公开(公告)号：US20130240736A1

公开(公告)日：2013-09-19

申请号：US13870308

申请日：2013-04-25

Applicant: ADVANTEST CORPORATION

Inventor： Shigeki NISHINA ,  Motoki IMAMURA ,  Akiyoshi IRISAWA ,  Tomoyu YAMASHITA ,  Eiji KATO ,  Kodo KAWASE

IPC: G01J5/02

CPC classification number: G01J5/0285 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8806

Abstract: An electromagnetic wave measurement device includes an electromagnetic wave outputter that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changer changes a relative position of an intersection of an optical path of the electromagnetic wave transmitting through the device under test and the device under test, with respect to the device under test, so that the intersection is at a predetermined relative position due to the refraction of the electromagnetic wave by the device under test. A characteristic value deriver derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector, the characteristic value being associated with the predetermined relative position.

Abstract translation: 电磁波测量装置包括电磁波输出器，其向被测设备输出频率等于或大于0.01THz且等于或小于100THz的电磁波。 电磁波检测器检测已经通过被测设备的电磁波。 相对位置更换器相对于被测设备改变通过被测设备的电磁波的光路与被测设备的相对位置，使得交叉点处于预定的相对位置 对被测器件的电磁波的折射。 特征值提取器基于电磁波检测器的检测结果导出电磁波的特征值，特征值与预定的相对位置相关联。