公开(公告)号：US20130021609A1

公开(公告)日：2013-01-24

申请号：US13188313

申请日：2011-07-21

Applicant: Yu-Lung LO ,  Shiou-An TSAI

Inventor： Yu-Lung LO ,  Shiou-An TSAI

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01B11/0641 ,  G01N21/211 ,  G01N21/8422

Abstract: An ellipsometer for determining thickness and ellipsometric parameters (Ψ and Δ) of a thin film material. The apparatus includes a light source emitting light, a transmitting optical system that has a polarizer, modulator and an optical compensator for conveying polarized modulated light for incidence on a film, and a receiving optical system that has an analyzer and conveys the reflected light to a photodetector device. The apparatus is used for full range measurement of ellipsometric parameters by applying two-phase detection method. It also determines thickness of thin films with a high degree of accuracy.

Abstract translation: 用于确定薄膜材料的厚度和椭偏参数（Ψ和＆Dgr）的椭圆计。 该装置包括发射光的光源，具有偏振器，调制器和光学补偿器的透射光学系统，用于输送用于入射在胶片上的偏振调制光;以及接收光学系统，其具有分析器并将反射光传送到 光电检测器。 该装置通过应用两相检测方法用于椭圆测量参数的全范围测量。 它还以高精确度确定薄膜的厚度。

公开(公告)号：US20120206723A1

公开(公告)日：2012-08-16

申请号：US13353496

申请日：2012-01-19

Applicant: Matthias Fertig ,  Thomas Morf ,  Nikolaj Moll ,  Martin Kreissig ,  Karl-Heinz Brenner ,  Maximilian Auer

Inventor： Matthias Fertig ,  Thomas Morf ,  Nikolaj Moll ,  Martin Kreissig ,  Karl-Heinz Brenner ,  Maximilian Auer

IPC: G01J4/04 ,  B01J19/12 ,  H01L31/0232

CPC classification number: G01J3/1804 ,  G01J4/04 ,  G02B5/1809 ,  H01L31/103

Abstract: A photodiode device including a photosensitive diffusion junction within a single layer. The photodiode device further includes a resonant grating located within the single layer. The photosensitive diffusion junction is located within the resonant grating.

Abstract translation: 包括在单层内的光敏扩散结的光电二极管装置。 光电二极管装置还包括位于单层内的谐振光栅。 光敏扩散结位于谐振光栅内。

公开(公告)号：US20110235038A1

公开(公告)日：2011-09-29

申请号：US13067101

申请日：2011-05-09

Applicant: Kazuhiko Fukazawa ,  Yuji Kudo

Inventor： Kazuhiko Fukazawa ,  Yuji Kudo

IPC: G01J4/04

CPC classification number: G01J4/00 ,  G01N21/21 ,  G01N21/95607

Abstract: In an evaluation device (1), an analyzer (42) is rotated so that the azimuth of the transmission axis of the analyzer (42) has an inclination angle of 90 degrees±3 degrees with respect to the transmission axis of a polarizer (32), an imaging camera (44) captures a regularly reflected image of a wafer (10) under each condition, and an image processing unit (50) evaluates the shape of a repeating pattern and detects dose defects and focus defects on the basis of the two images of the wafer (10) captured by the imaging camera (44).

Abstract translation: 在评价装置（1）中，分析器（42）旋转，使得分析器（42）的透射轴的方位角相对于偏振器（32）的透射轴具有90度±3度的倾斜角 ），成像摄像机（44）在每个条件下捕获晶片（10）的规则反射图像，并且图像处理单元（50）评估重复图案的形状，并且基于以下方式检测剂量缺陷和聚焦缺陷 由成像照相机（44）捕获的晶片（10）的两个图像。

公开(公告)号：US20110176132A1

公开(公告)日：2011-07-21

申请号：US13120211

申请日：2009-09-23

Applicant: Doron Goldberg ,  Zeev Weissman ,  Yaniv Yacov

Inventor： Doron Goldberg ,  Zeev Weissman ,  Yaniv Yacov

IPC: G01J4/04

CPC classification number: G01J4/04

Abstract: A polarimeter based on coherent detection and a method for measuring the optical rotation of a polarized light beam by an optically active substance, while enabling the subtraction of background signals, are provided.

