公开(公告)号：US20140166883A1

公开(公告)日：2014-06-19

申请号：US14108882

申请日：2013-12-17

Applicant: ADVANTEST CORPORATION

Inventor： Shigeru ONO ,  Kazunori SHIOTA ,  Masaichi HASHIMOTO ,  Akiyoshi IRISAWA

IPC: G01B11/06 ,  G01N21/59

CPC classification number: G01N21/59 ,  G01B11/0633

Abstract: According to the present invention, an electromagnetic wave measurement device includes: an electromagnetic wave detector, a frequency component acquisition unit, and a thickness indication quantity deriving unit. An object to be measured is disposed on a substrate and includes at least two layers, and the electromagnetic wave detector detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object, has been reflected by the substrate, and has passed through the object. The frequency component acquisition unit acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave. The thickness indication quantity deriving unit derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave and a relationship between the thickness indication quantity and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave.

Abstract translation: 根据本发明，电磁波测量装置包括：电磁波检测器，频率分量获取单元和厚度指示量导出单元。 将被测量物体配置在基板上，至少包含两层，电磁波检测器检测出已被入射到物体的基板表面反射的电磁波已被基板反射，并且已经通过 通过对象。 频率分量获取单元获取基板表面反射电磁波的频率分量的振幅。 厚度指示量导出单元基于基板表面反射电磁波的频率分量的振幅以及基板表面反射电磁波的厚度指示量与基板表面反射的频率分量的振幅之间的关系导出厚度指示量 电磁波。

公开(公告)号：US20170074803A1

公开(公告)日：2017-03-16

申请号：US15122686

申请日：2015-04-21

Applicant: ADVANTEST CORPORATION

Inventor： Fumikazu TAKAYANAGI ,  Akiyoshi IRISAWA

IPC: G01N21/88 ,  G01N21/59

CPC classification number: G01N21/8806 ,  G01N21/3581 ,  G01N21/55 ,  G01N21/59 ,  G01N21/8422 ,  G01N2201/0696 ,  G01N2201/12

Abstract: According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device and an electromagnetic wave detector. The electromagnetic wave output device outputs and electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a sample acquired by adhering a plurality of specimens to each other by an adhesive. The electromagnetic wave detector detects a transmitted electromagnetic wave, which is the electromagnetic wave having transmitted through the sample. The electromagnetic wave having transmitted through the sample. The electromagnetic wave measurement device determines wherein whether a joint by the adhesive is excellent or not based on the detected transmitted electromagnetic wave.

Abstract translation: 根据本发明，电磁波测量装置包括电磁波输出装置和电磁波检测器。 电磁波输出装置对通过粘合剂使多个试样彼此粘合而获得的样品，输出频率等于或大于0.01 [THz]且等于或小于100 [THz]的频率的电磁波。 电磁波检测器检测发射的电磁波，其是通过样品的电磁波。 透过样品的电磁波。 电磁波测量装置根据检测到的发送的电磁波来确定粘合剂的接合是否良好。

公开(公告)号：US20130240736A1

公开(公告)日：2013-09-19

申请号：US13870308

申请日：2013-04-25

Applicant: ADVANTEST CORPORATION

Inventor： Shigeki NISHINA ,  Motoki IMAMURA ,  Akiyoshi IRISAWA ,  Tomoyu YAMASHITA ,  Eiji KATO ,  Kodo KAWASE

IPC: G01J5/02

CPC classification number: G01J5/0285 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8806

Abstract: An electromagnetic wave measurement device includes an electromagnetic wave outputter that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changer changes a relative position of an intersection of an optical path of the electromagnetic wave transmitting through the device under test and the device under test, with respect to the device under test, so that the intersection is at a predetermined relative position due to the refraction of the electromagnetic wave by the device under test. A characteristic value deriver derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector, the characteristic value being associated with the predetermined relative position.

Abstract translation: 电磁波测量装置包括电磁波输出器，其向被测设备输出频率等于或大于0.01THz且等于或小于100THz的电磁波。 电磁波检测器检测已经通过被测设备的电磁波。 相对位置更换器相对于被测设备改变通过被测设备的电磁波的光路与被测设备的相对位置，使得交叉点处于预定的相对位置 对被测器件的电磁波的折射。 特征值提取器基于电磁波检测器的检测结果导出电磁波的特征值，特征值与预定的相对位置相关联。

公开(公告)号：US20140168652A1

公开(公告)日：2014-06-19

申请号：US13783549

申请日：2013-03-04

Applicant: ADVANTEST CORPORATION

Inventor： Tomoyu YAMASHITA ,  Akiyoshi IRISAWA

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/3581

Abstract: Provided is a light beam incident device including an off-axis parabolic mirror that receives parallel light beams and converges the parallel light beams at one point on an object to be measured, and an incident-side light reception surface of a mirror that feeds the parallel light beams to the off-axis parabolic mirror. An angle (incident angle) between the object to be measured and converged light beams obtained by converging the parallel light beams changes in accordance with a light reception portion at which the off-axis parabolic mirror receives the parallel light beams. The incident side light reception surface of the mirror can change the light reception portion by moving with respect to the off-axis parabolic mirror.

