公开(公告)号：US20170097571A1

公开(公告)日：2017-04-06

申请号：US15286260

申请日：2016-10-05

Applicant: ASELTA NANOGRAPHICS

Inventor： Luc MARTIN ,  Thomas QUAGLIO ,  Matthieu MILLEQUANT ,  Clyde BROWNING ,  Serdar MANAKLI

IPC: G03F7/20

CPC classification number: G03F1/78 ,  G03F7/70383 ,  G03F7/70433 ,  G03F7/70441 ,  G03F7/70491 ,  G03F7/705 ,  H01J37/3026 ,  H01J37/3174 ,  H01J37/3178 ,  H01J2237/3175

Abstract: A method for transferring a fractured pattern decomposed into elementary shapes, onto a substrate by direct writing by a particle or photon beam, comprises a step of identifying at least one elementary shape of the fractured pattern, called removable elementary shape, whose removal induces modifications of the transferred pattern within a preset tolerance envelope; a step of removing the removable shape or shapes from the fractured pattern to obtain a modified fractured pattern; and an exposure step, comprising exposing the substrate to a plurality of shots of a shaped particle or photon beam, each shot corresponding to an elementary shape of the modified fractured pattern. A computer program product for carrying out such a method is provided.

公开(公告)号：US20160252807A1

公开(公告)日：2016-09-01

申请号：US15033016

申请日：2014-10-27

Applicant: ASELTA NANOGRAPHICS

Inventor： Serdar MANAKLI ,  Luc MARTIN

IPC: G03F1/70 ,  G06F17/50 ,  G03F7/20

CPC classification number: G03F1/70 ,  G03F1/68 ,  G03F7/70433 ,  G03F7/70558 ,  G06F17/5068 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/31776

Abstract: A computer implemented method of fracturing free form target design into elementary shots for defined roughness of the contour comprises determining a first set of shots which pave the target design and determining a second set of shots to fill the gaps. The dose levels of overlapping shots in the first or second sets of shots are determined so the compounded dose is adequate to the resist threshold, considering the proximity effect of the actual imprint of shots on the insulated target. A dose geometry modulation is applied and rounded shot prints are produced by shots not circular that may overlap. The degree of overlap is determined as a function of desired optimization of fit criteria between a printed contour and the contour of the desired pattern. Placements and dimensions of the shots are determined by a plurality of fit criteria between printed contour and contour of the desired pattern.

Abstract translation: 一种计算机实现的将自由形式目标设计分解成用于确定轮廓的粗糙度的基本投射的方法包括确定铺平目标设计的第一组投篮并确定第二组投篮以填补所述间隙。 确定第一组或第二组拍摄中重叠拍摄的剂量水平，因此考虑到实际拍摄照片对绝缘目标的邻近效应，复合剂量足以抵抗抗蚀剂阈值。 应用剂量几何调制，并且通过可能重叠的不是圆形的拍摄产生圆形拍摄照片。 根据期望的打印轮廓和期望图案的轮廓之间的拟合标准优化的函数确定重叠程度。 拍摄的放置和尺寸由打印的轮廓和期望图案的轮廓之间的多个拟合标准确定。