公开(公告)号：US20130170049A1

公开(公告)日：2013-07-04

申请号：US13687630

申请日：2012-11-28

Applicant: ASML Holding N.V.

Inventor： Stanislav Y. SMIRNOV ,  Adel JOOBEUR ,  Yevgeniy Konstantinovich SHMAREV ,  Arun Mahadevan VENKATARAMAN

IPC: G02B17/08

CPC classification number: G02B17/08 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70625 ,  G03F7/70633

Abstract: A system and method is described for correcting aberrations caused by field curvature with a catadioptric objective. In one example, a catadioptric optical system includes a first catadioptric element and a second catadioptric element. The first catadioptric element includes a first surface positioned to reflect a beam and a second surface positioned to focus the beam reflected by the first surface. The second catadioptric element is configured to receive the beam reflected by the second surface of the first catadioptric element. The second catadioptric element includes a third surface positioned to reflect the beam, and a fourth reflective surface positioned to focus the beam reflected by the third reflective surface. A curvature of the third or fourth surfaces of the second catadioptric element is chosen to apply a positive contribution to a field curvature associated with the first catadioptric element.

Abstract translation: 描述了一种系统和方法，用于校正由反射折射物镜由场曲率引起的像差。 在一个示例中，反射折射光学系统包括第一反射折射元件和第二反射折射元件。 第一反射折射元件包括被定位成反射光束的第一表面和被定位成聚焦由第一表面反射的光束的第二表面。 第二反射折射元件被配置为接收由第一反射折射元件的第二表面反射的光束。 第二反射折射元件包括被定位成反射光束的第三表面和被定位成聚焦由第三反射表面反射的光束的第四反射表面。 选择第二反射折射元件的第三或第四表面的曲率以对与第一反射折射元件相关联的场曲率施加正贡献。

公开(公告)号：US20230055116A1

公开(公告)日：2023-02-23

申请号：US17794905

申请日：2021-01-21

Applicant: ASML Holding N.V.

Inventor： Peter Conrad KOCHERSPERGER ,  Christopher Michael DOHAN ,  Justin Lloyd KREUZER ,  Michal Emanuel PAWLOWSKI ,  Aage BENDIKSEN ,  Kirill Urievich SOBOLEV ,  James Hamilton WALSH ,  Roberto B. WIENER ,  Arun Mahadevan VENKATARAMAN

IPC: G03F1/84

Abstract: An inspection system includes a radiation source that generates a beam of radiation and irradiates a first surface of an object, defining a region of the first surface of the object. The radiation source also irradiates a second surface of the object, defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface. The inspection system may also include a detector that defines a field of view (FOV) of the first surface including the region of the first surface, and receives radiation scattered from the region of the first surface and the region of the second surface. The inspection system may also include a processor that discards image data not received from the region of the first surface, and constructs a composite image comprising the image data from across the region of the first surface.