INFRARED-BASED METROLOGY FOR DETECTION OF STRESS AND DEFECTS AROUND THROUGH SILICON VIAS
    82.
    发明申请
    INFRARED-BASED METROLOGY FOR DETECTION OF STRESS AND DEFECTS AROUND THROUGH SILICON VIAS 有权
    基于红外的方法,用于通过硅酮检测应力和缺陷

    公开(公告)号:US20150226681A1

    公开(公告)日:2015-08-13

    申请号:US14691392

    申请日:2015-04-20

    Inventor: Ming Lei

    Abstract: An approach for IR-based metrology for detecting stress and/or defects in around TSVs of semiconductor devices is provided. Specifically, in a typical embodiment, a beam of IR light will be emitted from an IR light source through the material around the TSV. Once the beam of IR light has passed through the material around the TSV, the beam will be analyzed using one or more algorithms to determine information about TSV stress and/or defects such as imbedded cracking, etc. In one embodiment, the beam of IR light may be split into a first portion and a second portion. The first portion will be passed through the material around the TSV while the second portion is routed around the TSV. After the first portion has passed through the material around the TSV, the two portions may then be recombined, and the resulting beam may be analyzed as indicated above.

    Abstract translation: 提供了一种用于检测半导体器件周围TSV的应力和/或缺陷的基于红外测量的方法。 具体地,在典型的实施例中,IR光束将从IR光源通过TSV周围的材料发射。 一旦IR光束通过TSV周围的材料,则将使用一种或多种算法来分析光束,以确定关于TSV应力和/或诸如嵌入裂纹等缺陷的信息。在一个实施例中,IR光束 光可以分成第一部分和第二部分。 第一部分将通过TSV周围的材料,而第二部分绕TSV路线。 在第一部分已经穿过TSV周围的材料之后,可以将两个部分重组,并且可以如上所述分析所得到的光束。

    Infrared-based metrology for detection of stress and defects around through silicon vias
    83.
    发明授权
    Infrared-based metrology for detection of stress and defects around through silicon vias 有权
    基于红外的测量方法,用于检测硅通孔周围的应力和缺陷

    公开(公告)号:US09041919B2

    公开(公告)日:2015-05-26

    申请号:US13769494

    申请日:2013-02-18

    Inventor: Ming Lei

    Abstract: An approach for IR-based metrology for detecting stress and/or defects around TSVs of semiconductor devices is provided. Specifically, in a typical embodiment, a beam of IR light will be emitted from an IR light source through the material around the TSV. Once the beam of IR light has passed through the material around the TSV, the beam will be analyzed using one or more algorithms to determine information about TSV stress and/or defects such as imbedded cracking, etc. In one embodiment, the beam of IR light may be split into a first portion and a second portion. The first portion will be passed through the material around the TSV while the second portion is routed around the TSV. After the first portion has passed through the material around the TSV, the two portions may then be recombined, and the resulting beam may be analyzed as indicated above.

    Abstract translation: 提供了一种用于检测半导体器件TSV周围的应力和/或缺陷的基于红外测量的方法。 具体地,在典型的实施例中,IR光束将从IR光源通过TSV周围的材料发射。 一旦IR光束通过TSV周围的材料,则将使用一种或多种算法来分析光束,以确定关于TSV应力和/或诸如嵌入裂纹等缺陷的信息。在一个实施例中,IR光束 光可以分成第一部分和第二部分。 第一部分将通过TSV周围的材料,而第二部分绕TSV路线。 在第一部分已经穿过TSV周围的材料之后,可以将两个部分重组,并且可以如上所述分析所得到的光束。

    OPTICAL SPECTROMETER
    84.
    发明申请
    OPTICAL SPECTROMETER 有权
    光学光谱仪

    公开(公告)号:US20150090880A1

    公开(公告)日:2015-04-02

    申请号:US14395756

    申请日:2012-05-25

    Abstract: An optical spectrometer (102) comprises an adjustable sampling space (104) having two generally opposing, relatively movable, side-walls (106,108) which are here substantially formed of optically translucent material and between which in use a sample for analysis is charged and an actuator (116) mechanically coupled, here via a worm drive (118), to one or both of the opposing side-walls (108) and operable in response to a command signal applied thereto to effect their relative movement. The spectrometer (102) further comprises an optical position sensor (110,112,114) adapted to detect interference fringes generated by optical energy traversing the distance between the side-walls (106,108) a plurality of times and to generate the command signal in dependence thereof and preferably also adapted to generate an output indexing intensity against an indication of wavelength usable in the spectrometric analysis of a sample material within the sampling space (104).

