Abstract:
The present invention provides a MEMS structure comprising confined sacrificial oxide layer and a bonded Si layer. Polysilicon stack is used to fill aligned oxide openings and MEMS vias on the sacrificial layer and the bonded Si layer respectively. To increase the design flexibility, some conductive polysilicon layer can be further deployed underneath the bonded Si layer to form the functional sensing electrodes or wiring interconnects. The MEMS structure can be further bonded to a metallic layer on top of the Si layer and the polysilicon stack.
Abstract:
A capacitive sensing array device of an electronic apparatus includes sensing electrodes, a shielding conductor layer, a coupling signal source, a constant voltage source and switch modules. The coupling signal source provides a coupling signal coupled to an object. The constant voltage source provides a constant voltage to the shielding conductor layer to form a stable vertical parasitic capacitor between the shielding conductor layer and each sensing electrode. Each switch module is electrically connected to the constant voltage source via the corresponding sensing electrode. When one sensing electrode is selected to perform sensing, the corresponding switch module is configured as an open-circuited state such that the selected sensing electrode is disconnected from the constant voltage source, while the other sensing electrodes are electrically connected to the constant voltage source to form a stable horizontal parasitic capacitor between the selected sensing electrode and the other sensing electrodes.
Abstract:
A device includes a semiconductor substrate, and a capacitive sensor having a back-plate, wherein the back-plate forms a first capacitor plate of the capacitive sensor. The back-plate is a portion of the semiconductor substrate. A conductive membrane is spaced apart from the semiconductor substrate by an air-gap. A capacitance of the capacitive sensor is configured to change in response to a movement of the polysilicon membrane.
Abstract:
A fingerprint sensing device includes a chip substrate, a plurality of first connecting pads and a flexible printed circuit board. The chip substrate has a plurality of fingerprint sensing cells. The first connecting pads are respectively disposed on the fingerprint sensing cells and exposed from a top surface of the chip substrate. The flexible printed circuit board is disposed above the chip substrate and has a plurality of signal transmission structures exposed from a bottom surface of the flexible printed circuit board. The fingerprint sensing cells are respectively electrically connected to the signal transmission structures, and a top surface of the flexible printed circuit board serves as a contact surface for a finger so that sensed fingerprint signals of the finger are transmitted to the fingerprint sensing cells through the signal transmission structures. A method of manufacturing the fingerprint sensing device is also disclosed.
Abstract:
An information sensing device includes a substrate, an information sensing chip mounted on and electrically connected to the substrate, at least one electroconductive structure mounted on and electrically connected to the substrate and disposed on one side of the information sensing chip, and a molding compound material partially surrounding the information sensing chip and the electroconductive structure to expose a chip surface of the information sensing chip and a first surface of the electroconductive structure. Thus, an electrostatic charge approaching the information sensing device is conducted from the electroconductive structure to the substrate. The chip surface is to be in contact with an object to sense an image of the object.
Abstract:
A semiconductor integrated circuit (IC) chip includes an IC chip body and a nano-structure-surface passivation film. The IC chip body has at least one surface. The nano-structure-surface passivation film is formed on the at least one surface. The nano-structure-surface passivation film including nano-particles and a carrier resin protects the IC chip body from encountering any external interference.
Abstract:
A composite wafer semiconductor device includes a first wafer and a second wafer. The first wafer has a first side and a second side, and the second side is substantially opposite the first side. The composite wafer semiconductor device also includes an isolation set is formed on the first side of the first wafer and a free space is etched in the isolation set. The second wafer is bonded to the isolation set. A floating structure, such as an inertia sensing device, is formed in the second wafer over the free space. In an embodiment, a surface mount pad is formed on the second side of the first wafer. Then, the floating structure is electrically coupled to the surface mount pad using a through silicon via (TSV) conductor.
Abstract:
A microelectromechanical system (MEMS) device may include a MEMS structure above a first substrate. The MEMS structure comprising a central static element, a movable element, and an outer static element. A portion of bonding material between the central static element and the first substrate. A second substrate above the MEMS structure, with a portion of a dielectric layer between the central static element and the second substrate. A supporting post comprises the portion of bonding material, the central static element, and the portion of dielectric material.
Abstract:
A portable encrypted storage device with biometric identification includes a host interface connected to a terminal host, a controller connected to the host interface, a memory module, a fingerprint sensor, an encryption/decryption chip and a portable large-capacity storage unit connected to the controller. The controller communicates with the host by handshakes and enables the host to automatically run a fingerprint identification driver and application program from the memory module to the host. The host receives an instruction from the user through the driver and program, and informs the controller to control the fingerprint sensor to read to-be-recognized fingerprint data of the user. The host judges whether or not the to-be-recognized fingerprint data substantially matches with a fingerprint template stored in the memory module. If a match occurs, the host can recognize and access the hidden portable large-capacity storage unit through the encryption/decryption chip.