SPECTRALLY SELECTIVE SEMICONDUCTOR DIELECTRIC PHOTONIC SOLAR THERMAL ABSORBER
    2.
    发明申请
    SPECTRALLY SELECTIVE SEMICONDUCTOR DIELECTRIC PHOTONIC SOLAR THERMAL ABSORBER 审中-公开
    光谱选择性半导体电介质光电太阳能热吸收器

    公开(公告)号:US20160320096A1

    公开(公告)日:2016-11-03

    申请号:US15142802

    申请日:2016-04-29

    CPC classification number: C23C14/0694 C23C14/34 F24S70/20 F24S70/30 Y02E10/40

    Abstract: A solar thermal absorber including a spectrally selective filter comprising a stack of dielectric layers and one or more semiconductor absorber layers. The dielectric layers are transparent to infrared radiation and have a refractive index contrast, and the semiconductor absorber layers have a band gap, such that the semiconductor absorber layers absorb at least a portion of the solar spectrum and the stack reflects infrared radiation.

    Abstract translation: 一种太阳能热吸收器,其包括光谱选择性滤光器,其包括一叠电介质层和一个或多个半导体吸收层。 电介质层对红外线辐射是透明的,并且具有折射率对比度,并且半导体吸收层具有带隙,使得半导体吸收层吸收太阳光谱的至少一部分并且反射红外辐射。

    ATOMIC LAYER ETCHING OF MGO-DOPED LITHIUM NIOBATE USING SEQUENTIAL EXPOSURES OF H2 AND SF6/ARGON PLASMAS

    公开(公告)号:US20250120318A1

    公开(公告)日:2025-04-10

    申请号:US18908317

    申请日:2024-10-07

    Abstract: Lithium niobate (LiNbO3, LN) is a ferroelectric crystal of interest for integrated photonics owing to its large second-order optical nonlinearity and the ability to impart periodic poling via an external electric field. However, on-chip device performance based on thin-film lithium niobate (TFLN) is presently limited by propagation losses arising from surface roughness on the nano- and microscale. Atomic layer etching (ALE) can smooth these features and thereby increase photonic performance. In one embodiment disclosed herein, an isotropic ALE process for x-cut MgO-doped LN uses sequential exposures of H2 and SF6/Ar plasmas. We observed an etch rate of 1.59±0.02 nm/cycle with a synergy of 96.9%. ALE can be achieved with SF6/O2 or Cl2/BCl3 plasma exposures in place of the SF6/Ar plasma step with synergies of 99.5% and 91.5% respectively. The process decreased the sidewall surface roughness of TFLN waveguides etched by physical Ar+ milling by 30% without additional wet processing.

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