Melanson

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/21

Abstract: A variably-polarizing optical probe assembly. The assembly includes an optical probe having one or more optical light delivery channels that emit incident light from the sample end of the probe toward a sample being investigated, and one or more optical light-receiving channels that receive incident light from the sample. A variably-polarizing substrate assembly is coupled to the sample end of the probe. The substrate assembly includes an optically transmitting substrate and one or more discrete polarizer areas on a face of the substrate, each such polarizer area defining a polarization orientation, with the polarizer areas together defining one or more different polarization orientations. The substrate assembly is arranged relative to the probe such that one polarizer area covers at least one light delivery channel and one polarizer area covers at least one light-receiving channel.

Abstract translation: 可变偏振光学探针组件。 组件包括具有一个或多个光学传输通道的光学探针，其将从探针的样品端朝向被研究的样品发射入射光，以及一个或多个接收来自样品的入射光的光接收通道。 可变偏振衬底组件耦合到探针的样品端。 衬底组件包括光学透射衬底和在衬底的表面上的一个或多个离散偏振器区域，每个这样的偏振器区域限定极化取向，偏振器区域一起限定一个或多个不同的偏振取向。 衬底组件相对于探针布置，使得一个偏振器区域覆盖至少一个光输送通道，并且一个偏振器区域覆盖至少一个光接收通道。

公开(公告)号：US07186968B2

公开(公告)日：2007-03-06

申请号：US11154330

申请日：2005-06-16

Applicant: Jeffrey Raynor

Inventor： Jeffrey Raynor

IPC: G01J1/44 ,  H01L27/00 ,  G02B5/30 ,  G02F1/01

CPC classification number: G02B5/3058 ,  G01J4/04 ,  H01L27/14625 ,  H01L27/14685 ,  H01L31/02327

Abstract: A polarization sensitive solid state image sensor includes an integrated photodetector and polarizing assembly. The polarizing assembly is formed directly on an upper dielectric surface of the photodetector as a metal grid. The integral form of the device improves polarization operation and reduces manufacturing costs.

Abstract translation: 偏振敏感固态图像传感器包括集成光电检测器和偏振组件。 偏振组件直接形成在作为金属栅格的光电检测器的上电介质表面上。 该器件的整体形式提高了极化操作并降低了制造成本。

公开(公告)号：US20070034803A1

公开(公告)日：2007-02-15

申请号：US11476335

申请日：2006-06-28

Applicant: James Plant

Inventor： James Plant

IPC: G01J5/02

CPC classification number: G01N21/21 ,  G01J4/04 ,  G02B27/283 ,  H04N5/2254

Abstract: A method and apparatus for real-time polarization difference imaging (PDI) video including an imaging lens focusing the light on to a collimating lens, whereby the stimulus beams becomes parallel before striking a polarizing beam-splitter. Segregated orthogonally polarized components of the stimulus are then focused on imaging sensors, and one sensor's output signal is subtracted from the other, thereby creating a real-time polarization difference video image. The efficiency of such a system is greatly enhanced by illuminating the target with a polarized light source (with a polarization orientation matching one of those used in the PDI process), and PDI-enhanced targets can be constructed with surface features and textures optimised to result in a maximum return signal strength and spatial contrast.

Abstract translation: 一种用于实时偏振差成像（PDI）视频的方法和装置，包括将光聚焦到准直透镜的成像透镜，由此激发光束在撞击偏振分束器之前变得平行。 刺激的分离的正交极化分量然后聚焦在成像传感器上，并且从另一个中减去一个传感器的输出信号，从而产生实时偏振差视频图像。 通过用偏振光源（具有与PDI过程中使用的偏振方向匹配的偏振方向）照射目标，这种系统的效率被大大增强，并且可以用优化的结果的表面特征和纹理来构造PDI增强的目标 在最大返回信号强度和空间对比度。