中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

15 records (took 0.012 seconds)

    Power deposition control in inductively coupled plasma (ICP) reactors
    3.
    发明授权
    Power deposition control in inductively coupled plasma (ICP) reactors 有权

    公开(公告)号：US10553398B2

    公开(公告)日：2020-02-04

    申请号：US14463205

    申请日：2014-08-19

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Samer Banna ,  Tza-Jing Gung ,  Vladimir Knyazik ,  Kyle Tantiwong ,  Dan A. Marohl ,  Valentin N. Todorow ,  Stephen Yuen

    IPC: H01J37/32

    Abstract: Embodiments of inductively coupled plasma (ICP) reactors are provided herein. In some embodiments, a dielectric window for an inductively coupled plasma reactor includes: a body including a first side, a second side opposite the first side, an edge, and a center, wherein the dielectric window has a dielectric coefficient that varies spatially. In some embodiments, an apparatus for processing a substrate includes: a process chamber having a processing volume disposed beneath a lid of the process chamber; and one or more inductive coils disposed above the lid to inductively couple RF energy into and to form a plasma in the processing volume above a substrate support disposed within the processing volume; wherein the lid is a dielectric window comprising a first side and an opposing second side that faces the processing volume, and wherein the lid has a dielectric coefficient that spatially varies to provide a varied power coupling of RF energy from the one or more inductive coils to the processing volume.

    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
    4.
    发明申请
    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT 有权
    综合滤波器安排在RF环境中的设备

    公开(公告)号：US20160149482A1

    公开(公告)日：2016-05-26

    申请号：US14555435

    申请日：2014-11-26

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Steve E. Babayan ,  Scott Edmonson ,  Phillip R. Sommer ,  Dan A. Marohl ,  Chris Blank

    IPC: H02M1/44 ,  H05B1/02 ,  H05B3/00 ,  H02J3/14

    CPC classification number: H05B3/0047 ,  H02J3/14 ,  H02J13/0075 ,  H02J2003/143 ,  H02M1/092 ,  H02M5/2576 ,  H05B1/0233 ,  Y02B70/3225 ,  Y02B90/2653 ,  Y04S20/222 ,  Y04S40/126

    Abstract: A system includes a plurality of elements that are to operate in a radio frequency (RF) environment. The system further includes a plurality of switching devices to operate in the RF environment, each of the plurality of switching devices to control power to at least one of the plurality of elements, wherein the plurality of switching devices are coupled to a power line that is to provide power from outside the RF environment. A filter is coupled to the power line to filter out RF noise introduced into the power line by the RF environment. The system further includes a converter, coupled to the one or more switching devices, to operate in the RF environment and to provide a non-conductive communication link between the one or more switching devices and a controller outside of the RF environment.

    Abstract translation: 系统包括要在射频（RF）环境中操作的多个元件。 该系统还包括多个开关装置，以在RF环境中操作，多个开关装置中的每一个切换装置用于控制多个元件中的至少一个的功率，其中多个开关装置耦合到电力线 从RF环境外部提供电力。 滤波器耦合到电力线以滤除通过RF环境引入电力线的RF噪声。 该系统还包括耦合到一个或多个开关装置的转换器，以在RF环境中工作并且在一个或多个开关装置与RF环境之外的控制器之间提供不导电的通信链路。

    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
    5.
    发明申请
    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT 有权

    公开(公告)号：US20210059018A1

    公开(公告)日：2021-02-25

    申请号：US17080579

    申请日：2020-10-26

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Steve E. Babayan ,  Scott Edmonson ,  Phillip R. Sommer ,  Dan A. Marohl ,  Chris Blank

    IPC: H05B3/00 ,  H02J3/14 ,  H05B1/02 ,  H02M5/257 ,  H02J13/00

    Abstract: A method includes generating, external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal. The method further includes converting the first signal into an alternative signal and transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system. The method further includes converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber. The method further includes controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal and controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal.