Abstract translation: 提供了一种基于相干检测的偏振计和用于通过光学活性物质测量偏振光束的旋转旋转的方法，同时能够减去背景信号。

公开(公告)号：US20100182582A1

公开(公告)日：2010-07-22

申请号：US11922018

申请日：2006-06-13

Applicant: Marcus Adrianus Van De Kerkhof ,  Wilhelmus Petrus De Boeij ,  Hendrikus Robertus Marie Van Greevenbroek ,  Michel Fransois Hubert Klaassen ,  Haico Victor Kok ,  Martijn Gerard Dominique Wehrens ,  Tammo Uitterdijk ,  Wilhelmus Jacobus Maria Rooijakkers ,  Johannes Maria Kuiper ,  Leon Van Dooren ,  Jacob Sonneveld ,  Erwin Johannes Martinus Giling

Inventor： Marcus Adrianus Van De Kerkhof ,  Wilhelmus Petrus De Boeij ,  Hendrikus Robertus Marie Van Greevenbroek ,  Michel Fransois Hubert Klaassen ,  Haico Victor Kok ,  Martijn Gerard Dominique Wehrens ,  Tammo Uitterdijk ,  Wilhelmus Jacobus Maria Rooijakkers ,  Johannes Maria Kuiper ,  Leon Van Dooren ,  Jacob Sonneveld ,  Erwin Johannes Martinus Giling

IPC: G03B27/72 ,  G01J4/04

CPC classification number: G01M11/0264 ,  G03F7/70566 ,  G03F7/706 ,  G03F7/7085

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a polarization sensor configured at least in part to couple to a reticle stage, wherein components of the reticle polarization sensor can be loaded and unloaded in the lithographic apparatus in the manner used for conventional reticles. In one configuration an active reticle tool includes a rotatable retarder configured to vary the retardation applied to polarized light received from a field point in the illumination system. In another configuration, a passive reticle tool is configured as an array of polarization sensor modules, where the amount of retardation applied to received light by fixed retarders varies according to position of the polarization sensor module. Accordingly, a plurality of retardation conditions for light received at a given field point can be measured, wherein a complete determination of a polarization state of the light at the given field point can be determined. In another configuration, the polarization sensor is configured to measure the effect of a projection lens on a polarization state of light passing through the projection lens.

Abstract translation: 光刻设备包括被配置为调节辐射束的照明系统; 至少部分地配置为耦合到掩模版平台的偏振传感器，其中所述光罩极化传感器的部件可以以用于常规掩模版的方式在光刻设备中加载和卸载。 在一种配置中，有源掩模版工具包括可旋转延迟器，其被配置为改变施加到照明系统中的场点所接收的偏振光的延迟。 在另一种配置中，被动掩模版工具被配置为偏振传感器模块的阵列，其中由固定延迟器施加到接收光的延迟量根据偏振传感器模块的位置而变化。 因此，可以测量在给定场点处接收的光的多个延迟条件，其中可以确定在给定场点处的光的偏振状态的完全确定。 在另一种配置中，偏振传感器被配置为测量投影透镜对通过投影透镜的光的偏振状态的影响。

公开(公告)号：US20100039646A1

公开(公告)日：2010-02-18

申请号：US12445991

申请日：2007-10-16

Applicant: Jerome Bourderionnet ,  Daniel Dolfi ,  Sebastien Breugnot

Inventor： Jerome Bourderionnet ,  Daniel Dolfi ,  Sebastien Breugnot

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G02F1/0551 ,  G02F2203/12 ,  G02F2203/50

Abstract: The subject of the invention is a polarimetric imaging system exhibiting an optical axis, and comprising means (35) for the detection and analysis of the light backscattered by an object illuminated by a light source and at least one programmable waveplate (33), wherein the programmable waveplate comprises a material with an isotropic electrooptic tensor and a set of at least three electrodes disposed along the directions parallel to the optical axis of the imaging system.

Abstract translation: 本发明的主题是呈现光轴的偏光成像系统，并且包括用于检测和分析由光源照射的物体和至少一个可编程波片（33）反向散射的光的装置（35），其中， 可编程波片包括具有各向同性电光张量的材料和沿着平行于成像系统的光轴的方向设置的一组至少三个电极。

公开(公告)号：US20090237660A1

公开(公告)日：2009-09-24

申请号：US12051945

申请日：2008-03-20

Applicant: Paul Albrecht ,  Raymond C. Kurzweil ,  Lucy Gibson ,  Rafael Maya Zetune ,  Lev Lvovsky

Inventor： Paul Albrecht ,  Raymond C. Kurzweil ,  Lucy Gibson ,  Rafael Maya Zetune ,  Lev Lvovsky

IPC: G01J4/04

CPC classification number: G06K9/2036 ,  G02B5/3025 ,  G02B5/3033 ,  G03B11/00 ,  G03B15/03 ,  G03B17/12 ,  G03B17/56 ,  G06K9/209

Abstract: A reading machine includes an image input device including a lens and a polarizer disposed over the lens, a flash and a second polarizer disposed over the flash. The image input device also includes a computing device coupled to the image input device for capturing images, the computing device, including a processor to execute instructions and a computer program product residing on a computer readable medium, the computer program product comprising instructions for causing the processor to process the captured images to recognize features in the captured images.

