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公开(公告)号：US20140026661A1
公开(公告)日：2014-01-30
申请号：US13936145
申请日：2013-07-06
Applicant: Biao Zhang , Tao Ju
Inventor： Biao Zhang , Tao Ju
CPC classification number: G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.
Abstract translation: 本文公开了一种MEMS陀螺仪，其中MEMS陀螺仪包括与检测质量相关联的磁感测机构和磁源。 磁感测机构包括多个磁场传感器，其被指定用于感测来自磁源的磁场，以便减轻由制造引起的问题。
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2.发明授权Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism 有权制造具有磁源和磁感测机构的MEMS陀螺仪的方法公开(公告)号：US09254992B2
公开(公告)日：2016-02-09
申请号：US13863269
申请日：2013-04-15
Applicant: Tao Ju
Inventor： Tao Ju
IPC: B81C3/00 , B81B3/00 , G01C19/56 , H01L29/82 , G01P15/105
CPC classification number: B81B3/0032 , B81B2201/0235 , B81B2201/0242 , G01C19/56 , G01C19/5755 , G01C19/5769 , G01P15/105 , H01L29/82 , H01L2924/1461
Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.
Abstract translation: 提供了一种MEMS陀螺仪，其具有可移动部分，不可移动部分和包括设置在可动部分处的磁源的磁感测结构，位于不可移动部分的磁感应元件。 可移动部分能够响应于外部角速度或外部加速器移动，使得由磁感测元件感测的磁场相对于可移动部分的运动，因此角速度或加速器。 本文公开了制造MEMS陀螺仪装置的方法。
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公开(公告)号：US20140308757A1
公开(公告)日：2014-10-16
申请号：US13863269
申请日：2013-04-15
Applicant: Tao Ju
Inventor： Tao Ju
IPC: B81C1/00
CPC classification number: B81B3/0032 , B81B2201/0235 , B81B2201/0242 , G01C19/56 , G01C19/5755 , G01C19/5769 , G01P15/105 , H01L29/82 , H01L2924/1461
Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.
Abstract translation: 提供了一种MEMS陀螺仪，其具有可移动部分，不可移动部分和包括设置在可动部分处的磁源的磁感测结构，位于不可移动部分的磁感应元件。 可移动部分能够响应于外部角速度或外部加速器移动，使得由磁感测元件感测的磁场相对于可移动部分的运动，因此角速度或加速器。 本文公开了制造MEMS陀螺仪装置的方法。
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公开(公告)号：US20140190257A1
公开(公告)日：2014-07-10
申请号：US13936143
申请日：2013-07-06
Applicant: Biao Zhang , Tao Ju
Inventor： Biao Zhang , Tao Ju
IPC: G01C19/56
CPC classification number: G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.
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Patent Agency Ranking
公开(公告)号：US20140026658A1
公开(公告)日：2014-01-30
申请号：US13935557
申请日：2013-07-05
Applicant: BIAO ZHANG , TAO JU
Inventor： BIAO ZHANG , TAO JU
IPC: G01C19/56
CPC classification number: G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.
Abstract translation: 本文公开了一种使用MEMS陀螺仪的方法，其中MEMS陀螺仪包括磁感测机构。 磁场由磁源产生，并由磁传感器检测。 磁场在磁传感器的位置变化; 并且磁场的变化与MEMS陀螺仪的校验质量的运动相关联。 通过检测磁场的变化，可以测量运动，从而测量目标角速度。
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公开(公告)号：US20140290365A1
公开(公告)日：2014-10-02
申请号：US13854972
申请日：2013-04-02
Applicant: Tao Ju
Inventor： Tao Ju
IPC: G01P3/44
CPC classification number: G01C19/5719
Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator.
Abstract translation: 提供了一种MEMS陀螺仪，其具有可移动部分，不可移动部分和包括设置在可动部分处的磁源的磁感测结构，位于不可移动部分的磁感应元件。 可移动部分能够响应于外部角速度或外部加速器移动，使得由磁感测元件感测的磁场相对于可移动部分的运动，因此角速度或加速器。
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7.发明申请公开(公告)号：US20180010959A1
公开(公告)日：2018-01-11
申请号：US15478956
申请日：2017-04-04
Applicant: Biao Zhang , Tao Ju
Inventor： Biao Zhang , Tao Ju
CPC classification number: G01J1/0407 , G01D5/16 , G01J1/0204 , G01J1/4204 , G01J3/2803 , G01J3/42 , G01J5/38 , G01J5/40
Abstract: A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.
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公开(公告)号：US20140026660A1
公开(公告)日：2014-01-30
申请号：US13936144
申请日：2013-07-06
Applicant: Biao Zhang , Tao Ju
Inventor： Biao Zhang , Tao Ju
IPC: G01C19/56
CPC classification number: G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.
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公开(公告)号：US20140026659A1
公开(公告)日：2014-01-30
申请号：US13935558
申请日：2013-07-05
Applicant: BIAO ZHANG , TAO JU
Inventor： BIAO ZHANG , TAO JU
IPC: G01C19/56
CPC classification number: G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.
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