Abstract translation: 本发明提供一种光束入射装置，其包括离轴抛物面镜，该离轴抛物面镜接收平行光束并使平行光束在待测物体上的一个点处收敛，并将反射镜的入射侧光接收表面馈送到平行 光束到离轴抛物面镜。 被测量物体和通过会聚平行光束的会聚光束之间的角度（入射角）根据离轴抛物面镜接收平行光束的光接收部分而变化。 反射镜的入射侧光接收表面可以通过相对于离轴抛物面镜移动来改变光接收部分。

公开(公告)号：US20130284950A1

公开(公告)日：2013-10-31

申请号：US13862560

申请日：2013-04-15

Applicant: ADVANTEST CORPORATION

Inventor： Kazunori SHIOTA ,  Akiyoshi IRISAWA

IPC: F21V5/04

CPC classification number: F21V5/04 ,  G02F1/3534 ,  G02F1/365 ,  G02F2001/374 ,  G02F2203/13

Abstract: According to the present invention, an electromagnetic wave emission device includes a nonlinear crystal having an optical waveguide; and a prism including an electromagnetic wave input surface and an electromagnetic wave transmission surface. The electromagnetic wave transmission surface includes a rotation surface which is a trajectory of a tilted line segment rotated about a central axis of the electromagnetic wave input surface, the tilted line segment being tilted with respect to the central axis. The tilted line segment and the central axis are on the same plane. The central axis is in parallel to an extending direction of the optical waveguide. The central axis passes through a projection of the optical waveguide into the electromagnetic wave input surface.

Abstract translation: 根据本发明，电磁波发射装置包括具有光波导的非线性晶体; 以及包括电磁波输入面和电磁波透过面的棱镜。 电磁波传播面包括作为围绕电磁波输入面的中心轴旋转的倾斜线段的轨迹的旋转面，倾斜线段相对于中心轴倾斜。 倾斜的线段和中心轴在同一平面上。 中心轴与光波导的延伸方向平行。 中心轴穿过光波导的投影到电磁波输入表面。

公开(公告)号：US20170074804A1

公开(公告)日：2017-03-16

申请号：US15122689

申请日：2015-04-21

Applicant: ADVANTEST CORPORATION

Inventor： Fumikazu TAKAYANAGI ,  Akiyoshi IRISAWA

IPC: G01N21/88 ,  G01N21/55 ,  G01N21/59

CPC classification number: G01N21/8806 ,  G01N21/3581 ,  G01N21/55 ,  G01N21/59 ,  G01N21/8422 ,  G01N2201/0696 ,  G01N2201/12

Abstract: According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device and an electromagnetic wave detector. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a sample acquired by adhering a plurality of specimens to each other by an adhesive and a reflective body arranged behind the sample. The electromagnetic wave detector detects a reflected electromagnetic wave, which is the electromagnetic wave reflected by one of the sample and the reflective body. The electromagnetic wave measurement device determines whether a joint by the adhesive is excellent or not based on the detected reflected electromagnetic wave.

Abstract translation: 根据本发明，电磁波测量装置包括电磁波输出装置和电磁波检测器。 电磁波输出装置向通过粘合剂粘合多个试样而获得的样品输出等于或大于0.01 [THz]且等于或小于100 [THz]的频率的电磁波，并且反射 身体排列在样品后面。 电磁波检测器检测作为样品和反射体之一反射的电磁波的反射电磁波。 电磁波测量装置基于检测到的反射电磁波确定粘合剂的接合是否良好。

公开(公告)号：US20130126736A1

公开(公告)日：2013-05-23

申请号：US13648559

申请日：2012-10-10

Applicant: ADVANTEST CORPORATION

Inventor： Eiji KATO ,  Akiyoshi IRISAWA

IPC: G01J3/42

CPC classification number: G01J3/42 ,  G01N21/13 ,  G01N21/314 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/359 ,  G01N21/552 ,  G01N21/95 ,  G01N21/9508 ,  G01N2021/8411

Abstract: An electromagnetic wave output device outputs an electromagnetic wave. An optical element has a total reflection surface for totally reflecting the electromagnetic wave, and causes the device under test to receive an evanescent wave generated from the total reflection surface. An electromagnetic wave detector detects the electromagnetic wave, and a spectrum deriver derives a reflectance of the electromagnetic wave on the total reflection surface or a value based on the reflectance based on a detection result by the electromagnetic wave detector while the reflectance or the value based on the reflectance is associated with the frequency of the electromagnetic wave and a manufacturing condition of the particle or the device under test. A characteristic extractor extracts a characteristic based on the manufacturing condition from a derived result by the spectrum deriver.

Abstract translation: 电磁波输出装置输出电磁波。 光学元件具有用于全反射电磁波的全反射面，并且使被测器件接收从全反射面产生的ev逝波。 电磁波检测器检测电磁波，并且频谱提取器基于电磁波检测器的检测结果，导出电磁波在全反射面上的反射率或基于反射率的值，而反射率或基于 反射率与电磁波的频率以及粒子或被测设备的制造条件相关。 特征提取器根据衍生结果由频谱提取器提取基于制造条件的特性。