公开(公告)号：US20170250052A1

公开(公告)日：2017-08-31

申请号：US15595214

申请日：2017-05-15

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alex GOLDENSHTEIN

IPC: H01J37/073 ,  H01J37/28

CPC classification number: H01J37/073 ,  H01J37/026 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/04 ,  H01J2237/063 ,  H01J2237/2801 ,  H01J2237/2817

Abstract: A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.

公开(公告)号：US20160336146A1

公开(公告)日：2016-11-17

申请号：US14710297

申请日：2015-05-12

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alex GOLDENSHTEIN

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/073 ,  H01J37/026 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/04 ,  H01J2237/063 ,  H01J2237/2801 ,  H01J2237/2817

Abstract: A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.

Abstract translation: 一种用于对物体进行成像的方法和系统，该系统可以包括电子光学器件，其可被配置为用至少一个电子束扫描物体的第一区域; 其中所述电子光学器件可包括第一电极; 以及可以被配置为照亮（a）第一电极和（b）物体的至少一个靶的光学元件，从而在第一电极和物体之间引起电子的发射。