公开(公告)号：US20130068966A1

公开(公告)日：2013-03-21

申请号：US13699981

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: G01N23/22

CPC classification number: G01N23/2254 ,  G01N2201/08 ,  H01J37/228 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2602 ,  H01J2237/2802 ,  H01J2237/2808

Abstract: Cathodoluminescence detection system comprising a collecting optic (112), for collecting light radiation coming from a specimen illuminated by a beam of charged particles and reflecting said light radiation onto analysis means, characterized in that it comprises means (606,614-618) for positioning said collecting optic (112) along at least one dimension.

Abstract translation: 阴极发光检测系统，包括收集光学器件（112），用于收集来自由带电粒子束照射的样本的光辐射并将所述光辐射反射到分析装置上，其特征在于，其包括用于定位所述收集物的装置（606,614-618） 沿着至少一个维度的光学元件（112）。

公开(公告)号：US08912509B2

公开(公告)日：2014-12-16

申请号：US13699981

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: G01N21/64 ,  G01N23/225 ,  H01J37/244 ,  H01J37/22 ,  H01J37/28

CPC classification number: G01N23/2254 ,  G01N2201/08 ,  H01J37/228 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2602 ,  H01J2237/2802 ,  H01J2237/2808

Abstract: A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.

Abstract translation: 提供了阴极发光检测系统，其包括收集来自由带电粒子束照射的样品的光辐射并将光辐射发送到分析器的收集光学器件，用于收集光学器件的定位器; 定位器包括收集光学元件的几个翻译部件。 每个翻译组件在一个维度的空间中影响收集光学器件的平移，使得翻译组件在几个维度的空间中影响收集光学器件的平移。

公开(公告)号：US10157726B2

公开(公告)日：2018-12-18

申请号：US13699975

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: H01J37/244 ,  H01J37/02 ,  H01J37/22 ,  H01J37/256 ,  H01J37/26

Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

公开(公告)号：US20130087706A1

公开(公告)日：2013-04-11

申请号：US13699975

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/228 ,  H01J37/256 ,  H01J37/26 ,  H01J2237/024 ,  H01J2237/2482

Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Abstract translation: 本发明涉及一种阴极发光检测系统，包括：收集光学元件（112），其从由带电粒子束照射的样品收集光辐射（108），并将所述辐射（108）反射到分析装置上，所述收集光学元件（112） 放置在称为真空室的室中，其中压力低于大气压; 以及用于使放置在聚光镜（112）下游的光辐射的装置（316），并被设计成使分析装置的入口处的所述光辐射（108）适应。 所述系统的特征在于，全部或部分适应装置（316）被置于压力高于所述真空室中的压力的​​环境中。