公开(公告)号：US09184333B2

公开(公告)日：2015-11-10

申请号：US13791067

申请日：2013-03-08

Applicant: Applied Materials, Inc.

Inventor： Suketu Arun Parikh ,  Jen Shu ,  James M. Gee

IPC: H01L31/0224 ,  H01L31/18 ,  H01L21/67 ,  H01L31/0216 ,  H01L31/068

CPC classification number: H01L31/1864 ,  H01L21/67155 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521 ,  Y10T29/41

Abstract: A fabrication line includes a texturizing module configured to texture a substrate, an emitter module configured to form an emitter region, a passivation layer module configured to form a passivation layer, a barrier contact module configured to form a barrier contact region, a firing module configured to anneal the barrier contact region, a top metal contact module configured to form a top metal contact region, and a soldering module configured to solder the barrier contact region to the top metal contact region. The modules are integrated by one or more automated substrate handlers into a single fabrication line. A method for fabricating a solar cell includes sequentially, in an automated fabrication line: doping a dopant in a substrate; disposing a passivation layer; disposing and annealing a barrier metal paste to form a barrier contact; and disposing and annealing a metal contact paste to form a top metal contact region.

Abstract translation: 制造线包括被配置为纹理衬底的纹理化模块，被配置为形成发射极区域的发射器模块，被配置为形成钝化层的钝化层模块，被配置为形成屏障接触区域的阻挡接触模块，被配置为 将所述阻挡接触区域退火，配置成形成顶部金属接触区域的顶部金属接触模块以及被配置为将所述阻挡接触区域焊接到所述顶部金属接触区域的焊接模块。 这些模块由一个或多个自动衬底处理器集成到单个制造线中。 一种制造太阳能电池的方法包括在自动化生产线中依次进行：在衬底中掺杂掺杂剂; 设置钝化层; 处理和退火阻挡金属浆料以形成屏障接触; 并且配置和退火金属接触膏以形成顶部金属接触区域。