公开(公告)号：US09557640B2

公开(公告)日：2017-01-31

申请号：US14656753

申请日：2015-03-13

Applicant: Board of Regents, The University of Texas System

Inventor： C. Grant Willson ,  Christopher Ellison ,  Michael Maher ,  Christopher Bates ,  Dustin Janes

IPC: G03F7/004 ,  G03F7/00 ,  G03F7/20 ,  C09D153/00 ,  G03F7/11 ,  B81C1/00

CPC classification number: G03F7/20 ,  B81C1/00031 ,  B81C2201/0149 ,  C09D153/00 ,  C09D153/005 ,  G03F7/0002 ,  G03F7/11 ,  G03F7/16

Abstract: A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

Abstract translation: 一种用于排序嵌段共聚物的方法，包括形成具有第一偏好模式的第一层; 以及在第一层的选定区域中提供反应剂，其将所选择的区域修改为第二偏好模式，其中所选择的区域限定保持第一偏好模式的第一层的其它区域，由此形成嵌段共聚物的取向层。

公开(公告)号：US20170139326A1

公开(公告)日：2017-05-18

申请号：US15409125

申请日：2017-01-18

Applicant: Board of Regents The University of Texas System

Inventor： C. Grant Willson ,  Christopher Ellison ,  Michael Maher ,  Christopher Bates ,  Dustin Janes

IPC: G03F7/20 ,  G03F7/16 ,  C09D153/00 ,  G03F7/11

CPC classification number: G03F7/20 ,  B81C1/00031 ,  B81C2201/0149 ,  C09D153/00 ,  C09D153/005 ,  G03F7/0002 ,  G03F7/11 ,  G03F7/16

Abstract: A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

公开(公告)号：US09823568B2

公开(公告)日：2017-11-21

申请号：US15409125

申请日：2017-01-18

Applicant: Board of Regents The University of Texas System

Inventor： C. Grant Willson ,  Christopher Ellison ,  Michael Maher ,  Christopher Bates ,  Dustin Janes

IPC: G03F7/004 ,  G03F7/20 ,  G03F7/11 ,  G03F7/16 ,  C09D153/00 ,  G03F7/00 ,  B81C1/00

CPC classification number: G03F7/20 ,  B81C1/00031 ,  B81C2201/0149 ,  C09D153/00 ,  C09D153/005 ,  G03F7/0002 ,  G03F7/11 ,  G03F7/16

Abstract: A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

公开(公告)号：US20150261090A1

公开(公告)日：2015-09-17

申请号：US14656753

申请日：2015-03-13

Applicant: Board of Regents, The University of Texas System

Inventor： C. Grant Willson ,  Christopher Ellison ,  Michael Maher ,  Christopher Bates ,  Dustin Janes

IPC: G03F7/20

CPC classification number: G03F7/20 ,  B81C1/00031 ,  B81C2201/0149 ,  C09D153/00 ,  C09D153/005 ,  G03F7/0002 ,  G03F7/11 ,  G03F7/16

Abstract: A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

Abstract translation: 一种用于排序嵌段共聚物的方法，包括形成具有第一偏好模式的第一层; 以及在第一层的选定区域中提供反应剂，其将所选择的区域修改为第二偏好模式，其中所选择的区域限定保持第一偏好模式的第一层的其它区域，由此形成嵌段共聚物的取向层。

公开(公告)号：US09040121B2

公开(公告)日：2015-05-26

申请号：US13761324

申请日：2013-02-07

Applicant: Board of Regents The University of Texas System

Inventor： C. Grant Willson ,  William Durand ,  Christopher John Ellison ,  Christopher Bates ,  Takehiro Seshimo ,  Julia Cushen ,  Logan Santos ,  Leon Dean ,  Erica Rausch

IPC: C23C16/44 ,  B29C43/32 ,  B81C1/00 ,  G03F7/00 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: C23C16/44 ,  B29C43/32 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/788 ,  Y10S977/809 ,  Y10S977/811 ,  Y10S977/839 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891 ,  Y10T428/24802 ,  Y10T428/31504

Abstract: Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.

Abstract translation: 描述了真空沉积的材料薄膜以产生与下面的嵌段共聚物膜的不同区域非优先相互作用的界面。 非优选界面防止形成润湿层并影响嵌段共聚物中结构域的取向。 沉积的聚合物的目的是在嵌段共聚物膜中产生可用作光刻图案的纳米结构特征。