公开(公告)号：US20240255436A1

公开(公告)日：2024-08-01

申请号：US18104231

申请日：2023-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Mariano ABRAMSON ,  Uzi BARAZANI ,  Menachem LAPID

IPC: G01N21/88 ,  G01N21/95 ,  G02B21/02 ,  G02B21/12 ,  G02B21/18 ,  G02B27/00

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G02B21/02 ,  G02B21/125 ,  G02B21/18 ,  G02B27/0012 ,  G01N2201/0636 ,  G01N2201/121

Abstract: A wafer inspection tool comprising an illumination system having: a field of view (FOV); a light source pupil having a size and shape; a central optical axis; and one or more field angle defining a shape of said FOV extending away from said light source pupil; an objective lens arrangement including an objective and a plurality of interchangeable telescopes coupled thereto, the objective lens arrangement being configured to collect light reflected off a plurality of field points on the wafer and to onwardly transmit a light beam formed from the collected light; and a light separator having a first reflective surface with a transmissive region formed therein and a second surface, wherein said transmissive region is arranged to allow therethrough a central portion of said light beam transmitted from said objective lens arrangement corresponding to the brightfield channel while said reflective surface is arranged to reflect a peripheral portion of said light beam transmitted from said objective lens arrangement corresponding to the darkfield channel; a relay module configured to relay said light source pupil to said transmissive region; wherein said transmissive region has a shape defined as a geometric intersection volume between a model of said illumination light and said reflective surface and said second surface; wherein said model includes a plurality of solids each solid having a cross section of said light source pupil and angled to a field angle of said one or more field angle.

公开(公告)号：US20240175807A1

公开(公告)日：2024-05-30

申请号：US18071690

申请日：2022-11-30

Applicant: Aikemy Gmbh

Inventor： Kotaro ISHIZAKI ,  Agata Dorota ISHIZAKI-SROKA

IPC: G01N21/27

CPC classification number: G01N21/274 ,  G01N2201/121

Abstract: A device for analyzing a sample includes a measurement area at which the sample is to be located, an illumination arrangement, and first and second spectral sensors. The illumination arrangement illuminates the measurement area such that the illumination is incident on the sample. Each of the first and second spectral sensors is oriented toward the measurement area to collect illumination arriving from the measurement area. The first spectral sensor performs a spectral measurement of the sample in response to the incident illumination so as to produce spectral measurement data. The second spectral sensor measures background noise so as to produce background measurement data that provides at least a partial correction for noise in the spectral measurement data. In certain embodiments, operation of the first and second spectral sensors is switched such that the second spectral sensor performs a spectral measurement and the first spectral sensor measures background noise.

公开(公告)号：US20240096667A1

公开(公告)日：2024-03-21

申请号：US18272859

申请日：2021-01-29

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Hiromichi YAMAKAWA ,  Toshifumi HONDA ,  Yuta URANO ,  Shunichi MATSUMOTO ,  Masaya YAMAMOTO ,  Eiji ARIMA

IPC: H01L21/67 ,  G01N21/95 ,  G06T7/60 ,  G06T7/70

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G06T7/60 ,  G06T7/70 ,  G01N2201/103 ,  G01N2201/1087 ,  G01N2201/121 ,  H04N23/67

Abstract: A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

公开(公告)号：US20240060898A1

公开(公告)日：2024-02-22

申请号：US18452060

申请日：2023-08-18

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Stanislav Kalinin ,  Dieter Huhse

IPC: G01N21/64 ,  G02B21/16

CPC classification number: G01N21/6486 ,  G02B21/16 ,  G01N2201/121

Abstract: A method can be used for correcting background signals in captured measurement values of analog detectors, wherein measurement values of an object captured over a reference time period are analyzed and characteristic values of captured background signals are determined. What is characteristic of this is that a threshold value is determined on the basis of at least one characteristic value and by applying a calculation specification; the threshold value is applied to captured measurement values of an analog detector, and only those measurement values which are greater than the threshold value are used for a subsequent signal evaluation. A microscope for carrying out the method according to the invention is also provided.

公开(公告)号：US20230160832A1

公开(公告)日：2023-05-25

申请号：US17997152

申请日：2021-05-20

Applicant: BSD ROBOTICS PTY LTD

Inventor： Andrew Stewart

IPC: G01N21/88 ,  G01N21/01 ,  G01N33/48 ,  G01N35/00

CPC classification number: G01N21/88 ,  G01N21/01 ,  G01N33/48 ,  G01N35/00732 ,  G01N2201/10 ,  G01N2035/00752 ,  G01N2201/0636 ,  G01N2201/121 ,  G01N2201/0693

Abstract: The present invention relates to a biological sample quality apparatus for determining the quality of a biological sample. The apparatus includes a sample receiver for receiving the biological sample. One or more light sources are provided for supplying light to the sample. An image sensor is provided for capturing an image of the lit sample. The apparatus also includes an image processor for image processing the captured image to determine the quality of the sample. Advantageously, image processing may be used to determine the quality of a sample for use in collection sites and screening laboratories so that acceptability can be determined prior to analyzing the sample. Determination that the sample is of sufficient quality (e.g. sufficient biomaterial) prior to analyzing saves wastage of laboratory time and expense of materials and chemicals. The apparatus may be in the form of desktop or hand-held portable variations.