    Abstract translation: 光学光谱仪(102)包括可调节取样空间(104),其具有两个大致相对的相对可移动的侧壁(106,108),这些基本上由光学半透明材料形成,并且在使用中,用于分析的样品被充电, 致动器(116)在这里通过蜗杆传动(118)机械联接到一个或两个相对的侧壁(108),并且响应于施加到其上的命令信号而可操作以实现其相对运动。 光谱仪(102)还包括光学位置传感器(110,112,114),其适于检测通过多次穿过侧壁(106,108)之间的距离的光能产生的干涉条纹,并且依次产生指令信号 适于产生针对在采样空间(104)内的样品材料的光谱分析中可用的波长的指示的输出分度强度。

    OPTICAL ABSORPTION SPECTROSCOPY
    85.
    发明申请
    OPTICAL ABSORPTION SPECTROSCOPY 有权
    光学吸收光谱

    公开(公告)号:US20130188170A1

    公开(公告)日:2013-07-25

    申请号:US13700633

    申请日:2011-06-02

    Applicant: Steven Wilkins

    Inventor: Steven Wilkins

    Abstract: An optical absorption spectroscopy apparatus comprises a multi-pass optical cell (1) having a first reflector (2) and a second reflector (4, 4′), a first light source (6) for light of a first waveband and a second light source (6′) for light of a second waveband. The cell (1) is constructed and arranged such that light entering the cell is reflected one or more times between the first and second reflectors (2, 4, 4′) before exiting the cell. Light of the first waveband enters and exits the cell (1) in a first plane and light of the second waveband enters and exits the cell in a second plane that is different from the first plane.

    Abstract translation: 光吸收光谱装置包括具有第一反射器(2)和第二反射器(4,4')的多通光学单元(1),用于第一波段的光的第一光源(6)和第二光 源(6')用于第二波段的光。 电池(1)的构造和布置使得在离开电池之前,进入电池的光在第一和第二反射器(2,4,4')之间反射一次或多次。 第一波段的光在第一平面中进入和离开小区(1),并且第二波段的光在与第一平面不同的第二平面中进入和离开小区。

    INSTRUMENT AND METHOD FOR DETECTING ANALYTES
    86.
    发明申请
    INSTRUMENT AND METHOD FOR DETECTING ANALYTES 有权
    检测分析仪的仪器和方法

    公开(公告)号:US20120295268A1

    公开(公告)日:2012-11-22

    申请号:US13473010

    申请日:2012-05-16

    Applicant: Alan Furlan

    Inventor: Alan Furlan

    Abstract: The present disclosure provides instruments and methods for detecting an analyte which are capable of exciting a plurality of luminescence labels and detecting light emitted therefrom. The instrument includes a filter carrier adapted for carrying a plurality of filter portion pairs, each pair related to a luminescence label and comprising a first filter portion for transmitting excitation light, and a second filter portion for transmitting emitted light. The first filter portion of a pair comprises a second filter portion of another pair. Also, the filter portions are arranged such that a pair can be brought into an operative condition whereby a first filter portion is in the excitation beam path and a second filter portion is in the emission beam path. The filter carrier and beam paths may be moved with respect to each other by a moving mechanism so as to bring a pair into operative condition.

