公开(公告)号：US3695217A

公开(公告)日：1972-10-03

申请号：US3695217D

申请日：1970-06-11

Applicant: AGA AB

Inventor： JACOBSSON JAN ROLAND

IPC: C23C14/24 ,  C23C14/30 ,  H01J37/305 ,  C23C13/12

CPC classification number: H01J37/3053 ,  C23C14/30

Abstract: The vapor deposition apparatus includes a horizontally disposed, continuously rotating disc having a plurality of packets spaced about the periphery thereof, each containing a different evaporant source. Means directly heat only a portion of an annulus of said disc, including at least a portion of only one of said pockets. The disc has a thermal inertia such that sufficient heat is retained at all pockets, which have passed out of the immediate influence of said heat means, whereby to effect a simultaneous evaporation from all pockets.