公开(公告)号：US20250109494A1

公开(公告)日：2025-04-03

申请号：US18904974

申请日：2024-10-02

Applicant: ASM IP Holding B.V.

Inventor： Kenneth Honniball

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/52

Abstract: Methods and related systems that can be useful in the field of semiconductor processing equipment. Methods as disclosed herein can comprise cleaning a precursor line with a hot gas stream emanating from a hot end of a vortex tube.

公开(公告)号：US20240044689A1

公开(公告)日：2024-02-08

申请号：US18361572

申请日：2023-07-28

Applicant: ASM IP Holding, B.V.

Inventor： Giuseppe Alessio Verni ,  Kenneth Honniball ,  Viljami Pore

IPC: G01F23/14 ,  H01L21/67

CPC classification number: G01F23/14 ,  H01L21/67253 ,  H01L21/02205

Abstract: A pressure-based sensor system is described by which the amount of solid precursor in a precursor vessel for a semiconductor manufacturing process can be determined. The system comprises at least two fluidly connected chambers having a known volume, and a pressure sensor configured to measure a plurality of pressures in said chambers.