公开(公告)号：US12074010B2

公开(公告)日：2024-08-27

申请号：US17470294

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Michael R. Rice ,  Hanish Kumar Panavalappil Kumarankutty ,  Steven D. Marcus ,  Kirubanandan Naina Shanmugam ,  Sriharsha Dharmapura Sathyanarayanamurthy ,  Madhukar Krishna ,  Shivaprakash Padadayya Hiremath ,  Senthil Kumar Nattamai Subramanian ,  Sankar Menon Cherubala Pathayapura

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/458 ,  C23C16/46

CPC classification number: H01J37/3244 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4586 ,  C23C16/46 ,  C23C16/463 ,  H01J37/32357 ,  H01J37/32522 ,  H01J37/32724 ,  C23C16/4582

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.