公开(公告)号：US11898844B2

公开(公告)日：2024-02-13

申请号：US17063179

申请日：2020-10-05

Applicant: CORNELL UNIVERSITY

Inventor： Amit Lal ,  Benyamin Davaji ,  Visarute Pinrod

IPC: G01C19/5698 ,  H05K1/03 ,  H05K1/02

CPC classification number: G01C19/5698 ,  H05K1/0296 ,  H05K1/0306 ,  H05K2201/0175 ,  H05K2201/09227

Abstract: A rotation sensor, including: (i) a substrate having a top surface and an interior bottom surface; (ii) an electrode module positioned on the top surface of the substrate and including a first set of electrodes configured to generate a bulk acoustic wave directly into the substrate, wherein at least a portion of the bulk acoustic wave is transduced into a shear wave upon reflection on the interior bottom surface of the substrate without use of a reflector, and a second set of electrodes configured to detect the shear wave; and (iii) a controller in communication with the first set and second set of electrodes and configured to determine, based on the detected shear wave, an effect of Coriolis force on the sensor.

公开(公告)号：US20210293541A1

公开(公告)日：2021-09-23

申请号：US17063179

申请日：2020-10-05

Applicant: CORNELL UNIVERSITY

Inventor： Amit Lal ,  Benyamin Davaji ,  Visarute Pinrod

IPC: G01C19/5698 ,  H05K1/03 ,  H05K1/02

Abstract: A rotation sensor, including: (i) a substrate having a top surface and an interior bottom surface; (ii) an electrode module positioned on the top surface of the substrate and including a first set of electrodes configured to generate a bulk acoustic wave directly into the substrate, wherein at least a portion of the bulk acoustic wave is transduced into a shear wave upon reflection on the interior bottom surface of the substrate without use of a reflector, and a second set of electrodes configured to detect the shear wave; and (iii) a controller in communication with the first set and second set of electrodes and configured to determine, based on the detected shear wave, an effect of Coriolis force on the sensor.