    Abstract translation: 本公开提供了用于检测能够激发多个发光标签并检测从其发射的光的分析物的仪器和方法。 仪器包括适于承载多个过滤器部分对的过滤器载体,每一对与发光标签相关,并且包括用于传递激发光的第一过滤器部分和用于传输发射光的第二过滤器部分。 一对的第一过滤器部分包括另一对的第二过滤器部分。 此外,滤光器部分被布置成使得一对可以进入操作状态,由此第一滤光器部分处于激发光束路径中,并且第二滤光器部分处于发射光束路径中。 过滤器载体和梁路径可以通过移动机构相对于彼此移动,以使一对成为操作状态。

    Multi-channel optical cell
    87.
    发明授权
    Multi-channel optical cell 有权
    多通道光电池

    公开(公告)号:US08299433B2

    公开(公告)日:2012-10-30

    申请号:US12731909

    申请日:2010-03-25

    CPC classification number: G01N21/3504 G01N21/031 G01N21/3581 G01N2201/0668

    Abstract: An apparatus is provided that includes a field reflector and a plurality of pairs of object reflectors. The apparatus also includes a plurality of source and detector port pairs, where each source port is configured to pass a beam of radiation, and each detector port is configured to receive a beam of radiation. The source and detector ports of each pair are positioned proximate an outer edge of the field reflector such that an optical axis of the field reflector lies between the respective source port and detector port. The object reflectors and source and detector port pairs are arranged such that each source and detector port pair is associated with a respective pair of object reflectors forming a distinct channel, where the source and detector port pair, and centers of the associated pair of object reflectors, of each channel lie in a distinct plane.

    Abstract translation: 提供了一种包括场反射器和多对物体反射器的装置。 该装置还包括多个源和检测器端口对,其中每个源端口被配置为通过辐射束,并且每个检测器端口被配置为接收辐射束。 每对的源极和检测器端口位于场反射器的外边缘附近,使得场反射器的光轴位于相应的源极端口和检测器端口之间。 对象反射器和源和检测器端口对被布置成使得每个源极和检测器端口对与形成不同通道的相应对物体反射器相关联,其中源极和检测器端口对以及相关联的物体反射体对的中心 ,每个通道位于一个不同的平面。

    Method And Device For Measuring The Concentration Of Substances In Gaseous Or Fluid Media Through Optical Spectroscopy Using Broadband Light Sources
    88.
    发明申请
    Method And Device For Measuring The Concentration Of Substances In Gaseous Or Fluid Media Through Optical Spectroscopy Using Broadband Light Sources 审中-公开
    用于通过使用宽带光源的光谱测量气态或流体介质中物质浓度的方法和装置

    公开(公告)号:US20120006098A1

    公开(公告)日:2012-01-12

    申请号:US13141380

    申请日:2009-12-10

    Abstract: The invention relates to a method and to a device for using partially non-stabilized broadband light sources to accurately measure partially broadband-absorbing substances using referencing measuring cells. In order to create a low-cost, high-resolution, and at the same time fast spectrographic device for measuring concentrations of substances in fluid or gaseous media that is also suitable for harsh environments, the light radiated by the broadband light sources (1) through light guiding optical systems is fed through the measuring section of the self-referencing measuring cell (20, 30, 40) or only partially through a measuring cell (10) to a measurement detector (photoreceptor 11) and partially through a reference path (optical waveguide 8) to a reference detector (photoreceptor 15), and a mode coupler (5, 9, 14) is associated with each optical waveguide (2, 4, 7, 8) in order to homogenize the radiation characteristic of the broadband light sources (1), which varies over time and space.

    Abstract translation: 本发明涉及一种使用部分非稳定的宽带光源使用参考测量单元精确测量部分宽带吸收物质的方法和装置。 为了创建低成本,高分辨率,同时快速的光谱设备,用于测量也适用于恶劣环境的流体或气体介质中的物质浓度,宽带光源辐射的光(1) 通过光引导光学系统通过自参考测量单元(20,30,40)的测量部分或仅部分地通过测量单元(10)馈送到测量检测器(感光体11),并且部分地通过参考路径 光波导8)到参考检测器(感光体15),并且模式耦合器(5,9,14)与每个光波导(2,4,7,8)相关联,以便使宽带光的辐射特性均匀化 来源(1),随时间和空间而变化。

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