公开(公告)号：US20050105088A1

公开(公告)日：2005-05-19

申请号：US10507280

申请日：2003-03-11

Applicant: Enrique Garcia-Caurel ,  Jean-Luc Moncel ,  Bernard Drevillon ,  Francis Bos

Inventor： Enrique Garcia-Caurel ,  Jean-Luc Moncel ,  Bernard Drevillon ,  Francis Bos

IPC: G01J3/447 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01N21/211

Abstract: The invention concerns a polarimetric system and a method of polarimetric measurement of the Mueller matrix coefficients of a sample (7). The polarimetric system contains an excitation section (1) emitting a light beam (2). Said light beam passes through a polarisation state generator (PSG) (5) and is focused on the sample (7) on a sample holder (3). After reflection on the sample surface (8), the beam goes through an analysis section (4) containing a polarisation state detector (PSD) or polarimeter (9) and detection means (10). According to the invention, the light beam (2) emitted by the excitation section (1) is in the spectral range from the far ultraviolet to the visible. The light beam propagates through the excitation section (1) up to through the analysis section (4) under a low partial pressure of far ultraviolet absorbing gases. The polarimetric system comprises one or more air tight chamber (17), said chambers containing said excitation section, said analysis section, and said sample holder.

Abstract translation: 本发明涉及一种偏振测量系统和一种样品（7）的Mueller矩阵系数的极化测量方法。 偏振系统包含发射光束（2）的激发部分（1）。 所述光束通过偏振状态发生器（PSG）（5）并聚焦在样品架（3）上的样品（7）上。 在样品表面（8）上反射后，光束通过包含偏振状态检测器（PSD）或偏振计（9）和检测装置（10）的分析部分（4）。 根据本发明，由激励部（1）发射的光束（2）处于从远紫外线到可见光的光谱范围。 光束在远紫外吸收气体的低分压下传播通过激发部分（1）直到分析部分（4）。 偏振系统包括一个或多个气密室（17），所述腔室包含所述激发部分，所述分析部分和所述样品保持器。