公开(公告)号：US20200238654A9

公开(公告)日：2020-07-30

申请号：US16510226

申请日：2019-07-12

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki TACHIBANA

IPC: B32B3/26 ,  B32B3/30 ,  B32B5/02 ,  B32B5/24 ,  B32B27/34 ,  B32B5/18 ,  B60N2/58 ,  B60N2/64 ,  B32B27/06 ,  B32B27/32 ,  B32B27/36

Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load.This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.

公开(公告)号：US10293309B2

公开(公告)日：2019-05-21

申请号：US14433705

申请日：2013-06-13

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki Tachibana ,  Kousuke Tachibana ,  Kaoru Harada ,  Souzou Sasajima ,  Kunihiro Tamahashi ,  Kyoko Honma ,  Yuuki Matsumoto

IPC: B01F3/04 ,  C02F1/72 ,  B01F5/02 ,  B01F5/06 ,  B01F5/20 ,  B01F15/00 ,  B01J19/26 ,  B01J7/00 ,  C02F1/76 ,  C02F1/78 ,  C02F1/34 ,  D06F35/00

Abstract: A new method for generating micro-nano bubbles that uses water hammering, a bubble generating nozzle, and an apparatus for generating micro-nano bubbles are provided to construct a system. The system is for generating micro-nano bubbles in a large amount using only pure water, which does not include any nucleating agents, and for performing not only a clean washing and sterilization but also the generation of uncontaminated micro-nano bubbles. The method defined in the present invention uses water hammering power produced by a mutual collision of jets of dissolved-gas-including solution squirted from two or more spouts. The bubble generating nozzle by the present invention has a configuration, including: a hollow cylinder having two or more small through-holes arrayed in the circumferential direction thereof and a micro-nano bubble discharge port provided on the both ends of the hollow cylinder, wherein the small through-holes are arranged so that all of their extension lines passing through respective center of the cross-section of each of the small through-holes which intersect each other in the inside of the hollow of the cylinder. The apparatus for generating bubble by the present invention has such bubble generating nozzle and has a configuration that enables generation of micro-nano bubbles in a large amount.

公开(公告)号：US20210138410A1

公开(公告)日：2021-05-13

申请号：US16623175

申请日：2017-08-02

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki TACHIBANA ,  Kousuke TACHIBANA ,  Souzou SASAJIMA ,  Kyoko HONMA

IPC: B01F5/00 ,  B01F3/04 ,  C02F1/24

Abstract: Provided are: a microbubble generation device utilizing a swirling flow generated by injecting of a pressurized liquid; a microbubble generation method capable of generating a large amount of bubbles; and a shower apparatus and an oil-water separation apparatus having said microbubble generation device. This microbubble generation device comprises: a cylindrical or conical cylinder with a gas-liquid swirling chamber therein; a gas-liquid discharge inlet provided on one end of the cylindrical or conical cylinder; and a liquid supply cylinder and a gas supply cylinder for introducing a liquid and a gas into the gas-liquid swirling chamber. For the gas-liquid discharge outlet, a plurality of small cylindrical through-holes or a plurality of small recessed parts with a circular cross-section and at least a semicircular circumferential length, are respectively provided in the wall of a closed end at one end of the cylindrical or conical cylinder or on the circumferential surface of the inner wall of an open end at one end thereof.

公开(公告)号：US20180161737A1

公开(公告)日：2018-06-14

申请号：US15319041

申请日：2015-12-01

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki TACHIBANA

IPC: B01F1/00 ,  B01F3/04 ,  B01F5/02 ,  B01F15/06 ,  H01L21/02 ,  H01L21/033 ,  H01L21/304 ,  B05B7/16

CPC classification number: B01F1/0005 ,  B01F1/00 ,  B01F3/04 ,  B01F3/04049 ,  B01F5/02 ,  B01F5/0231 ,  B01F15/06 ,  B05B7/16 ,  B05B7/1666 ,  B05B7/32 ,  B05D1/02 ,  B05D3/10 ,  B08B3/02 ,  B08B3/08 ,  H01L21/02052 ,  H01L21/027 ,  H01L21/0331 ,  H01L21/304

Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load. This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.

公开(公告)号：US20200338000A1

公开(公告)日：2020-10-29

申请号：US16922027

申请日：2020-07-07

Applicant: Dai YAMANOUCHI ,  SIGMA-TECHNOLOGY INC.

Inventor： Dai YAMANOUCHI ,  Yoshiaki TACHIBANA ,  Kosuke TACHIBANA

IPC: A61K9/08 ,  A61P35/00 ,  A61K33/00 ,  A61K9/10 ,  C12N5/00

Abstract: Provided is a method for manufacturing an administrable aqueous solution to a living body, the administrable aqueous solution having a function of supplying sufficient oxygen to peripheral cells, causing less damage and injury of cells under a hypoxic or anaerobic stimulation, and continuously exhibiting a sufficiently high and stable effect to protect cells. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles having a mean particle size of 30 nm or less and a density of 1016 bubbles per ml, preferably a mean particle size of 1 to 10 nm and a density 1017 bubbles or more per ml, respectively, as determined by a measurement with a cryo-transmission electron microscope by an ice-embedding method. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles which are generated by jetting an aqueous solution containing dissolved oxygen from the outside of a cylinder, the cylinder being provided with 2 or more small through holes formed in the circumferential direction, via the small through-holes under atmospheric pressure or higher and thus bringing the jetted solution into collision in such a manner that water hammer is concentrated at the center of the cylinder on the same plane parallel to a cross-section in a radial direction of the cylinder.