公开(公告)号：US20180363024A1

公开(公告)日：2018-12-20

申请号：US16111798

申请日：2018-08-24

Applicant: CASE WESTERN RESERVE UNIVERSITY

Inventor： Ozan Akkus ,  Mikhail Slipchenko ,  Anna Akkus ,  Shan Yang ,  Bolan Li

IPC: C12Q1/40 ,  C12Q1/37 ,  G01N1/40 ,  G01N21/65

CPC classification number: C12Q1/40 ,  C12Q1/37 ,  G01N1/4077 ,  G01N21/65 ,  G01N2001/4088 ,  G01N2201/121 ,  G01N2333/928 ,  G01N2333/958 ,  G01N2800/107 ,  G01N2800/345

Abstract: Methods for determining whether certain compounds, in particular crystals, are present in a sample of a biological fluid that indicates an individual has a particular disease or condition, such as but not limited to gout, pseudogout or urinary tract stones. In some embodiments, the methods include the steps of digestion and filtration of a sample of synovial fluid in order to isolate, if present, monosodium urate monohydrate (MSU), calcium pyrophosphate dihydrate (CPPD), or calcium phosphate crystals from the sample, wherein the filtrate is analyzed with a Raman device to ascertain the presence and type of the crystals. Devices for performing steps of the method are disclosed.

公开(公告)号：US20180299373A1

公开(公告)日：2018-10-18

申请号：US15946887

申请日：2018-04-06

Applicant: GREENTROPISM

Inventor： Antoine LABORDE ,  Aude BOURDEAU ,  Anthony BOULANGER

IPC: G01N21/31

CPC classification number: G01N21/314 ,  G01J3/0264 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/2833 ,  G01J2003/2843 ,  G01J2003/2866 ,  G01J2003/2869 ,  G01J2003/2873 ,  G01N21/274 ,  G01N21/31 ,  G01N33/10 ,  G01N2201/121 ,  G01N2201/129 ,  G01N2201/1293

Abstract: The invention relates to a characterization device (50) for characterizing a sample (S) comprising: a memory (MEM) storing a measured spectrum (As+p) of said sample, performed through a translucent material, and a measured spectrum of the translucent material (Ap), a processing unit (PU) configured to: determine a spectral energy (Es+p) of the measured spectrum (As+p) of the sample through the translucent material (As+p), estimate a coefficient ({circumflex over (γ)}) from said spectral energy (Es+p) and, determine a corrected spectrum (Âs) of the sample from the measured spectrum (As+p) of the sample through the translucent material and from a corrected spectrum of the translucent material (Âp), said corrected spectrum of the translucent material (Âp) being determined from the measured spectrum of the translucent material (Ap) and from the estimated coefficient ({circumflex over (γ)}).

公开(公告)号：US20180059015A1

公开(公告)日：2018-03-01

申请号：US15690856

申请日：2017-08-30

Applicant: Sensii, Inc.

Inventor： Qiaochu Li ,  Wenting Xing

IPC: G01N21/3577 ,  G01N21/359 ,  G01N33/14 ,  G01N33/04 ,  G01N33/03

CPC classification number: G01N21/3577 ,  G01N21/359 ,  G01N33/03 ,  G01N33/04 ,  G01N33/146 ,  G01N2201/0221 ,  G01N2201/121 ,  G01N2201/129

Abstract: A personal liquid analysis system includes a portable liquid analyzer device, a mobile application as a user interface, and a cloud server for data analysis. The compact and portable liquid analyzer device is integrated by miniaturized near-infrared (NIR) optical sensors setup for spectroscopy measurement from a sample cell, control circuits, I/O user interface modules and wireless communication modules. The analyzer can be used to collect NIR spectra data from a liquid sample in the sample cell, and to transmit the data to a cloud server where compositional information is calculated, and presented to the user on the device and/or on a mobile application. The personal liquid analysis system enables the user to rapidly acquire qualitative and/or quantitative compositional information from liquid samples for a wide range of applications.

公开(公告)号：US20170276609A1

公开(公告)日：2017-09-28

申请号：US15480530

申请日：2017-04-06

Applicant: APPLIED BIOSYSTEMS, LLC

Inventor： Austin B. TOMANEY ,  Mark F. OLDHAM

IPC: G01N21/64 ,  H04N5/225 ,  H04N5/357 ,  H04N5/361 ,  H04N5/367

CPC classification number: G01N21/6486 ,  G01N21/6428 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/08 ,  G01N2201/121 ,  H04N5/225 ,  H04N5/357 ,  H04N5/361 ,  H04N5/367

Abstract: A system and method for characterizing contributions to signal noise associated with charge-coupled devices adapted for use in biological analysis. Dark current contribution, readout offset contribution, photo response non-uniformity, and spurious charge contribution can be determined by the methods of the present teachings and used for signal correction by systems of the present teachings.

公开(公告)号：US20170146463A1

公开(公告)日：2017-05-25

申请号：US15127686

申请日：2015-01-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshifumi HONDA ,  Yuta URANO ,  Shunichi MATSUMOTO ,  Taketo UENO ,  Yuko OTANI

IPC: G01N21/956 ,  G01N21/47 ,  G01N21/95

CPC classification number: G01N21/956 ,  G01N21/4738 ,  G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848 ,  G01N2201/121

Abstract: A defect inspection method includes irradiating a sample with laser, condensing and detecting scattered light beams, processing signals that detectors have detected and extracting a defect on a sample surface, and outputting information on the extracted defect. Detection of the scattered light beams is performed by condensing the scattered light beams, adjusting polarization directions of the condensed scattered light beams, mutually separating the light beams depending on the polarization direction, and detecting the light beams by a plurality of detectors. Extraction of the defect is performed by processing output signals from the detectors by multiplying each detection signal by a gain, discriminating between a noise and the defect, and detecting the defect.