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公开(公告)号：US20210181640A1
公开(公告)日：2021-06-17
申请号：US16760357
申请日：2018-10-05
Applicant: ASML Holding N.V.
Inventor： Stephen ROUX , Christopher William REED
IPC: G03F7/20 , H01L21/033
Abstract: An optical assembly and a method of making an optical assembly in which additive manufacturing techniques are used to form a support structure either directly on an optical element or on a carrier that is subsequently bonded to an optical element.
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