公开(公告)号：US09638616B2

公开(公告)日：2017-05-02

申请号：US13882611

申请日：2011-11-01

Applicant: Chiara Zuniga ,  Matteo Rinaldi ,  Gianluca Piazza

Inventor： Chiara Zuniga ,  Matteo Rinaldi ,  Gianluca Piazza

IPC: G01N33/551 ,  G01N9/00 ,  G01N29/02 ,  G01N5/02 ,  G01N29/036

CPC classification number: G01N9/002 ,  G01N5/02 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0427

Abstract: Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.

公开(公告)号：US20100190270A1

公开(公告)日：2010-07-29

申请号：US12693046

申请日：2010-01-25

Applicant: Gianluca Piazza ,  Alan T. Johnson ,  Matteo Rinaldi ,  Chiara Zuniga

Inventor： Gianluca Piazza ,  Alan T. Johnson ,  Matteo Rinaldi ,  Chiara Zuniga

IPC: G01N33/551 ,  G01N29/02 ,  B05D5/12 ,  H01L41/22

CPC classification number: G01N29/036 ,  C12Q1/6816 ,  G01N2291/0257 ,  C12Q2565/507

Abstract: Systems and methods for detecting a gaseous analyte utilize a micromechanical piezoelectric resonator having a functionalization layer configured to bind with the gaseous analyte. The functionalization layer may include a layer of carbon nanotubes affixed to the resonator and coated with biopolymers configured to bind with the gaseous analyte. The gaseous analyte may be detected by operating the micromechanical piezoelectric resonator and functionalization layer in the presence of the gas, detecting a change in the resonant frequency of the resonator, and determining the concentration of the gaseous analyte from the change in resonant frequency. Finally, the layer of carbon nanotubes may be grown on the piezoelectric resonator by depositing a catalyst on a piezoelectric structure, heating the piezoelectric structure and the catalyst to enhance the growth of the carbon nanotubes, and growing the carbon nanotubes at growth sites on the piezoelectric structure.

Abstract translation: 用于检测气态分析物的系统和方法利用具有配置为与气态分析物结合的官能化层的微机械压电谐振器。 功能化层可以包括固定在谐振器上的碳纳米管层，并涂覆有配置成与气体分析物结合的生物聚合物。 可以通过在存在气体的情况下操作微机械压电谐振器和功能化层来检测气体分析物，检测谐振器的谐振频率的变化，以及根据谐振频率的变化确定气态分析物的浓度。 最后，可以通过在压电结构上沉积催化剂，在压电谐振器上生长碳纳米管层，加热压电结构和催化剂以增强碳纳米管的生长，并且在压电体的生长位置生长碳纳米管 结构体。

公开(公告)号：US20130330835A1

公开(公告)日：2013-12-12

申请号：US13882611

申请日：2011-11-01

Applicant: Chiara Zuniga ,  Matteo Rinaldi ,  Gianluca Piazza

Inventor： Chiara Zuniga ,  Matteo Rinaldi ,  Gianluca Piazza

IPC: G01N9/00

CPC classification number: G01N9/002 ,  G01N5/02 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0427

Abstract: Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.

Abstract translation: 公开了用于重量测量的装置和方法。 重量传感器包括压电谐振器和形成在谐振器表面上的封装层。 封装层在谐振器表面上的封装层内限定通道。 通过形成压电谐振器来制造传感器，在压电谐振器的表面上形成牺牲层，在谐振器上的牺牲层上形成封装层，并蚀刻牺牲层以去除牺牲层并在 谐振器的表面。 通过将液体供应到重量测量传感器的通道，操作压电谐振器，检测谐振器的谐振频率的变化，以及根据谐振频率的变化来确定液体中分析物的存在来使用传感器 谐振器。

公开(公告)号：US20160003924A1

公开(公告)日：2016-01-07

申请号：US14771460

申请日：2014-03-06

Applicant: Matteo RINALDI ,  Nian-Xiang SUN ,  Tianxiang NAN ,  Yu HUI ,  NORTHEASTERN UNIVERSITY

Inventor： Nian-Xiang Sun ,  Matteo Rinaldi ,  Tianxiang Nan ,  Yu Hui

IPC: G01R33/28 ,  G01R33/00

CPC classification number: G01R33/28 ,  G01R33/0052 ,  G01R33/093

Abstract: This disclosure provides systems, methods, and apparatus for detecting magnetic fields. A magnetic sensor can include a substantially planar magnetostrictive layer. A piezoelectric layer can be bonded to a lower surface of the magnetostrictive layer. An electrode layer can be bonded to a lower surface of the piezoelectric layer. The device can be configured such that, when exposed to a magnetic field, at least one of an admittance amplitude, a quality factor, and a resonant frequency of the device is altered. The device can have a resonant frequency in the range of about 1 MHz to about 100 GHz.

Abstract translation: 本公开提供了用于检测磁场的系统，方法和装置。 磁传感器可以包括基本上平面的磁致伸缩层。 压电层可以结合到磁致伸缩层的下表面。 电极层可以结合到压电层的下表面。 该装置可以被配置为使得当暴露于磁场时，改变装置的导纳幅度，品质因数和谐振频率中的至少一个。 该装置可以具有约1MHz至约100GHz范围内的谐振频率。