公开(公告)号：US20240350994A1

公开(公告)日：2024-10-24

申请号：US18138367

申请日：2023-04-24

Applicant: Applied Materials, Inc.

Inventor： Christopher S. OLSEN ,  Sameh HELMY ,  Hansel LO ,  Eric Kihara SHONO

IPC: B01J6/00

CPC classification number: B01J6/008 ,  B01J2219/00594 ,  B01J2219/00959

Abstract: Systems and methods of orifice driven hydroxyl combustion oxidation include introducing a first gas via at least a first orifice into a processing chamber having a substrate disposed on a substrate support. A second gas is introduced into the processing chamber via a plurality of second orifices. The plurality of second orifices are oriented substantially perpendicular to the at least a first orifice. A radical is produced as a function of the first gas and the second gas while heating the chamber.

公开(公告)号：US20240360996A1

公开(公告)日：2024-10-31

申请号：US18139057

申请日：2023-04-25

Applicant: Applied Materials, Inc.

Inventor： Christopher S. OLSEN ,  Sameh HELMY ,  Hansel LO ,  Eric Kihara SHONO

IPC: F23D99/00 ,  C01B33/12 ,  H01L21/02

CPC classification number: F23D91/00 ,  C01B33/126 ,  H01L21/02164 ,  H01L21/0223 ,  F23D2900/14003

Abstract: Systems and methods for hydroxyl driven combustion include introducing a first gas via at least a first orifice into a processing chamber having a substrate disposed on a substrate support. A second gas is introduced into the processing chamber via a plurality of second orifices. The plurality of first orifices and the plurality of second orifices are oriented in an alternating pattern such that each second orifice of the plurality of second orifices is at least partially surrounded by at least a first orifice of the plurality of first orifices. A radical is produced as a function of the first gas and the second gas while heating the chamber.

公开(公告)号：US20240360559A1

公开(公告)日：2024-10-31

申请号：US18139103

申请日：2023-04-25

Applicant: Applied Materials, Inc.

Inventor： Christopher S. OLSEN ,  Sameh HELMY ,  Hansel LO ,  Eric Kihara SHONO

IPC: C23C16/455 ,  C23C16/458

CPC classification number: C23C16/45559 ,  C23C16/45517 ,  C23C16/45574 ,  C23C16/458

Abstract: A method and processing chamber for plenum driven hydroxyl combustion oxidation. A mixture is produced in a plenum. The mixture includes a first reactive gas injected from a first inlet and a second reactive gas injected from a second inlet. The mixture is injected towards a substrate of a processing chamber at a jet gas velocity greater than a flame gas velocity. A radical is produced as a function of the first gas and the second gas while heating the chamber.