公开(公告)号：US6433877B2

公开(公告)日：2002-08-13

申请号：US81924501

申请日：2001-03-28

Applicant: ADVANTEST CORP

Inventor： WATANABE MASAO ,  OKUBO AKIKO

IPC: G01B11/30 ,  G01N21/21 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01J4/04 ,  G01B21/17

CPC classification number: G01N21/211 ,  G01B11/303 ,  G01N21/88 ,  G01N21/94 ,  G01N21/9501

Abstract: A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.

Abstract translation: 表面检查装置将激光束照射到样品的表面上，二维扫描该表面，并检测反射激光束的s偏振光分量和p偏振光分量的强度。 对样品表面的每个位置计算出s（p偏振光分量）和p偏振光分量的反射强度之比（RR）的RR（反射率比），并且在该表面上的RR的二维分布 检测样品。 将该测量的RR的分布宽度与清洁样品的自然宽度进行比较，并且当作为比较的结果，RR分布宽度与自然宽度分开时，样品的表面被确定为被污染。 因此，可以基于s偏振光分量和p偏振光分量的反射强度的RR快速容易地确定样品的微观粗糙表面上不存在或存在污染。