公开(公告)号：US20250079116A1

公开(公告)日：2025-03-06

申请号：US18239988

申请日：2023-08-30

Applicant: Applied Materials, Inc.

Inventor： Michael Mason Carrell ,  Aaron P. Webb ,  Jason M. Schaller ,  William H. Park, JR. ,  David Blahnik ,  Wai-Ming Tam

IPC: H01J37/20 ,  C23C14/48 ,  H01J37/317

Abstract: An apparatus that may be used to allow the rotation of a component that passes through a wall of a vacuum chamber is disclosed. The apparatus includes a rotatable shaft through which the component passes. The rotatable shaft is held in place using a holder, which retains a portion of the rotatable shaft. In some embodiments, the holder is affixed to a plate, which is then affixed to the chamber wall. The plate has an opening which is aligned to the opening in the chamber wall. A portion of the rotatable shaft passes through the opening in the plate and vacuum seals are disposed between the rotatable shaft and the plate. This apparatus may be used to allow use of rotatable components in an ion implanter.

公开(公告)号：US11856685B2

公开(公告)日：2023-12-26

申请号：US17479313

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

IPC: H05H7/22

CPC classification number: H05H7/22

Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.

公开(公告)号：US20230089170A1

公开(公告)日：2023-03-23

申请号：US17479313

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

IPC: H05H7/22

Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.