Abstract translation: 一种读取机包括：图像输入装置，包括透镜和设置在透镜上方的偏振器，闪光灯和设置在闪光灯上方的第二偏振器。 图像输入装置还包括耦合到图像输入装置以用于捕获图像的计算装置，所述计算装置包括执行指令的处理器和驻留在计算机可读介质上的计算机程序产品，该计算机程序产品包括用于使 处理器来处理捕获的图像以识别捕获的图像中的特征。

公开(公告)号：US07227649B2

公开(公告)日：2007-06-05

申请号：US11274248

申请日：2005-11-16

Applicant: Kazuhiro Miyakawa ,  Yoichiro Iwa

Inventor： Kazuhiro Miyakawa ,  Yoichiro Iwa

IPC: G01B11/28 ,  G01J4/04

CPC classification number: G01B11/0641

Abstract: A surface inspection apparatus (100) comprises a light (10) source for emitting a light beam L0, an optical illumination system (30) for projecting the light beam on an inspected surface (220) formed by a film 210, an optical detection system (50) having lenses to spatially split reflection lights and an aperture stop (60) having apertures disposed with polarization elements (61–64) for transilluminating mutually different polarized light components, a light intensity detection device (41–44) for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (20), and an arithmetic processing device (70) for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.

Abstract translation: 表面检查装置（100）包括用于发射光束L 0的光（10）源，用于将光束投射在由膜210形成的检查表面（220）上的光学照明系统（30），光学检测 具有用于空间分离反射光的透镜的系统（50）和具有设置有用于透射相互不同的偏振光分量的偏振元件（61-64）的孔的孔径光阑（60），用于单独检测的光强度检测装置 通过各个偏振元件的各反射光的光强度，扫描装置（20）和运算处理装置（70），用于检测各反射光的偏振状态，并获得薄膜的膜厚， 电影的物理属性中最少的一个。

公开(公告)号：US20050264813A1

公开(公告)日：2005-12-01

申请号：US11129769

申请日：2005-05-13

Applicant: George Giakos

Inventor： George Giakos

IPC: G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01J3/447 ,  B82Y10/00 ,  B82Y20/00 ,  G01J4/04 ,  G01N21/21

Abstract: The present invention relates to a multi-energy system that generates and/or forms images of targets/structures by applying Mueller matrix imaging principles and/or Stokes polarimetric parameter imaging principles to data obtained by the multi-energy system. In one embodiment, the present invention utilizes at least one energy or light source to generate two or more Mueller matrix and/or Stokes polarization parameters images of a target/structure, and evaluates the Mueller matrix/Stokes polarization parameters multi-spectral difference(s) between the two or more images of the target/structure. As a result, high contrast, high specificity images can be obtained. Additional information can be obtained by and/or from the present invention through the application of image, Mueller matrix decomposition, and/or image reconstruction techniques that operate directly on the Mueller matrix and/or Stokes polarization parameters.

Abstract translation: 本发明涉及通过将Mueller矩阵成像原理和/或斯托克斯偏振参数成像原理应用于由多能系统获得的数据来生成和/或形成目标/结构图像的多能量系统。 在一个实施例中，本发明利用至少一个能量或光源来产生目标/结构的两个或多个Mueller矩阵和/或斯托克斯极化参数图像，并且评估Mueller矩阵/斯托克斯极化参数多光谱差（s ）在目标/结构的两个或多个图像之间。 结果，可以获得高对比度，高特异性图像。 通过应用直接在Mueller矩阵和/或斯托克斯极化参数上操作的图像，Mueller矩阵分解和/或图像重建技术，可以获得附加信息和/或从本发明获得附加信息。

公开(公告)号：US20050243314A1

公开(公告)日：2005-11-03

申请号：US10835747

申请日：2004-04-30

Applicant: Randal Chinnock

Inventor： Randal Chinnock

IPC: G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04 ,  G01N21/21

Abstract: A variably-polarizing optical probe assembly. The assembly includes an optical probe having one or more optical light delivery channels that emit incident light from the sample end of the probe toward a sample being investigated, and one or more optical light-receiving channels that receive incident light from the sample. A variably-polarizing substrate assembly is coupled to the sample end of the probe. The substrate assembly includes an optically transmitting substrate and one or more discrete polarizer areas on a face of the substrate, each such polarizer area defining a polarization orientation, with the polarizer areas together defining one or more different polarization orientations. The substrate assembly is arranged relative to the probe such that one polarizer area covers at least one light delivery channel and one polarizer area covers at least one light-receiving channel.

Abstract translation: 可变偏振光学探针组件。 组件包括具有一个或多个光学传输通道的光学探针，其将从探针的样品端的入射光朝向被研究的样品发射，以及一个或多个光接收通道，其接收来自样品的入射光。 可变偏振衬底组件耦合到探针的样品端。 衬底组件包括光学透射衬底和在衬底的表面上的一个或多个离散偏振器区域，每个这样的偏振器区域限定极化取向，偏振器区域一起限定一个或多个不同的偏振取向。 衬底组件相对于探针布置，使得一个偏振器区域覆盖至少一个光输送通道，并且一个偏振器区域覆盖至少一个光接收通道。