公开(公告)号：US5168197A

公开(公告)日：1992-12-01

申请号：US858865

申请日：1992-03-27

Applicant: Moritake Tamba ,  Katushige Yamada ,  Kazuhiko Kawamura

Inventor： Moritake Tamba ,  Katushige Yamada ,  Kazuhiko Kawamura

IPC: C23C14/48 ,  H01J27/08 ,  H01J27/16 ,  H01J27/18 ,  H01J37/08 ,  H01J37/30 ,  H01J37/317 ,  H05H1/46 ,  H05H1/48

CPC classification number: H01J37/08 ,  H01J27/16 ,  H01J37/3178

Abstract: An ion beam generating apparatus including a vacuum chamber for retaining a vacuum therein, a microwave being introduced therein through at least one portion thereof, at least one vacuum arc plasma generating source having a cathode, an anode, and arc generating device and disposed inside the vacuum chamber, and ion extracting device for extracting ions from the plasma.