公开(公告)号：US20190329520A1

公开(公告)日：2019-10-31

申请号：US16510226

申请日：2019-07-12

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki TACHIBANA

IPC: B32B3/26 ,  B32B3/30 ,  B32B5/02 ,  B32B5/24 ,  B32B27/34 ,  B32B5/18 ,  B60N2/58 ,  B60N2/64 ,  B32B27/06 ,  B32B27/32 ,  B32B27/36

Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load.This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.

公开(公告)号：US20190298653A1

公开(公告)日：2019-10-03

申请号：US16301435

申请日：2017-05-11

Applicant: Dai YAMANOUCHI ,  SIGMA-TECHNOLOGY INC.

Inventor： Dai YAMANOUCHI ,  Yoshiaki TACHIBANA ,  Kosuke TACHIBANA

IPC: A61K9/08 ,  A61P35/00 ,  A61K33/00

Abstract: Provided are an administrable aqueous solution to a living body and a method for manufacturing the same, the administrable aqueous solution having a function of supplying sufficient oxygen to peripheral cells, causing less damage and injury of cells under a hypoxic or anaerobic stimulation, and continuously exhibiting a sufficiently high and stable effect to protect cells. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles having a mean particle size of 30 nm or less and a density of 1016 bubbles per ml, preferably a mean particle size of 1 to 10 nm and a density 1017 bubbles or more per ml, respectively, as determined by a measurement with a cryo-transmission electron microscope by an ice-embedding method. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles which are generated by jetting an aqueous solution containing dissolved oxygen from the outside of a cylinder, the cylinder being provided with 2 or more small through holes formed in the circumferential direction, via the small through-holes under atmospheric pressure or higher and thus bringing the jetted solution into collision in such a manner that water hammer is concentrated at the center of the cylinder on the same plane parallel to a cross-section in a radial direction of the cylinder.

公开(公告)号：US20150273408A1

公开(公告)日：2015-10-01

申请号：US14433705

申请日：2013-06-13

Applicant: SIGMA-TECHNOLOGY INC.

Inventor： Yoshiaki Tachibana ,  Kousuke Tachibana ,  Kaoru Harada ,  Souzou Sasajima ,  Kunihiro Tamahashi ,  Kyoko Honma ,  Yuuki Matsumoto

IPC: B01F3/04 ,  C02F1/72 ,  B01F5/20 ,  B01F15/00 ,  B01F5/02

CPC classification number: B01F3/04248 ,  B01F3/04439 ,  B01F3/04503 ,  B01F5/0256 ,  B01F5/0689 ,  B01F5/20 ,  B01F15/00538 ,  B01F15/00545 ,  B01F2003/04858 ,  B01F2215/008 ,  B01J7/00 ,  B01J19/26 ,  B01J2219/00162 ,  C02F1/34 ,  C02F1/72 ,  C02F1/722 ,  C02F1/76 ,  C02F1/78 ,  C02F2303/04 ,  D06F35/002

Abstract: A new method for generating micro-nano bubbles that uses water hammering, a bubble generating nozzle, and an apparatus for generating micro-nano bubbles are provided to construct a system. The system is for generating micro-nano bubbles in a large amount using only pure water, which does not include any nucleating agents, and for performing not only a clean washing and sterilization but also generation of uncontaminated micro-nano bubbles. The method defined in the present invention uses water hammering power produced by a mutual collision of jets of dissolved-gas-including solution squirted from two or more spouts. The bubble generating nozzle by the present invention has a configuration, comprising: a hollow cylinder having two or more small through-holes arrayed in the circumferential direction thereof and a micro-nano bubble discharge port provided on the both ends of the hollow cylinder, wherein the small through-holes are arranged so that all of their extension lines passing through respective center of the cross-section of each of the small through-holes intersect each other in the inside of the hollow of the cylinder. The apparatus for generating bubble by the present invention has such bubble generating nozzle and has a configuration that enables generation of micro-nano bubbles in a large amount.

Abstract translation: 提供了一种用于产生使用水锤的微纳米气泡的新方法，气泡生成喷嘴和用于产生微纳米气泡的装置，以构建系统。 该系统仅使用纯水（不包括任何成核剂）大量生成微纳米气泡，并且不仅要进行清洁的洗涤和灭菌，还可以产生未污染的微纳米气泡。 本发明所定义的方法使用由两个或多个喷口喷射的含溶解气体溶液的喷射相互碰撞产生的水击功。 本发明的气泡生成喷嘴具有如下结构：在圆周方向上排列有两个以上的小通孔的中空筒体和设置在中空筒体的两端的微小气泡喷出口，其特征在于， 小通孔被布置成使得通过每个小通孔的横截面的相应中心的所有延伸线在气缸的中空部的内部彼此相交。 本发明的产生气泡的装置具有这样的发泡喷嘴，并且具有能够大量生成微纳米气泡的结构。