公开(公告)号：US20120021550A1

公开(公告)日：2012-01-26

申请号：US13176371

申请日：2011-07-05

Applicant: CHRISTEL DIEPPEDALE ,  STEPHAN BOREL ,  BRUNO REIG ,  HENRI SIBUET

Inventor： CHRISTEL DIEPPEDALE ,  STEPHAN BOREL ,  BRUNO REIG ,  HENRI SIBUET

IPC: H01L21/02

CPC classification number: B81C1/00158 ,  B81B2201/018 ,  B81B2201/0264 ,  B81B2203/0118 ,  B81B2203/0361 ,  B81C1/00492 ,  B81C2201/0178 ,  H01H1/0036

Abstract: The fabrication of a semiconductor fixed structure defining a volume, for example of a MEMS micro electro-mechanical system includes, determining thicknesses beforehand depending on the functional distances associated with elements. At least one element is formed on a substrate by thermal oxidation of the substrate so as to form an oxide layer followed by selective etching of the oxide layer so as to define the volume in an etched portion by baring the underlying substrate so as to define the element in an unetched portion, and later oxidation of the substrate so as to form an oxide layer, in order to obtain the elements at the functional distances.

Abstract translation: 限定体积的半导体固定结构（例如MEMS微机电系统）的制造包括：根据与元件相关联的功能距离预先确定厚度。 通过衬底的热氧化在衬底上形成至少一个元件，以便形成氧化物层，然后选择性地蚀刻氧化物层，以便通过掩埋下面的衬底限定蚀刻部分中的体积，从而限定 元素在未蚀刻部分中，并且随后氧化基底以形成氧化物层，以便在功能距离处获得元件。

公开(公告)号：US07834727B2

公开(公告)日：2010-11-16

申请号：US10562748

申请日：2004-07-15

Applicant: Jerome Delamare ,  Orphee Cugat ,  Christel Dieppedale ,  Jerome Meunier-Carus

Inventor： Jerome Delamare ,  Orphee Cugat ,  Christel Dieppedale ,  Jerome Meunier-Carus

IPC: H01F7/08

CPC classification number: H01F7/08

Abstract: This is a magnetic actuator including a mobile magnetic portion (20), a fixed magnetic portion (10) provided with at least two attraction areas (11, 12) for the mobile magnetic portion (20), and means (30) for triggering the displacement of the mobile magnetic portion (20), the mobile magnetic portion (20) being in levitation when it is not in contact with an attraction area (11, 12). The mobile magnetic portion (20) includes a magnet-based part (200) with reduced magnet weight, this part (200) having an overall volume, and a mass which is less than the one it would have if its overall volume was totally occupied by the magnet.

Abstract translation: 这是一种磁性致动器，其包括可移动磁性部分（20），设置有用于可移动磁性部分（20）的至少两个吸引区域（11,12）的固定磁性部分（10），以及用于触发 当移动磁性部分（20）不与吸引区域（11,12）接触时，移动磁性部分（20）处于悬浮状态。 移动磁性部分（20）包括具有减小的磁体重量的磁体部分（200），该部分（200）具有总体积，并且其质量小于其总体积完全占据时的质量 由磁铁。

公开(公告)号：US07834723B2

公开(公告)日：2010-11-16

申请号：US12010628

申请日：2008-01-28

Applicant: Henry Sibuet ,  Christel Dieppedale

Inventor： Henry Sibuet ,  Christel Dieppedale

IPC: H01H51/22

CPC classification number: B81B3/0051 ,  H01H1/0036 ,  H01H36/0013 ,  H01H50/005 ,  H01H59/0009 ,  Y10T29/49105

Abstract: The actuation microsystem is produced on a flat substrate and comprises a pivoting arm mounted in rotation around a hinge, a stationary contact pad arranged on the substrate, and an end of opening travel stop of the pivoting arm. The end of travel stop comprises a top part, for example a head, arranged above and at a distance from the pivoting arm between an articulation end and a free end of the pivoting arm. The stop comprises a bottom part arranged laterally with respect to the pivoting arm, between the hinge and the stationary contact pad, and formed for example by a foot comprising a support pad formed on the substrate, a pedestal extending the support pad and a support portion of the head.

Abstract translation: 致动微系统在平坦基板上产生并且包括围绕铰链旋转安装的枢转臂，布置在基板上的固定接触垫以及枢转臂的打开行程停止端。 行程停止的结束包括在枢转端和枢转臂的自由端之间布置在枢转臂的上方且距离枢转臂的顶部，例如头部。 该止动件包括相对于枢转臂横向设置在铰链和固定接触垫之间的底部，并且例如由例如由基底上形成的支撑垫构成的脚形成，延伸支撑垫的支座和支撑部 的头。

公开(公告)号：US08685777B2

公开(公告)日：2014-04-01

申请号：US13176371

申请日：2011-07-05

Applicant: Christel Dieppedale ,  Stephan Borel ,  Bruno Reig ,  Henri Sibuet

Inventor： Christel Dieppedale ,  Stephan Borel ,  Bruno Reig ,  Henri Sibuet

IPC: H01L21/02 ,  B81C1/00 ,  H01H1/00

CPC classification number: B81C1/00158 ,  B81B2201/018 ,  B81B2201/0264 ,  B81B2203/0118 ,  B81B2203/0361 ,  B81C1/00492 ,  B81C2201/0178 ,  H01H1/0036

Abstract: The fabrication of a semiconductor fixed structure defining a volume, for example of a MEMS micro electro-mechanical system includes, determining thicknesses beforehand depending on the functional distances associated with elements. At least one element is formed on a substrate by thermal oxidation of the substrate so as to form an oxide layer followed by selective etching of the oxide layer so as to define the volume in an etched portion by baring the underlying substrate so as to define the element in an unetched portion, and later oxidation of the substrate so as to form an oxide layer, in order to obtain the elements at the functional distances.