    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
    7.
    发明申请
    CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT 审中-公开

    公开(公告)号：US20180160475A1

    公开(公告)日：2018-06-07

    申请号：US15870488

    申请日：2018-01-12

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Steve E. Babayan ,  Scott Edmonson ,  Phillip R. Sommer ,  Dan A. Marohl ,  Chris Blank

    IPC: H05B3/00 ,  H05B1/02 ,  H02J13/00 ,  H02M5/257 ,  H02J3/14 ,  H02M1/092

    Abstract: A method includes generating, based on a process recipe, a first electrical control signal by a processing device external to a particular radio frequency (RF) environment. The method further includes converting the first electrical control signal into an alternative control signal, transmitting the alternative control signal to a converter within the particular RF environment over a non-conductive communication link, and converting the alternative control signal into a second electrical control signal by the converter. The method further includes controlling a first plurality of elements via one or more switching devices using the second electrical control signal. The method further includes generating, based on the process recipe, a third signal by the processing device and controlling a second plurality of elements disposed outside of the RF environment using the third signal. The first plurality of elements and the second plurality of elements are controlled substantially simultaneously based on the process recipe.

    Consolidated filter arrangement for devices in an RF environment
    8.
    发明授权
    Consolidated filter arrangement for devices in an RF environment 有权

    公开(公告)号：US10820378B2

    公开(公告)日：2020-10-27

    申请号：US15870488

    申请日：2018-01-12

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Steve E. Babayan ,  Scott Edmonson ,  Phillip R. Sommer ,  Dan A. Marohl ,  Chris Blank

    IPC: H05B3/68 ,  H05B3/00 ,  H02J3/14 ,  H05B1/02 ,  H02J13/00 ,  H02M5/257 ,  H02M1/092

    Abstract: A method includes generating, based on a process recipe, a first electrical control signal by a processing device external to a particular radio frequency (RF) environment. The method further includes converting the first electrical control signal into an alternative control signal, transmitting the alternative control signal to a converter within the particular RF environment over a non-conductive communication link, and converting the alternative control signal into a second electrical control signal by the converter. The method further includes controlling a first plurality of elements via one or more switching devices using the second electrical control signal. The method further includes generating, based on the process recipe, a third signal by the processing device and controlling a second plurality of elements disposed outside of the RF environment using the third signal. The first plurality of elements and the second plurality of elements are controlled substantially simultaneously based on the process recipe.

    Consolidated filter arrangement for devices in an RF environment
    9.
    发明授权
    Consolidated filter arrangement for devices in an RF environment 有权

    公开(公告)号：US10820377B2

    公开(公告)日：2020-10-27

    申请号：US15870373

    申请日：2018-01-12

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Steve E. Babayan ,  Scott Edmonson ,  Phillip R. Sommer ,  Dan A. Marohl ,  Chris Blank

    IPC: H05B3/68 ,  H05B3/00 ,  H02J3/14 ,  H05B1/02 ,  H02J13/00 ,  H02M5/257 ,  H02M1/092

    Abstract: A heating system includes a first plurality of heating elements disposed within an electrostatic chuck and an electrically conductive housing. The heating system further includes one or more switching devices to control temperatures output by the first plurality of heating elements. The heating system further includes a converter that is electrically coupled to the one or more switching devices and disposed within the electrically conductive housing. The electrically conductive housing and the first plurality of heating elements are to operate in a radio frequency (RF) environment. A second plurality of elements are to operate outside of the RF environment. The converter is to communicate with a controller outside of the RF environment via a non-conductive communication link. The controller is to receive a process recipe and is to control the first plurality of heating elements and the second plurality of elements substantially simultaneously based on the process recipe.

    SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
    10.
    发明申请
    SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM 审中-公开

    公开(公告)号：US20200051839A1

    公开(公告)日：2020-02-13

    申请号：US16656334

    申请日：2019-10-17

    Applicant: Applied Materials, Inc.

    Inventor： Phillip Criminale ,  Justin Phi ,  Dan A. Marohl ,  Sergio Fukuda Shoji ,  Brad L. Mays

    IPC: H01L21/67 ,  H01J37/32

    Abstract: A substrate carrier is described that uses a proportional thermal fluid delivery system. In one example the apparatus includes a heat exchanger to provide a thermal fluid to a fluid channel of a substrate carrier and to receive the thermal fluid from the fluid channel, the thermal fluid in the fluid channel to control the temperature of the carrier during substrate processing. A proportional valve controls the rate of flow of thermal fluid from the heat exchanger to the fluid channel. A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve in response to the measured temperature to adjust the rate of flow.

Patent Agency Ranking