公开(公告)号：US20240310161A1

公开(公告)日：2024-09-19

申请号：US18604439

申请日：2024-03-13

Applicant: AUROS Technology, Inc.

Inventor： Tae Dong KANG ,  In Hee JOH ,  Say Yeon JOUNG ,  Moon Il SHIN

IPC: G01B11/06 ,  G01N21/25 ,  G06F30/27

CPC classification number: G01B11/06 ,  G01N21/25 ,  G06F30/27 ,  G01N2201/121 ,  G01N2201/126

Abstract: An analyzing apparatus is provided. The analyzing apparatus may include a spectrum unit acquiring a spectrum related to semiconductor characteristics, and a corrector provided with a model that corrects at least one of noise and uncertainty of a measurement parameter related to the spectrum. The analyzing apparatus may include an evaluator provided to evaluate the uncertainty of the parameter corresponding to a controllable factor of measurement equipment that outputs the spectrum, and an attenuator provided to attenuate the spectral noise on the basis of an uncontrollable factor of the measurement equipment.