Abstract translation: 限定体积的半导体固定结构（例如MEMS微机电系统）的制造包括：根据与元件相关联的功能距离预先确定厚度。 通过衬底的热氧化在衬底上形成至少一个元件，以便形成氧化物层，然后选择性地蚀刻氧化物层，以便通过掩埋下面的衬底限定蚀刻部分中的体积，从而限定 元素在未蚀刻部分中，并且随后氧化基底以形成氧化物层，以便在功能距离处获得元件。

公开(公告)号：US20080186117A1

公开(公告)日：2008-08-07

申请号：US12010628

申请日：2008-01-28

Applicant: Henry Sibuet ,  Christel Dieppedale

Inventor： Henry Sibuet ,  Christel Dieppedale

IPC: H01H51/22 ,  H01H11/00

CPC classification number: B81B3/0051 ,  H01H1/0036 ,  H01H36/0013 ,  H01H50/005 ,  H01H59/0009 ,  Y10T29/49105

Abstract: The actuation microsystem is produced on a flat substrate and comprises a pivoting arm mounted in rotation around a hinge, a stationary contact pad arranged on the substrate, and an end of opening travel stop of the pivoting arm. The end of travel stop comprises a top part, for example a head, arranged above and at a distance from the pivoting arm between an articulation end and a free end of the pivoting arm. The stop comprises a bottom part arranged laterally with respect to the pivoting arm, between the hinge and the stationary contact pad, and formed for example by a foot comprising a support pad formed on the substrate, a pedestal extending the support pad and a support portion of the head.

Abstract translation: 致动微系统在平坦基板上产生并且包括围绕铰链旋转安装的枢转臂，布置在基板上的固定接触垫以及枢转臂的打开行程停止端。 行程停止的结束包括在枢转端和枢转臂的自由端之间布置在枢转臂的上方且距离枢转臂的顶部，例如头部。 该止动件包括相对于枢转臂横向设置在铰链和固定接触垫之间的底部，并且例如由例如由基底上形成的支撑垫构成的脚形成，延伸支撑垫的支座和支撑部 的头。

公开(公告)号：US07361256B2

公开(公告)日：2008-04-22

申请号：US10519847

申请日：2003-07-17

Applicant: David Henry ,  Christel Dieppedale ,  Thierry Terrier ,  Gerard Barrois

Inventor： David Henry ,  Christel Dieppedale ,  Thierry Terrier ,  Gerard Barrois

IPC: C25B13/00 ,  C25B15/00 ,  C25C3/08

CPC classification number: C25D5/08 ,  C25D17/001 ,  C25D17/005 ,  C25D17/02 ,  C25D17/18

Abstract: An electrolytic reactor including a conical recess of removable slices through which the electrolyte circulates towards a part to be coated under the action of a pump setting up forced circulation. The part is polarized to act as a cathode, facing a coaxial anode in the recess. This configuration leads to good electrolyte flow in front of the part, allowing accelerated deposit with a uniform thickness of the coating material, and dimensions of the chamber may be added.

Abstract translation: 一种电解反应器，其包括可拆卸切片的锥形凹槽，在泵的作用下，电解质通过该锥形凹槽朝向待涂覆的部分循环，从而建立强制循环。 该部分被极化以用作阴极，面对凹陷中的同轴阳极。 这种构造导致在部件前面具有良好的电解质流动，允许以均匀的涂层材料的厚度加速沉积，并且可以添加室的尺寸。

公开(公告)号：US20060145796A1

公开(公告)日：2006-07-06

申请号：US10562748

申请日：2004-07-15

Applicant: Jerome Delamare ,  Orphee Cugat ,  Christel Dieppedale ,  Jerome Meunier-Carus

Inventor： Jerome Delamare ,  Orphee Cugat ,  Christel Dieppedale ,  Jerome Meunier-Carus

IPC: H01F7/08

CPC classification number: H01F7/08

Abstract: This is a magnetic actuator including a mobile magnetic portion (20), a fixed magnetic portion (10) provided with at least two attraction areas (11, 12) for the mobile magnetic portion (20), and means (30) for triggering the displacement of the mobile magnetic portion (20), the mobile magnetic portion (20) being in levitation when it is not in contact with an attraction area (11, 12). The mobile magnetic portion (20) includes a magnet-based part (200) with reduced magnet weight, this part (200) having an overall volume, and a mass which is less than the one it would have if its overall volume was totally occupied by the magnet.

Abstract translation: 这是一种磁性致动器，其包括可移动磁性部分（20），设置有用于可移动磁性部分（20）的至少两个吸引区域（11,12）的固定磁性部分（10），以及用于触发 当移动磁性部分（20）不与吸引区域（11,12）接触时，移动磁性部分（20）处于悬浮状态。 移动磁性部分（20）包括具有减小的磁体重量的磁体部分（200），该部分（200）具有总体积，并且其质量小于其总体积完全占据时的质量 由磁铁。